Semiconductor device production method employing silicon-containing resist underlayer film-forming composition including organic group having ammonium group

1. A method for producing a semiconductor device, the method comprising

a step (A) of applying, onto a semiconductor substrate, a resist underlayer film-forming composition containing (1) a hydrolysis condensate prepared through hydrolysis and condensation of a hydrolyzable silane in a non-alcoholic solvent in the presence of a strong acid, and (2) at least one of the hydrolyzable silane and a hydrolysis product of the hydrolyzable silane, followed by baking the composition, to thereby form a resist underlayer film;

a step (B) of applying a resist composition onto the resist underlayer film to thereby form a resist film;

a step (C) of exposing the resist film to light;

a step (D) of developing the resist film after the light exposure to thereby form a patterned resist film;

a step (E) of etching the resist underlayer film with the patterned resist film;

a step (F) of processing the semiconductor substrate with the patterned resist film and resist underlayer film; and

a step (G) of removing at least 90% in terms of thickness of the patterned resist underlayer film with a sulfuric acid-hydrogen peroxide mixture (SPM) prepared by mixing of aqueous hydrogen peroxide with sulfuric acid and/or an ammonia-hydrogen peroxide mixture (SC1) prepared by mixing of aqueous hydrogen peroxide with aqueous ammonia, wherein the patterned resist underlayer film is removed in a single step application of the sulfuric acid-hydrogen peroxide mixture and/or the ammonia-hydrogen peroxide mixture, and wherein:

the hydrolyzable silane contains a hydrolyzable silane of the following Formula (1):

R 1 a R 2 b Si(R 3 ) 4−(a+b)   Formula (1)

wherein R 1 is an organic group having a primary amino group, a secondary amino group, or a tertiary amino group and is bonded to a silicon atom via an Si—C bond; R 2 is an alkyl group, an aryl group, a halogenated alkyl group, a halogenated aryl group, an alkoxyaryl group, an alkenyl group, an acyloxyalkyl group, or an organic group having an acryloyl group, a methacryloyl group, a mercapto group, an amino group, an amide group, a hydroxyl group, an alkoxy group, an ester group, a sulfonyl group, or a cyano group, or any combination of these groups, and is bonded to a silicon atom via an Si—C bond; le and R 2 are optionally bonded together to form a ring structure; R 3 is an alkoxy group, an acyloxy group, or a halogen group; a is an integer of 1; b is an integer of 0 to 2; and a+b is an integer of 1 to 3;

the hydrolyzable silane of Formula (1) is selected from the group consisting of:

wherein T represents an alkoxy group, an acyloxy group, or a halogen group, and

the hydrolysis condensate contains an organic group having a salt structure formed between a counter anion derived from the strong acid and a counter cation derived from a primary ammonium group, a secondary ammonium group, or a tertiary ammonium group.

2. The method for producing a semiconductor device according to claim 1 , wherein the non-alcoholic solvent is a ketone or an ether.

3. The method for producing a semiconductor device according to claim 1 , wherein the strong acid is an inorganic acid or carboxylic acid having a pKa of 5 or less.

4. The method for producing a semiconductor device according to claim 1 , wherein the hydrolyzable silane contains the hydrolyzable silane of Formula (1) and at least one additional hydrolyzable silane selected from the group consisting of

a hydrolyzable silane of the following Formula (2):

R 4 c Si(R 5 ) 4−c   Formula (2)

wherein R 4 is an alkyl group, an aryl group, a halogenated alkyl group, a halogenated aryl group, an alkoxyaryl group, an alkenyl group, an acyloxyalkyl group, or an organic group having an acryloyl group, a methacryloyl group, a mercapto group, an amino group, an amide group, a hydroxyl group, an alkoxy group, an ester group, a sulfonyl group, or a cyano group, or any combination of these groups, and is bonded to a silicon atom via an Si—C bond; R 5 is an alkoxy group, an acyloxy group, or a halogen group; and c is an integer of 0 to 3, and

a hydrolyzable silane of the following Formula (3):

R 6 d Si(R 7 ) 3−d 2 Y e   Formula (3)

wherein R 6 is an alkyl group and is bonded to a silicon atom via an Si—C bond; R 7 is an alkoxy group, an acyloxy group, or a halogen group; Y is an alkylene group or an arylene group; d is an integer of 0 or 1; and e is an integer of 0 or 1.

5. The method for producing a semiconductor device according to claim 4 , wherein an amount of the hydrolyzable silane of Formula (1) contained in the entire hydrolyzable silane is 0.1% by mole to 100% by mole relative to the total amount by mole of the entire hydrolyzable silane.

6. The method for producing a semiconductor device according to claim 1 , wherein the resist underlayer film-forming composition further comprises a crosslinkable compound.

7. The method for producing a semiconductor device according to claim 1 , wherein the resist underlayer film-forming composition further comprises an acid or an acid generator.

8. The method for producing a semiconductor device according to claim 1 , wherein the resist underlayer film-forming composition further comprises water.

9. The method for producing a semiconductor device according to claim 1 , wherein the resist underlayer film is an EUV resist underlayer film, and the resist underlayer film has a thickness of 1 nm to 30 nm.