Semiconductor memory device and manufacturing method thereof
There are provided a semiconductor memory device and a manufacturing method thereof. The semiconductor memory device includes: a source layer; a channel structure extending in a first direction from within the source layer; a source-channel contact layer surrounding the channel structure on the source layer; a first select gate layer overlapping with the source-channel contact layer and surrounding the channel structure; a stack including interlayer insulating layers and conductive patterns that are alternately stacked in the first direction and surrounding the channel structure, the stack overlapping with the first select gate layer; and a first insulating pattern that is formed thicker between the first select gate layer and the channel structure than between the stack and the channel structure.
1. A semiconductor memory device comprising:
a source layer;
a channel structure extending in a first direction from within the source layer;
a source-channel contact layer surrounding the channel structure, on the source layer;
a first select gate layer overlapping with the source-channel contact layer and surrounding the channel structure;
a stack including interlayer insulating layers and conductive patterns that are alternately stacked in the first direction and surrounding the channel structure, the stack overlapping with the first select gate layer; and
a first insulating pattern that is formed thicker between the first select gate layer and the channel structure than between the stack and the channel structure.
2. The semiconductor memory device of claim 1 , wherein the first insulating pattern includes a first portion between the first select gate layer and the channel structure, a second portion disposed between the stack and the channel structure, and a third portion disposed between the first select gate layer and the source-channel contact layer,
wherein the first portion of the first insulating pattern is thicker than the second portion.
3. The semiconductor memory device of claim 2 , wherein the stack extends toward the channel structure to overlap with the first portion of the first insulating pattern.
4. The semiconductor memory device of claim 2 , wherein the third portion of the first insulating pattern has an uneven surface in contact with the source-channel contact layer.
5. The semiconductor memory device of claim 1 , further comprising:
a data storage layer disposed between the first insulating pattern and the channel structure on the source-channel contact layer; and
a tunnel insulating layer disposed between the data storage layer and the channel structure on the source-channel contact layer.
6. The semiconductor memory device of claim 5 , wherein the source-channel contact layer protrudes toward the data storage layer and the tunnel insulating layer.
7. The semiconductor memory device of claim 2 , wherein the third portion of the first insulating pattern extends along a bottom surface of the first select gate layer facing the source layer.
8. The semiconductor memory device of claim 1 ,
further comprising a second select gate layer surrounding the channel structure between the first select gate layer and the stack,
wherein the first select gate layer and the second select gate layer form a source select line.
9. The semiconductor memory device of claim 8 , wherein the portion of the first insulating pattern between the stack and the channel structure extends in between the second select gate layer and the channel structure.
10. The semiconductor memory device of claim 1 , further comprising a second insulating pattern that is disposed between the source layer and the channel structure, the insulating pattern being thicker than the second portion of the first insulating pattern between the stack and the channel structure.