Edge ring for a substrate processing chamber
An edge ring and process for fabricating an edge ring are disclosed herein. In one embodiment, an edge ring includes an annular body and a plurality of thermal breaks disposed within the annular body. The thermal breaks are disposed perpendicular to a center line of the annular body of the edge ring.
1. A method for fabricating an edge ring embedded with a thermally conductive material, the method comprising:
forming an annular body comprising a first material; and
forming a plurality of thermal breaks comprising a second material having a higher coefficient of thermal conductivity relative to the first material, wherein
each of the plurality of thermal breaks is encapsulated within the first material of the annular body, the plurality of thermal breaks is disposed perpendicular to a centerline of the annular body, and configured to disperse heat laterally throughout the edge ring while inhibiting axial heat transfer along the centerline.
2. The method of claim 1 , wherein forming the annular body of the edge ring further comprises forming a gas distribution system within the annular body.
3. The method of claim 1 further comprising:
depositing a coating on the annular body, the coating comprising a third material having a lower coefficient of thermal conductivity relative to the first material.
4. The method of claim 3 , wherein the third material of the coating is a material selected from the group consisting of zirconium oxide, carbon in diamond form, and quartz.
5. The method of claim 3 , wherein the third material of the coating comprises yttrium stabilized zirconium oxide.
6. The method of claim 3 , wherein the coating has a thickness between 100 to 200 microns.
7. The method of claim 1 , wherein forming a plurality of thermal breaks within the annular body comprises:
3D printing the plurality of thermal breaks within the annular body.
8. The method of claim 7 , further comprising:
hot isostatic pressing the edge ring.
9. The method of claim 1 , further comprising:
installing a threaded insert in the annular body.
10. The method of claim 1 , further comprising:
forming a plurality of fins integral with a bottom surface of the annular body.
11. A method of processing a substrate in a processing chamber, comprising:
placing the substrate on an edge ring supported by a substrate support member within the processing chamber, the edge ring comprising an annular body and a plurality of thermal breaks;
heating the substrate by a heater embedded in the substrate support member; and
dispersing heat laterally throughout the edge ring while inhibiting axial heat transfer along a centerline of the annular body, wherein
the annular body comprises a first material,
the plurality of thermal breaks comprise a second material having a higher coefficient of thermal conductivity relative to the first material, and
the plurality of thermal breaks are encapsulated within the first material and disposed perpendicular to the centerline of the annular body.
12. The method of claim 11 , wherein the edge ring further comprises a gas distribution system disposed within the annular body.
13. The method of claim 11 , wherein the edge ring further comprises:
a coating comprising a third material having a lower coefficient of thermal conductivity relative to the first material.