Polishing slurry and method of manufacturing semiconductor device
A polishing slurry including a hydrophilic nanocarbon particle having a nitrogen-containing functional group, and a weight ratio of a nitrogen element relative to a carbon element of the hydrophilic nanocarbon particle, the weight ratio expressed as N/C×100% is greater than or equal to about 5 wt %, and a method of manufacturing a semiconductor device using the polishing slurry.
1. A polishing slurry comprising a hydrophilic nanocarbon particle having a nitrogen-containing functional group,
wherein a weight ratio of a nitrogen element relative to a carbon element of the hydrophilic nanocarbon particle expressed as N/C×100% is greater than or equal to about 5 wt %.
2. The polishing slurry of claim 1 , wherein the weight ratio of a nitrogen element relative to a carbon element of the hydrophilic nanocarbon particle is about 5 wt % to about 80 wt %.
3. The polishing slurry of claim 1 , wherein the nitrogen-containing functional group is derived from at least one of ammonia, an ammonium salt, an amine compound, a polyamine compound, a nitro compound, an azo compound, hydroxides of each thereof, or hydrates of each thereof.
4. The polishing slurry of claim 1 , wherein the nitrogen-containing functional group comprises at least one of an amino group, a nitro group, a secondary amine group, a tertiary amine group, a quaternary amine group, a diamine group, a polyamine group, an azo group, or an amide group.
5. The polishing slurry of claim 1 , wherein the hydrophilic nanocarbon particle comprises at least one of fullerene, graphene, graphite, a carbon nanotube, or a carbon dot, each of which including at least one hydrophilic functional group.
6. The polishing slurry of claim 5 , wherein the hydrophilic functional group comprises at least one of a hydroxyl group, a carbonyl group, a carboxyl group, a sulfhydryl group, or a phosphate group.
7. The polishing slurry of claim 1 , wherein the hydrophilic nanocarbon particle has at least one hydrophilic functional group, and
the hydrophilic nanocarbon particle comprises on average 12 to 44 of the hydrophilic functional groups and the nitrogen-containing functional groups.
8. The polishing slurry of claim 7 , wherein the nitrogen-containing functional groups exist in a greater number of groups than the hydrophilic functional group.
9. The polishing slurry of claim 1 , further comprising a metal ion chemically fixed on a surface of the hydrophilic nanocarbon particle.
10. The polishing slurry of claim 9 , wherein the metal ion is derived from a soluble metal compound.
11. The polishing slurry of claim 1 , wherein the hydrophilic nanocarbon particle comprises hydroxyl fullerene.
12. The polishing slurry of claim 1 , further comprising an oxidizing agent, a chelating agent, a surfactant, a dispersing agent, or a combination thereof.
13. A polishing slurry comprising a hydrophilic nanocarbon particle on which an oxidation catalyst is chemically fixed.
14. The polishing slurry of claim 13 , wherein the oxidation catalyst comprises a nitrogen-containing oxidation catalyst.
15. The polishing slurry of claim 14 , wherein the nitrogen-containing oxidation catalyst is derived from at least one of ammonia, an ammonium salt, an amine compound, a polyamine compound, a nitro compound, an azo compound, hydroxides of each thereof, or hydrates of each thereof.
16. The polishing slurry of claim 14 , wherein the nitrogen-containing oxidation catalyst comprises at least one of an amino group, a nitro group, a secondary amine group, a tertiary amine group, a quaternary amine group, a diamine group, a polyamine group, an azo group, or an amide group.
17. The polishing slurry of claim 14 , wherein the oxidation catalyst further comprises a metal-containing oxidation catalyst.
18. The polishing slurry of claim 17 , wherein the metal-containing oxidation catalyst is derived from a soluble metal compound.
19. The polishing slurry of claim 13 , wherein the hydrophilic nanocarbon particle comprises at least one of fullerene, graphene, graphite, a carbon nanotube, or a carbon dot, each of which including at least one hydrophilic functional group.
20. The polishing slurry of claim 19 , wherein the hydrophilic functional group comprises at least one of a hydroxyl group, a carbonyl group, a carboxyl group, a sulfhydryl group, or a phosphate group.
21. The polishing slurry of claim 13 , wherein the hydrophilic nanocarbon particle has at least one hydrophilic functional group, and
the hydrophilic nanocarbon particle comprises on average 12 to 44 of the hydrophilic functional groups and the nitrogen-containing functional groups.
22. The polishing slurry of claim 21 , wherein the oxidation catalyst exists on average in a greater number than the hydrophilic functional group.
23. The polishing slurry of claim 13 , wherein the hydrophilic nanocarbon particle comprises hydroxyl fullerene.
24. The polishing slurry of claim 13 , further comprising an oxidizing agent, a chelating agent, a surfactant, a dispersing agent, or a combination thereof.
25. A method of manufacturing a semiconductor device using the polishing slurry of claim 1 .