Elastic wave device and ladder filter
An elastic wave device includes a piezoelectric film made of lithium niobate or lithium tantalate, and a first electrode finger and a second electrode finger opposing each other in a direction intersecting a thickness direction of the piezoelectric film. When an average thickness of the piezoelectric film is d and a distance between centers of the first electrode finger and the second electrode finger is p, d/p is about 0.5 or less. The first electrode finger and the second electrode finger are connected to the first and second bus bars, respectively. The first and second bus bars include corner portions. At least one of corner portions of the first and second bus bars is outside a cavity portion when viewed in plan view.
1. An elastic wave device comprising:
a support substrate including a first main surface and a recessed portion at the first main surface;
a piezoelectric film made of lithium niobate or lithium tantalate, laminated on the first main surface of the support substrate, and defining a cavity portion with the recessed portion; and
an electrode on the piezoelectric film and including first and second bus bars, a first electrode finger connected to the first bus bar, and a second electrode finger connected to the second bus bar; wherein
the first and second bus bars include a plurality of corner portions when viewed in a plan view;
the elastic wave device is configured to use a bulk wave in a thickness slip mode; and at least one of the plurality of corner portions of the first and second bus bars that is closest to the first and second electrode fingers is outside the cavity portion when viewed in the plan view; and
an outer edge of at least one of the plurality of corner portions of the first and second bus bars is curved.
2. The elastic wave device according to claim 1 , wherein the at least one of the plurality of corner portions includes corner portions on sides of the respective first busbar and second busbar at which the first electrode finger and the second electrode finger are connected.
3. The elastic wave device according to claim 2 , further comprising reflectors on two sides of the electrode in an elastic wave propagation direction.
4. The elastic wave device according to claim 1 , wherein all of the plurality of corner portions of the first and second bus bars are outside the cavity portion when viewed in the plan view.
5. The elastic wave device according to claim 1 , further comprising:
a second-layer electrode pattern laminated on at least a portion of the first and second bus bars; wherein
the second-layer electrode pattern includes a plurality of corner portions, and at least one of the plurality of corner portions of the second-layer electrode pattern is outside the cavity portion when viewed in the plan view.
6. The elastic wave device according to claim 5 , wherein all of the plurality of corner portions of the second-layer electrode pattern are outside the cavity portion when viewed in plan view.
7. The elastic wave device according to claim 5 , wherein an outer edge of at least one of the plurality of corner portions of the second-layer electrode pattern is curved.
8. The elastic wave device according to claim 5 , wherein
the second-layer electrode pattern has a rectangular or substantially rectangular shape having a length direction;
the length direction is a direction in which the first electrode finger and the second electrode finger oppose each other; and
the plurality of corner portions of the second-layer electrode pattern include a corner portion outside one end side of the cavity portion in the length direction and a corner portion outside another end side of the cavity portion.
9. The elastic wave device according to claim 1 , wherein
the first and second bus bars have a rectangular or substantially rectangular shape having a length direction;
the length direction is a direction in which the first electrode finger and the second electrode finger oppose each other; and
the plurality of corner portions of the first and second bus bars include a corner portion outside one end side of the cavity portion in the length direction and a corner portion outside another end side of the cavity portion.
10. The elastic wave device according to claim 1 , wherein
the electrode including the first and second bus bars, the first electrode finger, and the second electrode finger is an interdigital transducer (IDT) electrode; and
the first and second bus bars are bus bars in the IDT electrode.
11. The elastic wave device according to claim 10 , wherein the elastic wave device does not include a reflector.
12. A ladder filter comprising:
a series arm resonator and a parallel arm resonator; wherein
at least one of the series arm resonator and the parallel arm resonator is an elastic wave device according to claim 1 .
13. The elastic wave device according to claim 1 , wherein
the first electrode finger and the second electrode finger are spaced apart at an interval from one another.
14. The elastic wave device according to claim 1 , wherein
a plurality of the first electrode fingers and the second electrode fingers are provided; and
a total number of the plurality of the first electrode fingers is different from a total number of the plurality of the second electrode fingers.
15. The elastic wave device according to claim 1 , further comprising:
an insulating layer interposed between the support substrate and the piezoelectric film.
16. An elastic wave device comprising:
a support substrate including a first main surface and a recessed portion open to the first main surface;
a piezoelectric film made of lithium niobate or lithium tantalate, laminated on the first main surface of the support substrate and defining a cavity portion with the recessed portion together with the support substrate; and
an electrode on the piezoelectric film and including first and second bus bars, a first electrode finger connected to the first bus bar, and a second electrode finger connected to the second bus bar; wherein
the first and second bus bars include a plurality of corner portions when viewed in a plan view;
an outer edge of at least one of the plurality of corner portions of the first and second bus bars is curved;
when a thickness of the piezoelectric film is d and a distance between centers of the first electrode finger and second electrode finger is p, d/p is about 0.5 or less;
at least one of the plurality of corner portions of the first and second bus bars that is closest to the first and second electrode fingers is outside the cavity portion when viewed in the plan view; and
a portion of at least one of the first and second busbars that includes the at least one of the plurality of corner portions that is outside the cavity portion overlaps with the cavity portion in the plan view.
17. The elastic wave device according to claim 16 , wherein all of the plurality of corner portions of the first and second bus bars are outside the cavity portion when viewed in the plan view.
18. An elastic wave device comprising:
a support substrate including a first main surface and a recessed portion at the first main surface;
a piezoelectric film laminated on the first main surface of the support substrate and defining a cavity portion with the recessed portion; and
an interdigital transducer (IDT) electrode on the piezoelectric film so that a portion of the IDT electrode overlaps the cavity portion; wherein
the IDT electrode includes first and second bus bars, a plurality of first electrode fingers connected to the first bus bar, and a plurality of second electrode fingers connected to the second bus bar;
the plurality of first electrode fingers and the plurality of second electrode fingers are interleaved with each other;
the first and second bus bars include a plurality of corner portions when viewed in a plan view;
a second-layer electrode pattern is laminated on at least a portion of the first and second bus bars;
at least one of the plurality of corner portions of the first and second bus bars that is closest to the plurality of first and second electrode fingers is outside the cavity portion when viewed in the plan view;
a portion of at least one of the first and second busbars that includes the at least one of the plurality of corner portions that is outside the cavity portion overlaps with the cavity portion in the plan view;
the second-layer electrode pattern includes a plurality of corner portions, and at least one of the plurality of corner portions of the second-layer electrode pattern is outside the cavity portion when viewed in the plan view; and
an outer edge of at least one of the plurality of corner portions of the second-layer electrode pattern is curved.
19. The elastic wave device according to claim 18 , wherein the elastic wave device uses a plate wave.