Elastic wave device and manufacturing method for the same
In an elastic wave device, a piezoelectric substrate is laminated on a support substrate including a recess. On one of a first principal surface and a second principal surface of the piezoelectric substrate, a functional electrode including an IDT electrode is provided. Passing-through sections are provided in the piezoelectric substrate and connected to a hollow section enclosed by the recess and the piezoelectric substrate. In a plan view of the piezoelectric substrate seen from the first principal surface, at least a portion of the passing-through sections is inside a minimum rectangular or substantially rectangular region encompassing an outer circumference of a region including the functional electrode.
1. An elastic wave device comprising:
a support substrate including an upper surface including a recess;
a piezoelectric substrate including a first principal surface and a second principal surface opposing each other, and laminated to cover the recess of the support substrate from the second principal surface side; and
a functional electrode provided on one of the first and second principal surfaces of the piezoelectric substrate and including at least an interdigital transducer (IDT) electrode that generates elastic waves, and through which the elastic waves propagate; wherein
the recess of the support substrate is covered with the piezoelectric substrate as to define a hollow section;
a passing-through section passing through the first and second principal surfaces of the piezoelectric substrate is provided in the piezoelectric substrate;
the passing-through section is connected to the hollow section; and
at least a portion of the passing-through section is positioned inside a minimum rectangular or substantially rectangular region encompassing an outer circumference of a region in which the functional electrode for an elastic wave device is located in plan view from the first principal surface side of the piezoelectric substrate.
2. The elastic wave device according to claim 1 , wherein at least a portion of the passing-through section is positioned in an end portion in an elastic wave propagation direction inside the minimum rectangular or substantially rectangular region.
3. The elastic wave device according to claim 1 , wherein the functional electrode does not include a reflector.
4. The elastic wave device according to claim 1 , wherein the passing-through section is disposed in a region between adjacent electrode fingers of the IDT electrode.
5. The elastic wave device according to claim 1 , wherein the functional electrode includes a pair of reflectors disposed on both sides in the elastic wave propagation direction of the IDT electrode.
6. The elastic wave device according to claim 5 , wherein the passing-through section is provided in at least one of a region between the adjacent electrode fingers of the IDT electrode and a region between adjacent electrode fingers of the reflector.
7. The elastic wave device according to claim 1 , wherein
the IDT electrode includes first and second busbars opposing each other and first and second electrode fingers electrically connected to the first and second busbars respectively; and
the first and second busbars extend in a direction intersecting with the elastic wave propagation direction.
8. The elastic wave device according to claim 1 , wherein
the minimum rectangular or substantially rectangular region is larger than a region in which the functional electrode is provided; and
at least a portion of the passing-through section is disposed in an outer side portion of the functional electrode.
9. The elastic wave device according to claim 1 , wherein the elastic wave device is structured to generate plate waves.
10. The elastic wave device according to claim 1 , further comprising a reinforcement substrate provided on the support substrate.
11. The elastic wave device according to claim 1 , wherein at least one other passing-through section is provided in the piezoelectric substrate.
12. The elastic wave device according to claim 1 , wherein the passing-through section is provided in a region between electrode fingers of the IDT electrode on an inner side relative to a region between electrode fingers of the IDT electrode on an outermost side in an elastic wave propagation direction inside the minimum rectangular or substantially rectangular region.
13. The elastic wave device according to claim 2 , wherein a portion of a dummy electrode finger is omitted in a portion where the passing-through section is located.
14. The elastic wave device according to claim 2 , wherein more than one half of the passing-through section is positioned in an end portion in an elastic wave propagation direction inside the minimum rectangular or substantially rectangular region.
15. The elastic wave device according to claim 1 , wherein the IDT electrode includes first electrode fingers and dummy electrode fingers spaced by a gap from each of leading ends of the first electrode fingers.
16. The elastic wave device according to claim 1 , wherein the IDT electrode includes a first busbar and a second busbar that are not parallel to an elastic wave propagation direction.
17. The elastic wave device according to claim 1 , wherein the IDT electrode is rhombic or substantially rhombic.
18. The elastic wave device according to claim 1 , wherein the IDT electrode is apodization weighted.