IP Library › Granted Patent US 11,417,762
Granted Patent B2
US 11,417,762 · App. 16/911,677 · Granted Aug 16, 2022

Switch with integrated Schottky barrier contact

Inventors: Yun Shi (San Diego, CA); John Tzung-Yin Lee (Costa Mesa, CA)
Assignee: Skyworks Solutions, Inc.
H01L29/7839H03K17/6871H03F3/245H03F2200/451
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,417,762
App. No.
16/911,677
Granted
Aug 16, 2022
Kind
B2
Abstract

Circuits, systems, devices, and methods related to a switch with an integrated Schottky barrier contact are discussed herein. For example, a radio-frequency switch can include an input node, an output node, and a transistor connected between the input node and the output node. The transistor can be configured to control passage of a radio-frequency signal from the input node to the output node. The transistor can include a first Schottky diode integrated into a drain of the transistor and/or a second Schottky diode integrated into a source of the transistor. The first Schottky diode and/or the second Schottky diode can be configured to compensate a non-linearity effect of the radio-frequency switch.

Claims (33)

1. A radio-frequency switch comprising:

an input node;

an output node; and

a transistor connected between the input node and the output node, the transistor being configured to control passage of a radio-frequency signal from the input node to the output node, the transistor including a first Schottky diode integrated into a drain of the transistor and a second Schottky diode integrated into a source of the transistor, the first Schottky diode including a first semiconductor region and a first contact disposed on the first semiconductor region, the first semiconductor region being disposed in a p-well or n-well region, the first contact being coupled to at least one of the input node or the output node, the second Schottky diode including a second semiconductor region and a second contact disposed on the second semiconductor region, the second semiconductor region being disposed in the p-well or n-well region, the second contact being coupled to at least one of the input node or the output node, the first semiconductor region and the second semiconductor region each including a doping concentration that is less than a threshold such that the first semiconductor region and the second semiconductor region are each classified as including a low doping concentration, at least one of the first Schottky diode or the second Schottky diode being configured to compensate a non-linearity effect of the radio-frequency switch, the transistor being implemented as a Silicon-on-Insulator (SOI) device.

2. The radio-frequency switch of claim 1 wherein at least one of the first Schottky diode or the second Schottky diode is configured to compensate for third order distortion.

3. The radio-frequency switch of claim 1 wherein the first Schottky diode is integrated into the drain and the second Schottky diode is integrated into the source at a substrate level.

4. The radio-frequency switch of claim 1 wherein the doping concentration is less than a doping concentration of an ohmic contact.

5. The radio-frequency switch of claim 1 wherein the doping concentration is less than, by at least a threshold amount, a doping concentration of an ohmic contact.

6. A radio-frequency switch comprising:

an input node;

an output node; and

a signal path connected between the input node and the output node, the signal path including at least one transistor that includes a first Schottky diode integrated into a drain of the at least one transistor and a second Schottky diode integrated into a source of the at least one transistor, the first Schottky diode including a first semiconductor region and a first contact disposed on the first semiconductor region, the first semiconductor region being formed in a p-well or n-well region, the first contact being coupled to at least one of the input node or the output node, the second Schottky diode including a second semiconductor region and a second contact disposed on the second semiconductor region, the second semiconductor region being formed in the p-well or n-well region, the second contact being coupled to at least one of the input node or the output node, the first semiconductor region and the second semiconductor region each including a doping concentration that is classified as low doping.

7. The radio-frequency switch of claim 6 wherein the first Schottky diode is configured to minimize third order distortion of the radio-frequency switch.

8. The radio-frequency switch of claim 6 wherein the at least one transistor is implemented as a Silicon-on-Insulator (SOI) device.

9. The radio-frequency switch of claim 6 wherein the first Schottky diode and the second Schottky diode are integrated into the at least one transistor at a substrate level.

10. A radio-frequency module comprising:

a packaging substrate to receive a plurality of components; and

a semiconductor die mounted on the packaging substrate, the semiconductor die including the radio-frequency switch of claim 6 .

11. A radio-frequency device comprising:

a transceiver configured to generate a radio-frequency signal;

a power amplifier connected to the transceiver and configured to generate an amplified radio-frequency signal; and

the radio-frequency switch of claim 6 connected to the power amplifier, the radio-frequency switch being configured to selectively route the amplified radio-frequency signal.

12. The radio-frequency switch of claim 6 wherein the doping concentration is less than a doping concentration of an ohmic contact.

13. The radio-frequency switch of claim 6 wherein the doping concentration is less than, by at least a threshold amount, a doping concentration of an ohmic contact.

14. A method of fabricating a transistor, the method comprising:

forming a p-well or an n-well in a substrate;

forming a gate for the transistor; and

forming a first Schottky barrier for a source of the transistor and a second Schottky barrier for a drain of the transistor by:

doping a first region and a second region within the p-well or the n-well with a concentration below a threshold such that the first region and the second region are each classified as including a low doping concentration; and

forming a first contact on the first region and a second contact on the second region.

15. The method of claim 14 further comprising forming an insulator layer on the semiconductor substrate to form the transistor as a Silicon-on-Insulator (SOI) device.

16. The method of claim 14 wherein the concentration is less than a doping concentration of an ohmic contact.

17. The method of claim 14 wherein the concentration is less than, by at least a threshold amount, a doping concentration of an ohmic contact.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 9, 2021
From: SHI, YUN; LEE, JOHN TZUNG-YIN
To: SKYWORKS SOLUTIONS, INC.
Reel/Frame 055202/0740 →
Continuity (2)
Provisional Application 62866737 · Jun 26, 2019
Related Publication 20210013342A1 · Jan 14, 2021
Cited By (1)
US 12,593,491