CMP polishing pad with polishing elements on supports
View Patent ↗A polishing pad useful in chemical mechanical polishing can comprise a base pad having a top surface and surface, a plurality of polishing elements each having a top polishing surface and a bottom surface, and wherein each of the plurality of polishing elements is connected to the top surface of the base pad to the polishing element by three or more supports wherein the bottom surface of the polishing element, the top surface of the base pad and the supports define a region comprising at least one void and there are openings between the three or more supports. Such pad can be used in a method by providing a substrate and polishing the substrate with the pad, optionally, with a polishing medium.
1. A polishing pad useful in chemical mechanical polishing comprising:
a base pad having a top surface,
a plurality of polishing elements each having a top polishing surface and a bottom surface, and
wherein each of the plurality of polishing elements is connected to the top surface of the base pad to the polishing element by three or more straight supports wherein the straight supports are in a single layer and are spaced apart from each other at the polishing element and at the base pad, the three or more straight supports are at a peripheral edge of the polishing element and extend outward beyond the peripheral edge at an angle 10 to 50 degrees from perpendicular to the polishing element, and wherein the bottom surface of the polishing element, the top surface of the base pad and the straight supports define a region comprising at least one void and there are openings between the three or more straight supports.
2. The polishing pad of claim 1 wherein each polishing element has a thickness and a cross section that are independent of the straight supports and the top polishing surface of each polishing element defines a plane.
3. The polishing pad of claim 1 , wherein the polishing pad has an effective compressive modulus 10 to 90% of the modulus of the compressive modulus of the material used in the polishing element, wherein the material used in the polishing element comprises polycarbonates, polysulfones, nylons, epoxy resins, polyethers, polyesters, polystyrenes, acrylic polymers, polymethyl methacrylates, polyvinylchlorides, polyvinyl fluorides, polyethylenes, polypropylenes, polybutadienes, polyethylene imines, polyurethanes, polyether sulfones, polyamides, polyether imides, polyketones, epoxies, silicones, copolymers thereof, and combinations or blends thereof.
4. The polishing pad of claim 1 wherein a distance between the top surface of the base pad and the bottom surface of the polishing element is 0.1 to 1.5 mm.