Integrated transformer
An integrated transformer includes a primary winding and a secondary winding each having a spiral planar arrangement coils. A dielectric portion of dielectric material is interposed between the primary winding and the secondary winding. A field plate winding is electrically coupled with the primary winding. The field plate winding includes at least one field plate coil having a first lateral extension greater than a second lateral extension of a primary outer coil of the primary winding. The field plate coil is superimposed in plan view to the primary outer coil of the primary winding.
1. An integrated transformer, comprising:
a primary winding;
a secondary winding;
wherein each of the primary and secondary windings is made of a metallic material and has a spiral planar arrangement comprising a corresponding plurality of coils; and
a dielectric portion of dielectric material interposed between the primary winding and the secondary winding;
an attenuation layer having a dielectric coefficient greater than a dielectric coefficient of the dielectric portion, said attenuation layer positioned between an upper surface of the dielectric portion and a lower surface of the coils of the primary winding; and
a field plate winding electrically coupled with the primary winding, wherein the primary winding is positioned between the field plate winding and the secondary winding;
wherein the field plate winding comprises at least one field plate coil having a lateral extension greater than a lateral extension of a primary outer coil of the primary winding with the at least one field plate coil overlapping in plan view the primary outer coil of the primary winding, the field plate winding being configured to mutually separate equipotential surfaces of an operating electric field at a secondary winding facing edge of the primary outer coil of the primary winding.
2. The integrated transformer according to claim 1 , further comprising an additional attenuation layer which surrounds side surfaces and top surfaces of the coils of the primary winding.
3. The integrated transformer according to claim 2 , wherein a lower surface of the additional attenuation layer is in contact with the upper surface of the attenuation layer.
4. An integrated transformer, comprising:
a primary winding;
a secondary winding;
wherein each of the primary and secondary windings is made of a metallic material and has a spiral planar arrangement comprising a corresponding plurality of coils; and
a dielectric portion of dielectric material having an upper surface and a lower surface; and
an attenuation layer having a dielectric coefficient greater than a dielectric coefficient of the dielectric portion, said attenuation layer having a lower surface in contact with the upper surface of the dielectric portion and having an upper surface in contact with a lower surface of the coils of the primary winding;
wherein the secondary winding is positioned below the lower surface of the dielectric portion; and
a field plate winding electrically coupled with the primary winding, wherein the primary winding is positioned between the field plate winding and the secondary winding;
wherein the field plate winding comprises at least one field plate coil having a lateral extension greater than a lateral extension of a primary outer coil of the primary winding with the at least one field plate coil overlapping in plan view the primary outer coil of the primary winding, the field plate winding being configured to mutually separate equipotential surfaces of an operating electric field at a secondary winding facing edge of the primary outer coil of the primary winding.
5. The integrated transformer according to claim 4 , further comprising an additional attenuation layer which surrounds side surfaces and top surfaces of the coils of the primary winding.
6. The integrated transformer according to claim 5 , wherein a lower surface of the additional attenuation layer is in contact with the upper surface of the attenuation layer.
7. An apparatus, comprising:
a semiconductor substrate;
a plurality of metallization layers over said semiconductor substrate, wherein each metallization layer includes a dielectric material and an electrical element;
an integrated transformer, comprising:
a first winding at a lower-most one of the metallization layers;
a second winding at an upper-most one of the metallization layers, wherein at least one metallization layer is between the lower-most and upper-most metallization layers;
wherein each of the first and second windings has a spiral planar arrangement comprising a corresponding plurality of coils; and
an attenuation layer having a dielectric coefficient greater than a dielectric coefficient of the dielectric material for said metallization layers, said attenuation layer positioned in direct contact with a bottom surface of the second winding and in direct contact with an upper surface of the dielectric material for the upper-most metallization layer.
8. The apparatus according to claim 7 , further comprising an additional attenuation layer which surrounds side surfaces and top surfaces of the coil for the second winding.