IP Library Granted Patent US 11,127,647
Granted Patent B2
US 11,127,647 · App. 16/702,854 · Granted Sep 21, 2021

Semiconductor devices and related methods

Inventors: Jin Suk Jeong (Incheon, KR); Min Jae Kong (Seoul, KR); Hyun Hye Jung (Incheon, KR)
Assignee: Amkor Technology Singapore Holding PTE. LTD
H01L23/3128H01L21/561H01L21/568H01L23/552H01L25/00
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Quick Facts
Patent No.
US 11,127,647
App. No.
16/702,854
Granted
Sep 21, 2021
Kind
B2
Abstract

In one example, a semiconductor device, comprising a substrate having a top side and a bottom side, an electronic device on the top side of the substrate, a first encapsulant on the top side of the substrate contacting a side of the electronic device, a second encapsulant on the bottom side of the substrate, wherein the second encapsulant includes an undercut at an end of the second encapsulant, and a cover layer comprising a top cover on a top side of the first encapsulant and a side cover on a side of the first encapsulant and a side of the substrate, wherein the side cover extends adjacent to the undercut. Other examples and related methods are also disclosed herein.

Claims (37)

1. A semiconductor device, comprising:

a substrate having a top side and a bottom side;

an electronic device on the top side of the substrate;

a first encapsulant on the top side of the substrate contacting a side of the electronic device;

a second encapsulant on the bottom side of the substrate, wherein the second encapsulant includes an undercut at an end of the second encapsulant, wherein the undercut extends from a lateral side of the second encapsulant to a bottom side of the second encapsulant; and

a cover layer comprising a top cover on a top side of the first encapsulant and a side cover on a side of the first encapsulant and a side of the substrate, wherein the side cover extends adjacent to the undercut.

2. The semiconductor device of claim 1 , wherein the undercut comprises a horizontal ledge that is parallel with a bottom surface of the substrate.

3. The semiconductor device of claim 2 , wherein the cover layer comprises an undercut cover that covers a portion of the horizontal ledge.

4. The semiconductor device of claim 1 , wherein the undercut comprises an angular ledge that is slanted with respect to a bottom surface of the substrate the substrate.

5. The semiconductor device of claim 4 , wherein the angular ledge is at an acute angle with respect to a bottom surface of the substrate.

6. The semiconductor device of claim 4 , wherein the cover layer comprises an undercut cover that covers a portion of the angular ledge.

7. The semiconductor device of claim 1 , wherein the undercut comprises a curved surface.

8. The semiconductor device of claim 7 , wherein the curved surface is concave.

9. The semiconductor device of claim 1 , wherein the undercut comprises multiple ledges.

10. The semiconductor device of claim 9 , wherein the cover layer comprises an undercut cover that covers a portion of one of the multiple ledges and leaves a portion of a second one of the multiple ledges uncovered.

11. The semiconductor device of claim 1 , further comprising an additional electronic device on the bottom side of the substrate, wherein the second encapsulant contacts a side of the additional electronic device.

12. A method to manufacture a semiconductor device, comprising:

providing a substrate having a top side and a bottom side;

providing a first electronic device on the top side of the substrate and a second electronic device on the bottom side of the substrate;

providing a first encapsulant on the top side of the substrate contacting a side of the first electronic device, and a second encapsulant on the bottom side of the substrate contacting a side of the second electronic device;

providing an undercut at an end of the second encapsulant, wherein the undercut extends from a lateral side of the second encapsulant to a bottom side of the second encapsulant;

attaching a carrier to the bottom side of the second encapsulant;

providing a cover layer on a top side of the first encapsulant, on a side of the first encapsulant, on a side of the substrate, and on a portion of the carrier; and

removing the carrier and a portion of the cover layer on the portion of the carrier, wherein the cover layer remains adjacent to the undercut after the removing.

13. The method of 12 , wherein said attaching the carrier includes providing a fillet that extends into and at least partially covers the undercut, wherein the cover layer covers the fillet.

14. The method of claim 13 , wherein the fillet is outwardly slanted adjacent the undercut.

15. The method of claim 12 , wherein the cover layer covers a vertical sidewall of the second encapsulant between the undercut and the substrate.

16. The method of claim 13 , wherein the fillet fully covers the undercut.

17. A semiconductor device, comprising:

a substrate having a top side and a bottom side;

an electronic device on the top side of the substrate;

a first encapsulant portion on the top side of the substrate and a second encapsulant portion on the bottom side of the substrate, wherein the first encapsulant portion contacts a side of the electronic device;

an undercut in the second encapsulant portion, wherein the undercut extends from a lateral side of the second encapsulant portion to the bottom side of the second encapsulant portion; and

a shield on a top side of the first encapsulant portion, on a lateral side of the second encapsulant portion, and extending adjacent to the undercut.

18. The semiconductor device of claim 17 , wherein an end of the shield covers a portion of the undercut.

19. The semiconductor device of claim 17 , wherein part of the second encapsulant portion is between the substrate and the undercut.

20. The semiconductor device of claim 17 , further comprising an additional electronic device on the bottom side of the substrate, wherein the second encapsulant portion contacts a side of the additional electronic device.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 7, 2020
From: AMKOR TECHNOLOGY KOREA, INC.
To: AMKOR TECHNOLOGY SINGAPORE HOLDING PTE. LTD.
Reel/Frame 053717/0495 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 4, 2019
From: JEONG, JIN SUK; KONG, MIN JAE; JUNG, HYUN HYE
To: AMKOR TECHNOLOGY KOREA, INC.
Reel/Frame 051178/0663 →
Continuity (1)
Related Publication 20210175140A1 · Jun 10, 2021