Etching method and substrate processing apparatus

1. A method of etching a substrate including an etching film and a mask formed on the etching film, the mask including a first pattern of a first recess having a first opening and a second pattern of a second recess having a second opening, the method comprising:

a) etching the etching film to a predetermined depth;

b) depositing a protective film on the mask after a); and

c) etching the etching film after b); wherein

the first opening is smaller than the second opening, and

as a result of performing b), the first opening of the first pattern is clogged and the second opening of the second pattern is not clogged.

2. The method according to claim 1 , wherein, in c), the etching film is etched in the second pattern of the second recess of the second opening while the first opening of the first pattern is clogged.

3. The method according to claim 1 , wherein in b), the protective film is deposited such that a deposition amount (D) of the protective film deposited on a side wall of the first pattern and a side wall of the second pattern satisfies an inequality of CD 1 ≤2×D <CD 2 ,

wherein CD 1 is a diameter or width of the first recess, and CD 2 is a diameter or width of the second recess.

4. The method according to claim 1 , wherein in b), the protective film is deposited such that a deposition amount (D 1 ) of the protective film deposited on a side wall of the first pattern and a deposition amount (D 2 ) of the protective film deposited on a side wall of the second pattern satisfy inequalities of

CD 1≤2× D 1 and

2× D 2 < CD 2 ,

wherein CD 1 is a diameter or width of the first recess, and CD 2 is a diameter or width of the second recess.

5. The method according to claim 1 , wherein in b), an amount of the protective film deposited on a bottom of a recess of the etching film corresponding to the second pattern is less than an amount of the protective film deposited on an upper surface or an upper side wall of the second pattern.

6. The method according to claim 1 , wherein in b), a shape of the protective film deposited on a side wall of the first pattern and on a side wall of the second pattern is an overhung shape.

7. The method according to claim 1 , further comprising:

d) repeating b) and c) at least once.

8. The method according to claim 1 , wherein the predetermined depth is etching depth of a recess formed in the etching film that is etched in accordance with the first pattern.

9. The method according to claim 1 , wherein the substrate further includes a first underlayer and a second underlayer in the etching film, the first underlayer is below the first pattern, the second underlayer is below the second pattern, and a thickness of the etching film between a bottom of the first pattern and the first underlayer is less than a thickness of the etching film between a bottom of the second pattern and the second underlayer.

10. The method according to claim 9 , wherein etching depth of the etching film etched in the first pattern is less than the thickness of the etching film between the bottom of the second pattern and the second underlayer.

11. The method according to claim 1 , wherein

the substrate further includes a first underlayer and a second underlayer in the etching film,

the first underlayer is below the first pattern,

the second underlayer is below the second pattern, and

a thickness of the etching film between a bottom of the first pattern and the first underlayer is equal to a thickness of the etching film between a bottom of the second pattern and the second underlayer.

12. The method according to claim 11 , wherein etching depth of the etching film etched in the first pattern is equal to the thickness of the etching film between the bottom of the second pattern and the second underlayer.

13. The method according to claim 11 , wherein etching depth of the etching film etched in the first pattern is different from the thickness of the etching film between the bottom of the second pattern and the second underlayer.

14. The method according to claim 9 , wherein the first underlayer and the second underlayer are etching stop layers.

15. The method according to claim 1 , wherein the protective film deposited in b) has selectivity with respect to the etching film.

16. The method according to claim 1 , wherein a), b), and c) are performed without exposing the substrate to air.

17. The method according to claim 16 , wherein a), b), and c) are performed in a same chamber or in a same processing system.