Method of manufacturing semiconductor devices including formation of adhesion enhancement layer

1. A method of manufacturing a semiconductor device, comprising:

forming a first dielectric layer over a lower conductive pattern disposed over a substrate;

forming a conductive contact in the first dielectric layer such that the conductive contact passes through the first dielectric layer and contacts the lower conductive pattern, and an upper surface of the conductive contact is exposed from the first dielectric layer;

forming an adhesion enhancement layer on a surface of the first dielectric layer except for the upper surface of the conductive contact, wherein the adhesion enhancement layer is in contact with a part of a side face of the conductive contact; and

forming a second dielectric layer on the adhesion enhancement layer and on the upper surface of the conductive contact, wherein:

the second dielectric layer includes an aluminum nitride based material, and

the first dielectric layer is made of silicon nitride.

2. The method of claim 1 , wherein:

the second dielectric layer is made of aluminum nitride.

3. The method of claim 2 , wherein the adhesion enhancement layer is made of silicon oxide or silicon oxynitride.

4. The method of claim 3 , further comprising oxidizing the second dielectric layer.

5. The method of claim 3 , wherein the adhesion enhancement layer is formed by a thermal oxidation process of treating the surface of the first dielectric layer made of silicon nitride with an oxygen containing gas.

6. The method of claim 5 , wherein the oxygen containing gas includes at least one selected from the group consisting of N 2 O, O 2 , ozone and CO 2 .

7. The method of claim 6 , wherein during the treating the surface of the first dielectric layer with the oxygen containing gas, the substrate is heated at a temperature in a range from 250° C. to 400° C., and the oxygen containing gas is applied at a pressure in a range from 0.5 Torr to 20 Torr.

8. The method claim 3 , wherein a thickness of the adhesion enhancement layer is in a range from 1 nm to 5 nm.

9. The method of claim 3 , wherein the adhesion enhancement layer is formed by a plasma oxidation process of treating the surface of the first dielectric layer made of silicon nitride with oxygen containing plasma.

10. The method of claim 3 , wherein the conductive contact is made of Co.

11. A method of manufacturing a semiconductor device, comprising:

forming a first nitride-based dielectric layer over a semiconductor device structure on a substrate;

forming a conductive pattern in the first nitride-based dielectric layer such that an upper surface of the conductive pattern is exposed from the first nitride-based dielectric layer;

forming an adhesion enhancement layer over the first nitride-based dielectric layer except for the upper surface of the conductive pattern;

forming a second nitride-based dielectric layer over the adhesion enhancement layer and on the upper surface of the conductive pattern; and

at least partially oxidizing the second nitride-based dielectric layer,

wherein the first nitride-based dielectric layer is made of a different material than the second nitride-based dielectric layer.

12. The method of claim 11 , wherein the first nitride-based dielectric layer is made of silicon nitride.

13. The method of claim 12 , wherein the conductive pattern includes tungsten.

14. The method of claim 12 , wherein the conductive pattern includes cobalt.

15. The method of claim 13 , wherein the first nitride-based dielectric layer is made of Si x O y N z , where y<z.

16. The method of claim 12 , wherein:

the second nitride-based dielectric layer is made of aluminum nitride.

17. A method of manufacturing a semiconductor device, the method comprising:

forming a first conductive contact embedded in a first insulating layer;

forming a second insulating layer over the first conductive contact;

forming a first opening in the second insulating layer to at least partially expose the first conductive contact;

filling the first opening by a first conductive material to form a second conductive contact in contact with the first conductive contact, wherein an upper surface of the second conductive contact is exposed from the second insulating layer;

forming an adhesion enhancement layer on the second insulating layer except for the upper surface of the second conductive contact;

forming a nitride-based insulating layer on the adhesion enhancement layer and on the upper surface of the second conductive contact;

oxidizing the nitride-based insulating layer;

forming a third insulating layer on the oxidized nitride-based insulating layer;

forming a second opening by etching the third insulating layer such that the etching stops on the oxidized nitride-based insulating layer;

removing the oxidized nitride-based insulating layer; and

filling the second opening by a second conductive material.

18. The method of claim 17 , wherein:

the second insulating layer is made of silicon nitride, and

the nitride-based insulating layer is made of aluminum nitride.

19. The method of claim 18 , wherein the first conductive contact is formed on a source/drain epitaxial layer.

20. The method of claim 18 , wherein the first conductive contact is formed on a gate electrode.