Acoustic wave device
An acoustic wave device includes first and second IDT electrodes electrically connected in series with each other by a common busbar common to the first and second IDT electrodes. In each of a first acoustic impedance layer and a second acoustic impedance layer, at least one of at least one high acoustic impedance layer and at least one low acoustic impedance layer is a conductive layer. At least a portion of the conductive layer in the first acoustic impedance layer and at least a portion of the conductive layer in the second acoustic impedance layer do not overlap with the common busbar when viewed in plan from a thickness direction of a piezoelectric layer. The conductive layer in the first acoustic impedance layer and the conductive layer in the second acoustic impedance layer are electrically insulated from each other.
1. An acoustic wave device comprising:
a substrate;
a first acoustic impedance layer and a second acoustic impedance layer that on the substrate;
a piezoelectric layer on the first acoustic impedance layer and the second acoustic impedance layer;
a first IDT (interdigital transducer) electrode on the piezoelectric layer and partially overlapping with the first acoustic impedance layer when viewed in plan from a thickness direction of the piezoelectric layer; and
a second IDT electrode on the piezoelectric layer and partially overlapping with the second acoustic impedance layer when viewed in plan from the thickness direction; wherein
the first IDT electrode and the second IDT electrode are electrically connected in series with each other by a common busbar that is common to the first IDT electrode and the second IDT electrode;
the first IDT electrode includes:
a first busbar and the common busbar that face each other;
a plurality of electrode fingers that are connected to the first busbar and extend towards the common busbar; and
a plurality of electrode fingers that are connected to the common busbar and extend towards the first busbar;
the second IDT electrode includes:
the common busbar and a second busbar that face each other;
a plurality of electrode fingers that are connected to the common busbar and extend towards the second busbar; and
a plurality of electrode fingers that are connected to the second busbar and extend towards the common busbar;
each of the first acoustic impedance layer and the second acoustic impedance layer includes:
at least one high acoustic impedance layer; and
at least one low acoustic impedance layer with an acoustic impedance lower than that of the at least one high acoustic impedance layer;
in each of the first acoustic impedance layer and the second acoustic impedance layer, at least one of the at least one high acoustic impedance layer and the at least one low acoustic impedance layer is a conductive layer;
at least a portion of the conductive layer in the first acoustic impedance layer and at least a portion of the conductive layer in the second acoustic impedance layer do not overlap with the common busbar when viewed in plan from the thickness direction; and
the conductive layer in the first acoustic impedance layer and the conductive layer in the second acoustic impedance layer are electrically insulated from each other.
2. The acoustic wave device according to claim 1 , wherein
the at least one high acoustic impedance layer includes a plurality of high acoustic impedance layers;
the at least one low acoustic impedance layer includes a plurality of low acoustic impedance layers; and
the plurality of high acoustic impedance layers and the plurality of low acoustic impedance layers are provided alternately one by one in the thickness direction.
3. The acoustic wave device according to claim 2 , wherein the plurality of high acoustic impedance layers in each of the first acoustic impedance layer and the second acoustic impedance layer include the conductive layer.
4. The acoustic wave device according to claim 1 , wherein
the first IDT electrode, the piezoelectric layer, and the first acoustic impedance layer define a first resonator;
the second IDT electrode, the piezoelectric layer, and the second acoustic impedance layer define a second resonator;
the first resonator and the second resonator are division resonators obtained by dividing a prescribed resonator into two resonators, the prescribed resonator including an IDT electrode, a piezoelectric layer, and an acoustic impedance layer; and
a combined impedance of an impedance of the first resonator and an impedance of the second resonator is equal or substantially equal to an impedance of the prescribed resonator.
5. The acoustic wave device according to claim 1 , wherein
the conductive layer in the first acoustic impedance layer is located between the first busbar and the common busbar of the first IDT electrode when viewed in plan from the thickness direction; and
the conductive layer in the second acoustic impedance layer is located between the common busbar and the second busbar of the second IDT electrode when viewed in plan from the thickness direction.
6. The acoustic wave device according to claim 1 , wherein when viewed in plan from the thickness direction, an area of a region in which the first IDT electrode and the conductive layer in the first acoustic impedance layer overlap and an area of a region in which the second IDT electrode and the conductive layer in the second acoustic impedance layer overlap are the same or substantially the same.
7. The acoustic wave device according to claim 1 , further comprising:
a series arm circuit provided at a first path electrically connecting an input terminal to an output terminal; and
a parallel arm circuit provided at a second path electrically connecting a node on the first path to a ground; wherein
the series arm circuit includes a plurality of series arm resonators; and
at least one of the plurality of series arm resonators is a resonator including the first IDT electrode, the second IDT electrode, the piezoelectric layer, the first acoustic impedance layer, and the second acoustic impedance layer.
8. The acoustic wave device according to claim 7 , wherein the parallel arm circuit includes a parallel arm resonator.
9. The acoustic wave device according to claim 1 , wherein when a wave length of acoustic waves defined by an electrode finger pitch of the first IDT electrode and the second IDT electrode is represented by λ, a thickness of the piezoelectric layer is about 1λ or less.
10. The acoustic wave device according to claim 9 , wherein the acoustic waves are plate waves.
11. The acoustic wave device according to claim 9 , wherein a thickness of the substrate is equal to or more than about 10λ.
12. The acoustic wave device according to claim 1 , further comprising:
a first pair of reflectors provided on each side of the first IDT electrode in an acoustic wave propagation direction; and
a second pair of reflectors provided on each side of the second IDT electrode in the acoustic wave propagation direction.
13. The acoustic wave device according to claim 1 , wherein a resistivity of the substrate is equal to or more than about 100 Ωcm and less than or equal to about 1,000 Ωcm.
14. The acoustic wave device according to claim 1 , wherein each of the at least one high acoustic impedance layer includes platinum.
15. The acoustic wave device according to claim 1 , wherein each of the at least one high acoustic impedance layer has a surface roughness less than or equal to about 100 nm.
16. The acoustic wave device according to claim 1 , wherein each of the at least one low acoustic impedance layer includes silicon oxide.
17. The acoustic wave device according to claim 1 , wherein each of the at least one low acoustic impedance layer has a surface roughness less than or equal to about 100 nm.
18. The acoustic wave device according to claim 1 , wherein Euler angles of the piezoelectric layer are between about 0° and about 90°.