IP Library Granted Patent US 11,906,493
Granted Patent B2
US 11,906,493 · App. 16/908,865 · Granted Feb 20, 2024

Gas sensors and methods of sensing a gas-phase analyte

Inventors: Catherine Mulzer (Grafton, MA); Christopher D. Gilmore (Natick, MA); Hee Jae Yoon (Seoul, KR); Jaclyn Murphy (Ashland, MA); Brian Litchfield (West Boylston, MA)
Assignee: Rohm and Haas Electronic Materials LLC
G01N31/223C08G65/34G01N21/3504G01N21/65G01N21/77G01N23/2273G01N27/12G01N27/227G01N29/2443G01N2021/3595G01N2223/07G01N2291/014G01N2291/021
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Quick Facts
Patent No.
US 11,906,493
App. No.
16/908,865
Granted
Feb 20, 2024
Kind
B2
Abstract

Gas sensors are provided. The gas sensors comprise: a substrate; a plurality of electrodes on the substrate; and a polymeric sensing layer on the substrate for adsorbing a gas-phase analyte. The adsorption of the analyte is effective to change a property of the gas sensor that results in a change in an output signal from the gas sensor. The polymeric sensing layer comprises a polymer chosen from substituted or unsubstituted polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising two or more cyclopentadienone groups, or a cured product of the reaction product. The gas sensors and methods of using such sensors find particular applicability in the sensing of gas-phase organic analytes.

Claims (29)

1. A gas sensor, comprising:

a substrate;

a plurality of electrodes on the substrate; and

a polymeric sensing layer on the substrate for adsorbing a gas-phase analyte, the adsorption of which analyte is effective to change a property of the gas sensor that results in a change in an output signal from the gas sensor, wherein the polymeric sensing layer comprises a polymer chosen from substituted or unsubstituted polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising two or more cyclopentadienone groups, or a cured product of the reaction product, wherein the first monomer is chosen from monomers of formula (1) or formula (2):

 wherein: R is independently chosen from H, —C(═O)OR 2 , substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl; R 1 is independently chosen from F, substituted or unsubstituted C 1-10 alkyl, substituted or unsubstituted C 6-20 aryl, C 4-20 heteroaryl, —C≡C—R, —C(═O)OR 2 , —C(═O)NHR 3 , —O—C(═O)R 4 , —NHC(═O)R 5 ,— S(═O) 2 —OR 6 , or S(═O) 2 —NHR 3 ; R 2 is independently chosen from H, substituted or unsubstituted C 1-10 alkyl, C 6-20 aryl, or C 4-20 heteroaryl; R 3 is independently chosen from H or substituted or unsubstituted C 1-10 alkyl; R 4 is independently chosen from H or substituted or unsubstituted C 1-10 alkyl; R 5 is independently chosen from H or substituted or unsubstituted C 1-10 alkyl; R 6 is independently chosen from H or substituted or unsubstituted C 1-10 alkyl; and a in formula (1) is an integer from 0 to 2, and a in formula (2) is an integer from 0 to 3; and the second monomer is of formula (3A):

 wherein each R 7 is independently chosen from H, substituted or unsubstituted C 1-6 alkyl, substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl; R 8 is substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl; R 9 is independently chosen from substituted or unsubstituted C 1-6 alkyl, substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl; and Ar 1 is an aromatic moiety.

2. The gas sensor of claim 1 , wherein the polymer exhibits an FTIR spectroscopy spectrum having a ratio of total peak area from 1648 to 1690 cm −1 to total peak area from 1480 to 1522 cm +1 of 0.15 or less.

3. The gas sensor of claim 2 , wherein the polymeric sensing layer exhibits a Raman spectroscopy spectrum having a ratio of total peak area from 2190 to 2250 cm −1 to total peak area from 1550 to 1650 cm −1 of 1.0 or less.

4. The gas sensor of claim 1 , wherein the polymeric sensing layer has an oxygen content of 7 atomic % or less as measured by x-ray photoelectron spectroscopy.

5. The gas sensor of claim 1 , wherein the polymeric sensing layer is formed by a process comprising coating a composition comprising the first monomer, the second monomer and a solvent, and curing the coated composition at a temperature of from 300 to 400° in an inert gas atmosphere.

6. The gas sensor of claim 1 , wherein the gas sensor is an acoustic wave, capacitive, or conductometric gas sensor.

7. The gas sensor of claim 6 , wherein the gas sensor is an acoustic wave gas sensor.

8. A method of sensing a gas-phase analyte, comprising:

(a) providing a gas sensor, comprising:

a substrate;

a plurality of electrodes on the substrate; and

a polymeric sensing layer on the substrate for adsorbing a gas-phase analyte, the adsorption of which analyte is effective to change a property of the gas sensor that results in a change in an output signal from the gas sensor, wherein the polymeric sensing layer comprises a polymer chosen from substituted or unsubstituted polyarylenes comprising the reaction product of monomers comprising a first monomer comprising an aromatic acetylene group and a second monomer comprising two or more cyclopentadienone groups, or a cured product of the reaction product, wherein the first monomer is chosen from monomers of formula (1) or formula (2):

 wherein: R is independently chosen from H, —C(═O)OR 2 , substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl; R 1 is independently chosen from F, substituted or unsubstituted C 1-10 alkyl, substituted or unsubstituted C 6-20 aryl, C 4-20 heteroaryl, —C≡C—R, —C(═O)OR 2 , —C(═O)NHR 3 , —O—C(═O)R 4 , —NHC(═O)R 5 ,—S(═O) 2 —OR 6 , or S(═O) 2 —NHR 3 ; R 2 is independently chosen from H, substituted or unsubstituted C 1-10 alkyl, C 6-20 aryl, or C 4-20 heteroaryl; R 3 is independently chosen from H or substituted or unsubstituted C 1-10 alkyl; R 4 is independently chosen from H or substituted or unsubstituted C 1-10 alkyl; R 5 is independently chosen from H or substituted or unsubstituted C 1-10 alkyl; R 6 is independently chosen from H or substituted or unsubstituted C 1-10 alkyl; and a in formula (1) is an integer from 0 to 2, and a in formula (2) is an integer from 0 to 3, and wherein the second monomer is of formula (3A):

 wherein each R 7 is independently chosen from H, substituted or unsubstituted C 1-6 alkyl, substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl; R 8 is substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl; R 9 is independently chosen from substituted or unsubstituted C 1-6 alkyl, substituted or unsubstituted C 6-20 aryl, or substituted or unsubstituted C 4-20 heteroaryl; and Ar 1 is an aromatic moiety; and

(b) exposing the polymeric sensing layer to an atmosphere comprising a gas-phase analyte.

9. The method of claim 8 , wherein adsorption of the gas-phase analyte is effective to change a property of the gas sensor that results in a change in an output signal from the gas sensor.

10. The method of claim 9 , further comprising, in sequence:

(c) exposing the sensor to a second atmosphere effective to reduce the content of the gas-phase analyte in the sensor;

(d) allowing the resonant frequency of the acoustic wave sensor to recover to a baseline frequency; and

(e) exposing the sensor to a third atmosphere comprising a gas-phase analyte;

wherein the step (d), (e), and (f) sequence is performed one or more times.

11. The method of claim 8 , wherein the gas-phase analyte is an organic material.

12. The method of claim 11 , wherein the gas-phase analyte is chosen from one or more of benzene, toluene, xylene, mesitylene, ethanol, formaldehyde, acetaldehyde, acetone, acetic acid, or a trialkylamine.

13. The method of claim 8 , wherein the gas-phase analyte is an inorganic material.

Assignments (6)
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 073515/0243 →
SECURITY INTEREST Recorded Nov 3, 2025
From: QNITY ELECTRONICS, INC.
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS NOTES COLLATERAL AGENT
Reel/Frame 073517/0298 →
CHANGE OF NAME Recorded Oct 29, 2024
From: ROHM & HAAS ELECTRONIC MATERIALS LLC
To: DUPONT ELECTRONIC MATERIALS INTERNATIONAL, LLC
Reel/Frame 069272/0383 →
CHANGE OF NAME Recorded Oct 17, 2024
From: ROHM & HAAS ELECTRONIC MATERIALS KOREA LTD
To: DUPONT SPECIALTY MATERIALS KOREA LTD
Reel/Frame 069185/0438 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 27, 2022
From: YOON, HEE JAE
To: ROHM AND HAAS ELECTRONIC MATERIALS KOREA LTD.
Reel/Frame 058789/0139 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 27, 2022
From: MULZER, CATHERINE; GILMORE, CHRISTOPHER D.; MURPHY, JACLYN
To: ROHM AND HAAS ELECTRONIC MATERIALS LLC
Reel/Frame 058789/0245 →