Chip-scale sensor package structure
A chip-scale sensor package structure includes a sensor chip, a first package body surrounding and connected to an outer lateral side of the sensor chip, a ring-shaped support disposed on a top side of the first package body, a light permeable member disposed on the ring-shaped support, and a redistribution layer (RDL) disposed on a bottom surface of the sensor chip and a bottom side of the first package body. The sensor chip includes a sensing region arranged on the top surface thereof, a plurality of internal contacts, and a plurality of conductive paths respectively connected to the internal contacts and electrically coupled to the sensing region. The sensing region is spaced apart from the ring-shaped support by a distance less than 300 μm. A bottom surface of the RDL has a plurality of external contacts electrically coupled to the internal contacts.
1. A chip-scale sensor package structure, comprising:
a sensor chip including a sensing region arranged on a top surface thereof, a plurality of internal contacts arranged on a bottom surface thereof, and a plurality of conductive paths extending from the top surface to the bottom surface thereof, wherein the conductive paths are respectively connected to the internal contacts and electrically coupled to the sensing region;
a first package body surrounding and connected to an outer lateral side of the sensor chip;
a ring-shaped support disposed on a top side of the first package body without contacting the top surface of the sensor chip, wherein the sensing region is spaced apart from the ring-shaped support by a distance which is less than 300 μm;
a light permeable member having a first surface and a second surface that is opposite to the first surface, wherein the second surface of the light permeable member is disposed on the ring-shaped support, and the light permeable member, the ring-shaped support, and the sensor chip jointly define an enclosed space; and
a redistribution layer (RDL) disposed on the bottom surface of the sensor chip and a bottom side of the first package body, wherein a bottom surface of the RDL has a plurality of external contacts electrically coupled to the internal contacts;
wherein the top side of the first package body is coplanar with the top surface of the sensor chip, and an outer lateral side of the light permeable member is coplanar with an outer lateral side of the ring-shaped support;
wherein at least one of the external contacts is arranged outside of a projection region defined by orthogonally projecting the internal contacts onto the bottom surface of the RDL.
2. The chip-scale sensor package structure according to claim 1 , wherein an inner lateral side of the ring-shaped support is coplanar with an inner lateral side of the first package body.
3. The chip-scale sensor package structure according to claim 1 , further comprising a second package body disposed on the top side of the first package body, wherein the second package body surrounds and is connected to the outer lateral side of the light permeable member.
4. The chip-scale sensor package structure according to claim 3 , wherein the second package body surrounds and is connected to the outer lateral side of the ring-shaped support.
5. The chip-scale sensor package structure according to claim 3 , wherein the first surface of the light permeable member is exposed from the second package body.
6. The chip-scale sensor package structure according to claim 3 , wherein the top side of the first package body has an inner region connected to the ring-shaped body and an outer region that is connected to the second package body, and an area difference between the inner region and the outer region is equal to or less than 15% of an area of the top side of the first package body.
7. The chip-scale sensor package structure according to claim 3 , wherein an outer lateral side of the first package body is coplanar with an outer lateral side of the second package body, and is coplanar with an outer lateral side of the RDL.
8. The chip-scale sensor package structure according to claim 1 , wherein the RDL is formed directly on the bottom surface of the sensor chip and the bottom side of the first package body.
9. A chip-scale sensor package structure, comprising:
a sensor chip including a sensing region arranged on a top surface thereof, a plurality of internal contacts arranged on a bottom surface thereof, and a plurality of conductive paths extending from the top surface to the bottom surface thereof, wherein the conductive paths are respectively connected to the internal contacts and electrically coupled to the sensing region;
a first package body surrounding and connected to an outer lateral side of the sensor chip;
a ring-shaped support disposed on a top side of the first package body without contacting the top surface of the sensor chip, wherein the sensing region is spaced apart from the ring-shaped support by a distance which is less than 300 μm;
a light permeable member having a first surface and a second surface that is opposite to the first surface, wherein the second surface of the light permeable member is disposed on the ring-shaped support, and the light permeable member, the ring-shaped support, and the sensor chip jointly define an enclosed space;
a redistribution layer (RDL) disposed on the bottom surface of the sensor chip and a bottom side of the first package body, wherein a bottom surface of the RDL has a plurality of external contacts electrically coupled to the internal contacts; and
a second package body disposed on the top side of the first package body, wherein the second package body surrounds and is connected to the outer lateral side of the light permeable member, and an outer lateral side of the first package body is coplanar with an outer lateral side of the second package body, and is coplanar with an outer lateral side of the RDL;
wherein the top side of the first package body is coplanar with the top surface of the sensor chip, and an outer lateral side of the light permeable member is coplanar with an outer lateral side of the ring-shaped support.