Acoustic wave device with multi-layer substrate including ceramic
An acoustic wave device is disclosed. The acoustic wave device includes a support layer, a ceramic layer positioned over the support layer, a piezoelectric layer positioned over the ceramic layer, and an interdigital transducer electrode positioned over the piezoelectric layer. The support layer has a higher thermal conductivity than the ceramic layer. The ceramic layer can be a polycrystalline spinel layer. The acoustic wave device can be a surface acoustic wave device configured to generate a surface acoustic wave.
1. An acoustic wave device comprising:
a support substrate;
a ceramic layer over the support substrate, the ceramic layer having a thickness that is at least equal to or greater than a wavelength A of the acoustic wave device to suppress spurious modes resulting from back scattering, the support substrate having a higher thermal conductivity than the ceramic layer;
a piezoelectric layer over the ceramic layer; and
an interdigital transducer electrode over the piezoelectric layer, the acoustic wave device configured to generate an acoustic wave.
2. The acoustic wave device of claim 1 wherein the support substrate is a single crystal layer.
3. The acoustic wave device of claim 1 wherein the support substrate includes silicon.
4. The acoustic wave device of claim 1 wherein the acoustic wave has a wavelength of λ, and the piezoelectric layer has a thickness in a range from 3λ to 40λ.
5. The acoustic wave device of claim 1 wherein the ceramic layer includes polycrystalline spinel.
6. The acoustic wave device of claim 1 wherein a surface of the ceramic layer has a surface roughness in a range from 0.1 nanometers to 2 nanometers.
7. The acoustic wave device of claim 6 wherein the ceramic layer and the piezoelectric layer are directly bonded to each other without an intervening layer.
8. The acoustic wave device of claim 1 wherein the ceramic layer and the support substrate are bonded to each other by way of an adhesive.
9. The acoustic wave device of claim 1 further comprising a temperature compensation layer over the interdigital transducer electrode.
10. The acoustic wave device of claim 1 wherein the piezoelectric layer includes lithium based piezoelectric layer.
11. The acoustic wave device of claim 1 wherein the ceramic layer is arranged to scatter back reflections of the acoustic wave.
12. An acoustic wave device comprising:
a support substrate;
a polycrystalline spinel layer over the support substrate, the polycrystalline spinel layer having a thickness that is at least equal to or greater than a wavelength λ of the acoustic wave device to suppress spurious modes resulting from back scattering, the support substrate has a greater thermal conductivity than the polycrystalline spinel layer;
a piezoelectric layer over the polycrystalline spinel layer; and
an interdigital transducer electrode over the piezoelectric layer, the acoustic wave device configured to generate an acoustic wave.
13. The acoustic wave device of claim 12 further comprising a temperature compensation layer over the interdigital transducer electrode.
14. The acoustic wave device of claim 12 wherein the support substrate includes silicon.
15. The acoustic wave device of claim 12 wherein the support substrate is thicker than the polycrystalline spinel layer.
16. The acoustic wave device of claim 12 wherein a surface of the polycrystalline spinel layer has a surface roughness in a range from 0.1 nanometers to 2 nanometers.
17. The acoustic wave device of claim 16 wherein the polycrystalline spinel layer and the piezoelectric layer are bonded to each other without an intervening layer.
18. The acoustic wave device of claim 12 wherein the acoustic wave has a wavelength of λ, and the piezoelectric layer has a thickness in a range from 3λ to 40λ.
19. A surface acoustic wave filter comprising:
a surface acoustic wave resonator including a support substrate, a ceramic layer over the support substrate, a piezoelectric layer over the ceramic layer, and an interdigital transducer electrode over the piezoelectric layer, the ceramic layer having a thickness that is at least equal to or greater than a wavelength λ of the surface acoustic wave resonator to suppress spurious modes resulting from back scattering; and
a plurality of other surface acoustic wave resonators, the surface acoustic wave resonator and the plurality of other surface acoustic wave resonators together arranged to filter a radio frequency signal.
20. The surface acoustic wave filter of claim 19 wherein the ceramic layer is a polycrystalline spinel layer.