Protective elements for bonded structures
A bonded structure is disclosed. The bonded structure can include a semiconductor element comprising active circuitry. The bonded structure can include a protective element directly bonded to the semiconductor element without an adhesive along a bonding interface. The protective element can include an obstructive material disposed over at least a portion of the active circuitry. The obstructive material can be configured to obstruct external access to the active circuitry. The bonded structure can include a disruption structure configured to disrupt functionality of the at least a portion of the active circuitry upon debonding of the protective element from the semiconductor element.
1. A bonded structure comprising:
a semiconductor element comprising active circuitry and a first bonding layer;
an obstructive element comprising a second bonding layer directly bonded to the first bonding layer of the semiconductor element without an adhesive along a bonding interface, the obstructive element including an obstructive material disposed over at least a portion of the active circuitry, the obstructive material configured to obstruct external access to the active circuitry; and
a disruption structure comprising an etch pathway through a portion of the semiconductor element, the disruption structure configured to disrupt functionality of the at least a portion of the active circuitry upon debonding of the obstructive element from the semiconductor element from a selective etch of one or more of the first and second bonding layers.
2. The bonded structure of claim 1 , wherein the obstructive material is positioned at a distance less than 10 microns from the bonding interface.
3. The bonded structure of claim 1 , wherein the first and second bonding layers comprise silicon oxide.
4. The bonded structure of claim 1 , further comprising one or more intermediate layers between the first bonding layer and the active circuitry, the one or more intermediate layers comprising circuitry, the etch pathway extending through at least a portion of the one or more intermediate layers.
5. The bonded structure of claim 4 , wherein the one or more intermediate layers includes a blocking layer, one or more openings formed in the blocking layer, the blocking extending through the one or more openings.
6. The bonded structure of claim 5 , wherein one or more openings in the blocking layer comprises the material of the first bonding layer.
7. The bonded structure of claim 5 , wherein the blocking layer comprises silicon nitride.
8. The bonded structure of claim 1 , further comprising a first plurality of contact pads in the first bonding layer and a second plurality of contact pads in the second bonding layer, the first plurality of contact pads directly bonded to the second plurality of contact pads.
9. The bonded structure of claim 8 , further comprising a first blocking layer in the first bonding layer and an anchor material layer in the second bonding layer, the first blocking layer having one or more openings therethrough.
10. The bonded structure of claim 9 , wherein the second plurality of contact pads are at least partially embedded in the anchor material layer.
11. The bonded structure of claim 8 , wherein at least one contact pad is connected to a monitoring circuit to monitor connectivity of the directly bonded first and second pluralities of contact pads.
12. The bonded structure of claim 8 , wherein at least two or more of the second plurality of contact pads are electrically connected.
13. The bonded structure of claim 1 , wherein the disruption structure further comprises a conductive trace configured to detect whether the obstructive element has been debonded from the semiconductor element.
14. The bonded structure of claim 1 , wherein the obstructive material is patterned to expose portions of the semiconductor element, the etch pathway extending through the exposed portions.
15. The bonded structure of claim 1 , wherein a first hardness of the obstructive material is greater than a second hardness of the semiconductor element or a third hardness of the material at the bonding interface.
16. The bonded structure of claim 1 , wherein the obstructive material comprises a light-blocking material configured to block light at near infrared (NIR) wavelengths.
17. A bonded structure comprising:
a semiconductor element comprising active circuitry and a first bonding layer;
an obstructive element comprising a second bonding layer directly bonded to the first bonding layer of the semiconductor element without an adhesive along a bonding interface, the obstructive element including an obstructive material disposed over at least a portion of the active circuitry, the obstructive material configured to obstruct external access to the active circuitry; and
an etch pathway through a portion of the semiconductor element, the etch pathway configured to disrupt functionality of the at least a portion of the active circuitry while debonding of the obstructive element from the semiconductor element from a selective etch of one or more of the first and second bonding layers.
18. The bonded structure of claim 17 , wherein the obstructive material is positioned at a distance less than 10 microns from the bonding interface.
19. The bonded structure of claim 17 , wherein the obstructive material comprises a destructive material having a hardness in a range of 13 GPa to 150 GPa.
20. The bonded structure of claim 17 , further comprising one or more intermediate layers between the first bonding layer and the active circuitry, the one or more intermediate layers comprising circuitry, the etch pathway extending through at least a portion of the one or more intermediate layers.
21. The bonded structure of claim 20 , wherein the one or more intermediate layers includes a blocking layer, one or more openings formed in the blocking layer, the etch pathway extending through the one or more openings.
22. The bonded structure of claim 21 , wherein the blocking layer comprises silicon nitride.
23. The bonded structure of claim 21 , further comprising a plurality of dielectric layers separated by a plurality of blocking layers, the plurality of dielectric layers comprising a same material as the first bonding layer.
24. The bonded structure of claim 20 , further comprising a first plurality of contact pads in the first bonding layer and a second plurality of contact pads in the second bonding layer, the first plurality of contact pads directly bonded to the second plurality of contact pads.
25. The bonded structure of claim 24 , further comprising a first blocking layer in the first bonding layer and an anchor material layer in the second bonding layer, the first blocking layer having one or more openings therethrough, and wherein the second plurality of contact pads are at least partially embedded in the anchor material layer.
26. The bonded structure of claim 24 , wherein at least one contact pad is connected to a monitoring circuit to monitor connectivity of the directly bonded first and second pluralities of contact pads.
27. The bonded structure of claim 17 , wherein the obstructive material is patterned to expose portions of the semiconductor element, the etch pathway extending through the exposed portions.