Vertical selector stt-MRAM architecture
A magnetic memory array having a source-plane electrically connected with an array of channel selectors in two-dimensions. The array of channel selectors can be arranged in rows and columns with both the rows and columns being electrically connected with a source-plane. A memory element such as a two terminal resistive switching memory element can be electrically connected with each of the channel selectors. The source-plane can include a doped region formed in a surface of a semiconductor substrate and may also include an electrically conductive layer formed on the doped region. The use of such a planar, two-dimensional source-plane allows for greatly increased data density by eliminating the need to form separate source-line source lines for individual rows of channel selectors.
1. A memory array, comprising:
an electrically conductive source-plane;
an array of vertical semiconductor channel structures; and
a plurality of memory elements, each of the memory elements being electrically connected one of the vertical semiconductor channel structures; wherein
the vertical semiconductor channel structures are formed on and connected with the source-plane in two dimensions;
wherein the source-plane comprises an n-doped region formed in a surface of a semiconductor substrate.
2. The memory array as in claim 1 , wherein the array of vertical semiconductor channel structures is arranged as a plurality of rows and a plurality of columns that are generally perpendicular with the rows.
3. The memory array as in claim 1 , further comprising an electrically conductive contact structure connecting each of the memory element structures with one of the vertical semiconductor channel structures.
4. The memory array as in claim 1 , wherein the source-plane further a layer of electrically conductive metal formed over the n-doped region of the semiconductor substrate.
5. The memory array as in claim 1 , further comprising an electrically conductive word-line connected with each of the vertical semiconductor channel structures.
6. The memory array as in claim 1 further comprising an electrically conductive bit-line connected with each of the memory elements at an end of the memory element that is opposite the vertical semiconductor channel structure.
7. The memory array as in claim 1 , wherein the source-plane is electrically connected with a voltage source.
8. The memory array as in claim 1 , wherein the source-plane is electrically connected with a ground.
9. The memory array as in claim 1 , wherein the memory elements are two terminal resistive switching memory elements.
10. A memory array, comprising:
an electrically conductive source-plane;
an array of vertical semiconductor channel structures; and
a plurality of memory elements, each of the memory elements being electrically connected one of the vertical semiconductor channel structures; wherein
the vertical semiconductor channel structures are formed on and connected with the source-plane in two dimensions;
wherein each of the vertical semiconductor channel structures includes a semiconductor column structure and a gate dielectric layer surrounding the semiconductor column structure, wherein the semiconductor column structure is formed by selective epitaxial growth.
11. A memory array, comprising;
a two-dimensional array of channel selectors arranged in rows and columns;
a two-dimensional source-plane electrically connected with the two-dimensional array of channel selectors in both the row and column direction; and
a plurality of memory element structures formed on the two-dimensional array of channel selectors, wherein the memory element structures are two terminal resistive switching memory elements;
wherein the channel structures include a semiconductor formed by selective epaxial growth.
12. The memory array as in claim 11 , wherein the two-dimensional source-plane is formed in a plane on a surface of a semiconductor substrate.
13. The memory array as in claim 11 , wherein the two-dimensional source-plane is formed in a two-dimensional plane on a semiconductor substrate and further comprises a doped region formed in a surface of the semiconductor substrate and a layer of electrically conductive metal formed on the doped region.
14. The memory array as in claim 11 , wherein the two-dimensional source-plane is electrically connected with a voltage source.
15. The memory array as in claim 11 , wherein the two-dimensional source-plane is electrically connected with a ground.
16. The memory array as in claim 11 , further comprising an electrically conductive bit-line connected with each of the magnetic memory elements at an end opposite the associated channel selector.
17. The memory array as in claim 11 , further comprising:
a plurality of electrically conductive word lines, each electrically conductive word line being electrically connected with a row of the channel structures; and
a plurality of bit lines, each of the bit lines being electrically connected with a column of magnetic memory elements, wherein the column is generally orthogonal with the row.