IP Library Granted Patent US 11,572,476
Granted Patent B2
US 11,572,476 · App. 16/790,017 · Granted Feb 7, 2023

Anti-reflective coating

Inventors: Deyan Wang (Hudson, MA); Sheng Liu (Bow, NH)
Assignee: ROHM AND HAAS ELECTRONIC MATERIALS LLC
C09D5/006C08F2/50C08F220/18C08G18/73C08G18/7621C08G77/385C08K3/36C08K5/05C08K5/06C08K5/07C08K5/095C08K5/1515C08K7/26C08L47/00C08L83/04C08K2201/005C08L2203/16C08L2312/06
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Quick Facts
Patent No.
US 11,572,476
App. No.
16/790,017
Granted
Feb 7, 2023
Kind
B2
Abstract

There is provided a curable composition for forming an anti-reflective film. The composition includes: (a) hollow silica nanoparticles; (b) a siloxane binder having reactive groups; (c) at least one additional material having reactive groups; (d) an initiator; and (e) solvent. The siloxane binder is present in an amount that is at least 50% by weight of the total weight of (siloxane binder+additional materials having reactive groups). The weight ratio of hollow silica nanoparticles to the total of (siloxane binder+additional materials having reactive groups) is no greater than 1.75 to 1.

Claims (20)

1. A curable composition for forming an anti-reflective film, said composition comprising:

(a) hollow silica nanoparticles;

(b) a siloxane binder having reactive groups;

(c) at least one additional material having reactive groups;

(d) an initiator; and

(e) solvent;

wherein:

(i) the siloxane binder is present in an amount that is 50% to 90% by weight of the total weight of the siloxane binder and the additional materials having reactive groups; and

(ii) a weight ratio of the hollow silica nanoparticles to the total of the siloxane binder and the additional materials having reactive groups is 0.82 to 1.44;

wherein the additional material (c) comprises an oligomer selected from the group consisting of (meth)acrylate oligomers, urethane-modified (meth)acrylate oligomers, polyester (meth)acrylate oligomers, epoxide (meth)acrylate oligomers, ether (meth)acrylate oligomers, and mixtures thereof.

2. The curable composition of claim 1 , wherein the siloxane binder (b) is selected from the group consisting of siloxane polymers, silsesquioxanes, and combinations thereof.

3. The curable composition of claim 1 , wherein the additional material (c) further comprises a fluorinated surfactant.

4. The curable composition of claim 1 , wherein the initiator (d) is selected from the group consisting of photoinitiators, thermal initiators, and combinations thereof.

5. The curable composition of claim 1 , wherein the siloxane binder is present in an amount that is 60% to 90% by weight of the total weight of the siloxane binder and the additional materials having reactive groups.

6. An anti-reflective film made by the process of:

(1) coating the curable composition of claim 1 onto a substrate to form an uncured film;

(2) drying the uncured film to form a dried uncured film; and

(3) exposing the dried uncured film to one or both of UV radiation and heat to form the anti-reflective film.

7. The anti-reflective film of claim 6 , wherein the dried uncured film is exposed in sequence to UV radiation and heat.

8. An electronic device having thereon the anti-reflective film of claim 6 .

Assignments (4)
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073515/0243 →
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
Reel/Frame 073517/0298 →
CHANGE OF NAME Recorded Oct 29, 2024
From: ROHM & HAAS ELECTRONIC MATERIALS LLC
To: DUPONT ELECTRONIC MATERIALS INTERNATIONAL, LLC
Reel/Frame 069272/0383 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 1, 2021
From: WANG, DEYAN; LIU, SHENG
To: ROHM AND HAAS ELECTRONIC MATERIALS LLC
Reel/Frame 056401/0727 →