Semiconductor device with a radiation sensing region and method for forming the same
A semiconductor device includes a semiconductor substrate, a radiation-sensing region, at least one isolation structure, and a doped passivation layer. The radiation-sensing region is present in the semiconductor substrate. The isolation structure is present in the semiconductor substrate and adjacent to the radiation-sensing region. The doped passivation layer at least partially surrounds the isolation structure in a substantially conformal manner.
1. A device comprising:
a semiconductor substrate having a first surface and a second surface opposite to the first surface;
a first isolation trench in the semiconductor substrate, the first isolation trench extending from the first surface of the semiconductor substrate toward the second surface of the semiconductor substrate;
an N-type region in the semiconductor substrate, the N-type region being adjacent the first isolation trench; and
a P-doped region in the semiconductor substrate, wherein a first portion of the P-doped region is interposed between the N-type region and the first isolation trench, a second portion of the P-doped region extends along the first surface of the semiconductor substrate, and a third portion of the P-doped region extends along the second surface of the semiconductor substrate.
2. The device of claim 1 , wherein the N-type region is spaced apart from the second portion of the P-doped region.
3. The device of claim 1 , wherein the semiconductor substrate is a P-type semiconductor substrate.
4. The device of claim 3 , wherein the P-doped region has a greater concentration of P-type dopants than the P-type semiconductor substrate.
5. The device of claim 1 , wherein a portion of the semiconductor substrate is interposed between the N-type region and the second portion of the P-doped region.
6. The device of claim 1 , wherein a depth of the first isolation trench is between 0.25 μm and about 4 μm.
7. The device of claim 1 , wherein the first isolation trench has a sloped sidewall.
8. A semiconductor device comprising:
a P-type semiconductor substrate, the P-type semiconductor substrate having a first surface and a second surface opposite to the first surface;
a radiation-sensing region in the P-type semiconductor substrate, the radiation-sensing region comprising an N-doped region of the P-type semiconductor substrate, a first surface of the radiation-sensing region being substantially parallel with the first surface of the P-type semiconductor substrate, a second surface of the radiation-sensing region being spaced apart from the second surface of the P-type semiconductor substrate, the first surface of the radiation-sensing region being opposite to the second surface of the radiation-sensing region;
an isolation structure in the P-type semiconductor substrate, the isolation structure extending from the second surface of the P-type semiconductor substrate into the P-type semiconductor substrate; and
a P-doped region in the P-type semiconductor substrate, wherein a first portion of the P-doped region extends along a sidewall of the isolation structure, and wherein a second portion of the P-doped region extends along the second surface of the P-type semiconductor substrate.
9. The semiconductor device of claim 8 , wherein a third portion of the P-doped region extends along a bottom surface of the isolation structure.
10. The semiconductor device of claim 8 , wherein a third portion of the P-doped region extends along the first surface of the P-type semiconductor substrate.
11. The semiconductor device of claim 8 , wherein the second portion of the P-doped region is separated from the radiation-sensing region by a portion of the P-type semiconductor substrate.
12. The semiconductor device of claim 8 , wherein the isolation structure extends into the P-type semiconductor substrate to a first depth, and wherein the first depth is between 0.25 μm and about 4 μm.
13. The semiconductor device of claim 8 , wherein a width of the isolation structure decreases as the isolation structure extends from the second surface of the P-type semiconductor substrate into the P-type semiconductor substrate.
14. The semiconductor device of claim 8 , wherein the P-doped region has a greater concentration of P-type dopants than the P-type semiconductor substrate.
15. An image sensor comprising:
a semiconductor substrate having a first conductivity type;
a radiation-sensing region in the semiconductor substrate, the radiation-sensing region comprising a doped region having a second conductivity type, wherein the second conductivity type is opposite to the first conductivity type;
a first isolation structure in the semiconductor substrate, the first isolation structure extending into the radiation-sensing region;
a second isolation structure in the semiconductor substrate adjacent the first isolation structure, the second isolation structure extending into the radiation-sensing region; and
a doped layer having the first conductivity type, a first portion of the doped layer extending along a sidewall of the first isolation structure, a second portion of the doped layer extending along a sidewall of the second isolation structure, a third portion of the doped layer extending from the first portion of the doped layer to the second portion of the doped layer, wherein the third portion of the doped layer is spaced apart from the radiation-sensing region.
16. The image sensor of claim 15 , wherein a portion of the semiconductor substrate is interposed between the third portion of the doped layer and the radiation-sensing region.
17. The image sensor of claim 15 , wherein the first conductivity type is P-type and the second conductivity type is N-type.
18. The image sensor of claim 15 , wherein the sidewall of the first isolation structure is a sloped sidewall.
19. The image sensor of claim 15 , wherein the first isolation structure comprises a high-k dielectric material.
20. The image sensor of claim 15 , wherein the first isolation structure has a trapezoidal shape.