IP Library Granted Patent US 11,185,957
Granted Patent B2
US 11,185,957 · App. 16/854,207 · Granted Nov 30, 2021

Multi-axis machine tool and methods of controlling the same

Inventors: Guang Lu (Lake Oswego, OR); Mehmet E. Alpay (Portland, OR); Mike Tyler (Hillsboro, OR); Qian Xu (Portland, OR); Jan Kleinert (Wilsonville, OR); Zhibin Lin (Portland, OR); James D. Brookhyser (Portland, OR); Ho Wai Lo (Portland, OR); Kurt M. Eaton (West Linn, OR)
Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INC
B23Q15/14G05B19/19G05B19/402G05B19/234G05B2219/34015G05B2219/41196G05B2219/41217G05B2219/41427G05B2219/50218
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Quick Facts
Patent No.
US 11,185,957
App. No.
16/854,207
Granted
Nov 30, 2021
Kind
B2
Abstract

One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.

Claims (10)

1. An apparatus, comprising:

a scan lens arranged and configured to focus a beam of a laser light thereby producing a focused beam of the laser light, wherein the focused beam of the laser light has a beam waist and propagates along a beam axis;

a linear actuator to move the scan lens along at the beam axis;

at least one positioner arranged between a laser source and the scan lens, wherein the at least one positioner is operative to move the beam waist along the beam axis, wherein a bandwidth of the at least one positioner is higher than a bandwidth of the linear actuator, and wherein the at least one positioner includes at least one selected from a group consisting of an acousto-optic deflector (AOD) system, a microelectromechanical systems (MEMS) mirror system and an adaptive optical (AO) system; and

a controller communicatively coupled to the linear actuator and the at least one positioner, wherein the controller is operative to:

generate a low-frequency linear actuator command and a high-frequency linear actuator command based, at least in part, on an input linear actuator command, a first output linear output command, a second output linear output command, wherein the low-frequency linear actuator command has a frequency content that is within the bandwidth of the linear actuator, and wherein the high-frequency linear actuator command has a frequency content that is within the bandwidth of the at least one positioner;

output a low-frequency content linear actuator command to the linear actuator; and

output a high-frequency content linear actuator command to the at least one positioner.

2. The apparatus of claim 1 , wherein the frequency content of the high-frequency linear actuator command exceeds the bandwidth of the actuator.

3. The apparatus of claim 1 , further comprising at least one galvanometer-driven mirror system arranged between the scan lens and the at least one positioner.

Assignments (6)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
PATENT SECURITY AGREEMENT (TERM LOAN) Recorded Jul 16, 2020
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.
To: BARCLAYS BANK PLC
Reel/Frame 053235/0841 →
PATENT SECURITY AGREEMENT (ABL) Recorded Jul 16, 2020
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.
To: BARCLAYS BANK PLC
Reel/Frame 053235/0848 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 21, 2020
From: LU, GUANG; ALPAY, MEHMET E.; TYLER, MIKE; XU, QIAN; KLEINERT, JAN; LIN, ZHIBIN; BROOKHYSER, JAMES D.; LO, HO WAI; EATON, KURT M.
To: ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 052457/0411 →
Continuity (5)
Continuation 15966615 · Apr 30, 2018
Continuation 15188496 · Jun 21, 2016
Provisional Application 62183009 · Jun 22, 2015
Provisional Application 62281967 · Jan 22, 2016
Related Publication 20200246929A1 · Aug 6, 2020