SiC chemical vapor deposition apparatus and method of manufacturing SiC epitaxial wafer
A SiC chemical vapor deposition apparatus is provided, including: a furnace body inside of which a growth space is formed; and a mounting table which is positioned on a lower portion of the growth space and has a mounting surface on which a SiC wafer is mounted, in which the furnace body is separated into a plurality of members in a vertical direction substantially orthogonal to the mounting table, the plurality of members includes a first portion and a second portion, the first portion includes a protruding part that protrudes in an outer peripheral direction, the second portion includes a hook part on which the protruding part is hung, and the first portion and the second portion are connected to each other by hanging the hook part on the protruding part.
1. A SiC chemical vapor deposition apparatus, comprising:
a furnace body inside of which a growth space is formed; and
a mounting table which is positioned on a lower portion of the growth space and has a mounting surface on which a SiC wafer is mounted,
wherein the furnace body is separated into a plurality of members in a vertical direction substantially orthogonal to the mounting table,
the plurality of members includes a first portion having a main outer circumferential surface and a second portion having a main outer circumferential surface,
the first portion includes a protruding part that protrudes in an outer peripheral direction from the main outer circumferential surface of the first portion,
the second portion includes a hook part that protrudes in an outer peripheral direction from the main outer circumferential surface of the second portion on which the protruding part is hung, and
the first portion and the second portion are connected to each other by hanging the hook part on the protruding part.
2. The SiC chemical vapor deposition apparatus according to claim 1 ,
wherein the furnace body is separated into a furnace body upper part and a furnace body lower part,
the first portion is the furnace body lower part, and
the second portion is the furnace body upper part.
3. The SiC chemical vapor deposition apparatus according to claim 1 ,
wherein the protruding part is positioned at an upper end of the first portion, and
the hook part is positioned at a lower end of the second portion.
4. The SiC chemical vapor deposition apparatus according to claim 1 ,
wherein the hook part is a fitting part that fits the protruding part, and
the fitting part is a portion recessed in the outer peripheral direction, in an inner surface of the furnace body upper part.
5. The SiC chemical vapor deposition apparatus according to claim 1 ,
wherein a thickness of the furnace body is 0.5 mm or more and 10 mm or less.
6. The SiC chemical vapor deposition apparatus according to claim 1 ,
wherein in the furnace body, an inner wall of the furnace body lower part and an inner wall of the furnace body upper part are substantially flush with each other.
7. The SiC chemical vapor deposition apparatus according to claim 1 ,
wherein the furnace body lower part is provided with heating device.
8. A method of manufacturing a SiC epitaxial wafer using the SiC chemical vapor deposition apparatus according to claim 1 .