Gate-all-around integrated circuit structures having depopulated channel structures

1. An integrated circuit structure, comprising:

a first vertical arrangement of nanowires and a second vertical arrangement of nanowires above a substrate, the first vertical arrangement of nanowires having a greater number of active nanowires than the second vertical arrangement of nanowires, and the first and second vertical arrangements of nanowires having co-planar uppermost nanowires; and

a first vertical arrangement of nanoribbons and a second vertical arrangement of nanoribbons above the substrate, the first vertical arrangement of nanoribbons having a greater number of active nanoribbons than the second vertical arrangement of nanoribbons, and the first and second vertical arrangements of nanoribbons having co-planar uppermost nanoribbons.

2. The integrated circuit structure of claim 1 , further comprising:

a third vertical arrangement of nanowires above the substrate, the first vertical arrangement of nanowires having a greater number of active nanowires than the third vertical arrangement of nanowires, and the first and third vertical arrangements of nanowires having co-planar lowermost nanowires; and

a third vertical arrangement of nanoribbons above the substrate, the first vertical arrangement of nanoribbons having a greater number of active nanoribbons than the third vertical arrangement of nanoribbons, and the first and third vertical arrangements of nanoribbons having co-planar lowermost nanoribbons.

3. The integrated circuit structure of claim 1 , further comprising:

one or more first gate stacks over the first and second vertical arrangements of nanowires; and

one or more second gate stacks over the first and second vertical arrangements of nanoribbons.

4. The integrated circuit structure of claim 1 , further comprising:

first epitaxial source or drain structures at ends of the first and second vertical arrangements of nanowires; and

second epitaxial source or drain structures at ends of the first and second vertical arrangements of nanoribbons.

5. The integrated circuit structure of claim 4 , wherein the first and second epitaxial source or drain structures are discrete first and second epitaxial source or drain structures.

6. The integrated circuit structure of claim 4 , wherein the first and second epitaxial source or drain structures are non-discrete first and second epitaxial source or drain structures.

7. The integrated circuit structure of claim 4 , further comprising:

first conductive contact structures coupled to the first epitaxial source or drain structures; and

second conductive contact structures coupled to the first epitaxial source or drain structures.

8. The integrated circuit structure of claim 1 , wherein the first vertical arrangement of nanowires is over a first sub-fin, the second vertical arrangement of nanowires is over a second sub-fin, the first vertical arrangement of nanoribbons is over a third sub-fin, and the second vertical arrangement of nanoribbons is over a fourth sub-fin.

9. The integrated circuit structure of claim 1 , further comprising:

a first dielectric cap over the first vertical arrangement of nanowires, a second dielectric cap over the second vertical arrangement of nanowires, a third dielectric cap over the first vertical arrangement of nanoribbons, and a fourth dielectric cap over the second vertical arrangement of nanoribbons, wherein the first, second, third and fourth dielectric caps are co-planar with one another.

10. An integrated circuit structure, comprising:

a first vertical arrangement of nanowires and a second vertical arrangement of nanowires above a substrate, the first vertical arrangement of nanowires having a greater number of active nanowires than the second vertical arrangement of nanowires, and the first and second vertical arrangements of nanowires having co-planar lowermost nanowires; and

a first vertical arrangement of nanoribbons and a second vertical arrangement of nanoribbons above the substrate, the first vertical arrangement of nanoribbons having a greater number of active nanoribbons than the second vertical arrangement of nanoribbons, and the first and second vertical arrangements of nanoribbons having co-planar lowermost nanoribbons.

11. The integrated circuit structure of claim 10 , further comprising:

one or more first gate stacks over the first and second vertical arrangements of nanowires; and

one or more second gate stacks over the first and second vertical arrangements of nanoribbons.

12. The integrated circuit structure of claim 10 , further comprising:

first epitaxial source or drain structures at ends of the first and second vertical arrangements of nanowires; and

second epitaxial source or drain structures at ends of the first and second vertical arrangements of nanoribbons.

13. The integrated circuit structure of claim 12 , wherein the first and second epitaxial source or drain structures are discrete first and second epitaxial source or drain structures.

14. The integrated circuit structure of claim 12 , wherein the first and second epitaxial source or drain structures are non-discrete first and second epitaxial source or drain structures.

15. The integrated circuit structure of claim 12 , further comprising:

first conductive contact structures coupled to the first epitaxial source or drain structures; and

second conductive contact structures coupled to the first epitaxial source or drain structures.

16. The integrated circuit structure of claim 10 , wherein the first vertical arrangement of nanowires is over a first sub-fin, the second vertical arrangement of nanowires is over a second sub-fin, the first vertical arrangement of nanoribbons is over a third sub-fin, and the second vertical arrangement of nanoribbons is over a fourth sub-fin.

17. The integrated circuit structure of claim 10 , further comprising:

a first dielectric cap over the first vertical arrangement of nanowires, a second dielectric cap over the second vertical arrangement of nanowires, a third dielectric cap over the first vertical arrangement of nanoribbons, and a fourth dielectric cap over the second vertical arrangement of nanoribbons, wherein the first, second, third and fourth dielectric caps are co-planar with one another.

18. A computing device, comprising:

a board; and

a component coupled to the board, the component including an integrated circuit structure, comprising:

a first vertical arrangement of nanowires and a second vertical arrangement of nanowires above a substrate, the first vertical arrangement of nanowires having a greater number of active nanowires than the second vertical arrangement of nanowires, and the first and second vertical arrangements of nanowires having co-planar uppermost nanowires; and

a first vertical arrangement of nanoribbons and a second vertical arrangement of nanoribbons above the substrate, the first vertical arrangement of nanoribbons having a greater number of active nanoribbons than the second vertical arrangement of nanoribbons, and the first and second vertical arrangements of nanoribbons having co-planar uppermost nanoribbons.

19. The computing device of claim 18 , further comprising:

a memory coupled to the board.

20. The computing device of claim 18 , further comprising:

a communication chip coupled to the board.

21. The computing device of claim 18 , further comprising:

a camera coupled to the board.

22. The computing device of claim 18 , further comprising:

a battery coupled to the board.

23. The computing device of claim 18 , further comprising:

an antenna coupled to the board.

24. The computing device of claim 18 , wherein the component is a packaged integrated circuit die.

25. The computing device of claim 18 , wherein the component is selected from the group consisting of a processor, a communications chip, and a digital signal processor.