IP Library › Granted Patent US 11,309,115
Granted Patent B2
US 11,309,115 · App. 16/777,036 · Granted Apr 19, 2022

Magnetoresistance effect element

Inventor: Katsuyuki Nakada (Tokyo, JP)
Assignee: TDK CORPORATION
H01F10/193G01R33/093H01F10/1936H01F10/324H01F10/325H01F10/3272H01F10/3268
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Quick Facts
Patent No.
US 11,309,115
App. No.
16/777,036
Granted
Apr 19, 2022
Kind
B2
Abstract

A magnetoresistance effect element includes a first ferromagnetic layer, a second ferromagnetic layer, and a nonmagnetic spacer layer between the first ferromagnetic layer and the second ferromagnetic layer, in which at least one of the first ferromagnetic layer and the second ferromagnetic layer contains a metal compound having a half-Heusler type crystal structure, the metal compound contains a functional material, and X atoms, Y atoms, and Z atoms which form a unit lattice of the half-Heusler type crystal structure, and the functional material has an atomic number lower than an atomic number of any of the X atoms, the Y atoms, and the Z atoms.

Claims (67)

1. A magnetoresistance effect element comprising:

a first ferromagnetic layer;

a second ferromagnetic layer; and

a nonmagnetic spacer layer between the first ferromagnetic layer and the second ferromagnetic layer; wherein

at least one of the first ferromagnetic layer and the second ferromagnetic layer contains a metal compound having a half-Heusler type crystal structure,

the metal compound contains a functional material, and X atoms, Y atoms, and Z atoms which form a unit lattice of the half-Heusler type crystal structure, and

the functional material has an atomic number lower than an atomic number of any of the X atoms, the Y atoms, and the Z atoms,

wherein the functional material is one or more of atoms selected from the group consisting of B and C,

the metal compound has a crystal structure of an A2 structure, a C1 b structure or a B2 structure.

2. The magnetoresistance effect element according to claim 1 , wherein

the functional material is boron, and

a composition proportion of the functional material in the metal compound is 0.1 at % or more and 9.8 at % or less.

3. The magnetoresistance effect element according to claim 1 , wherein

the functional material is carbon, and

a composition proportion of the functional material in the metal compound is 0.11 at % or more and 8.8 at % or less.

4. The magnetoresistance effect element according to claim 1 , wherein

the X atoms are one or more of atoms selected from the group consisting of Fe, Co, Ni, Cu, Zn, Ru, Rh, Pd, Ag, Cd, Ir, Pt, and Au,

the Y atoms are one or more of atoms selected from the group consisting of Ti, V, Cr, Mn, Y, Zr, Nb, Hf, Ta, Gd, Tb, Dy, Hd, Er, Fe, Tm, Yb, and Lu, and

the Z atoms are one or more of atoms selected from the group consisting of Al, Si, Ga, Ge, As, In, Sn, Sb, Tl, Pd, Bi, Se, and Te.

5. The magnetoresistance effect element according to claim 4 , wherein

the X atoms are one or more of atoms selected from the group consisting of Ni, Pd, Pt, Co, and Rh,

the Y atoms are one or more of atoms selected from the group consisting of Mn, Cr, Fe, and V, and

the Z atoms are one or more of atoms selected from the group consisting of Se, Te, and Sb.

6. The magnetoresistance effect element according to claim 1 , wherein the metal compound has a crystal structure of a C1 b structure or a B2 structure.

7. The magnetoresistance effect element according to claim 1 , wherein

one of the first ferromagnetic layer and the second ferromagnetic layer contains a metal compound having a half-Heusler type crystal structure, and the other thereof contains a metal compound having a full-Heusler type crystal structure, and

the metal compound having a full-Heusler type crystal structure contains the X atoms, the Y atoms, and the Z atoms.

8. The magnetoresistance effect element according to claim 7 , wherein

the metal compound having a full-Heusler type crystal structure is expressed by a compositional formula Co 2 L α M β ,

L atoms include at least one of Mn and Fe atoms,

M atoms include at least one of Al, Si, Ge, and Ga atoms,

α satisfies 0.7<α<1.6, and

β satisfies 0.65<β<1.35.

9. The magnetoresistance effect element according to claim 1 , comprising:

an insertion layer between at least one of the first ferromagnetic layer and the second ferromagnetic layer, and the nonmagnetic spacer layer, wherein

the insertion layer contains Co, Fe, or a CoFe alloy.

10. The magnetoresistance effect element according to claim 9 , wherein a film thickness of the insertion layer is 0.2 nm or more and 1.2 nm or less.

11. The magnetoresistance effect element according to claim 1 , wherein the nonmagnetic spacer layer is a metal.

12. The magnetoresistance effect element according to claim 11 , wherein the nonmagnetic spacer layer is Ag or an Ag alloy.

13. A magnetoresistance effect element comprising:

a first ferromagnetic layer;

a second ferromagnetic layer; and

a nonmagnetic spacer layer between the first ferromagnetic layer and the second ferromagnetic layer; wherein

at least one of the first ferromagnetic layer and the second ferromagnetic layer contains a metal compound having a half-Heusler type crystal structure,

the metal compound contains a functional material, and X atoms, Y atoms, and Z atoms which form a unit lattice of the half-Heusler type crystal structure; and

the functional material has an atomic number lower than an atomic number of any of the X atoms, the Y atoms, and the Z atoms, wherein

the functional material is nitrogen, and

a composition proportion of the functional material in the metal compound is 0.09 at % or more and 7.2 at % or less,

the metal compound has a crystal structure of an A2 structure, a C1 b structure or a B2 structure,

the functional material penetrates between lattices of the half-Heusler type crystal structure.

14. A magnetoresistance effect element comprising:

a first ferromagnetic layer;

a second ferromagnetic layer; and

a nonmagnetic spacer layer between the first ferromagnetic layer and the second ferromagnetic layer; wherein

at least one of the first ferromagnetic layer and the second ferromagnetic layer contains a metal compound having a half-Heusler type crystal structure,

the metal compound contains a functional material, and X atoms, Y atoms, and Z atoms which form a unit lattice of the half-Heusler type crystal structure; and

the functional material has an atomic number lower than an atomic number of any of the X atoms, the Y atoms, and the Z atoms, wherein

the functional material is fluorine, and

a composition proportion of the functional material in the metal compound is 0.13 at % or more and 7.2 at % or less.

15. A magnetoresistance effect element comprising:

a first ferromagnetic layer;

a second ferromagnetic layer; and

a nonmagnetic spacer layer between the first ferromagnetic layer and the second ferromagnetic layer; wherein

at least one of the first ferromagnetic layer and the second ferromagnetic layer contains a metal compound having a half-Heusler type crystal structure,

the metal compound contains a functional material, and X atoms, Y atoms, and Z atoms which form a unit lattice of the half-Heusler type crystal structure; and

the functional material has an atomic number lower than an atomic number of any of the X atoms, the Y atoms, and the Z atoms, wherein

the functional material is one or more of atoms selected from the group consisting of Li, Be, O, Na and Mg.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 30, 2020
From: NAKADA, KATSUYUKI
To: TDK CORPORATION
Reel/Frame 051673/0576 →
Priority Claims (2)
JP JP2019-018923 · Feb 5, 2019 · national
JP JP2020-010941 · Jan 27, 2020 · national
Continuity (1)
Related Publication 20200251268A1 · Aug 6, 2020
Cited By (4)
US 12,217,775 US 12,278,033 US 12,288,576 US 12,682,938