IP Library Granted Patent US 11,480,468
Granted Patent B2
US 11,480,468 · App. 16/948,285 · Granted Oct 25, 2022

Tunable terahertz detector

Inventors: Gareth Pryce Weale (New Hamburg, CA); Jan Chochol (Usti nad Labem, CZ)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
G01J3/2803H01L27/1446H01L31/0304H01L31/03044H01L31/1129G01J2003/2813
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Quick Facts
Patent No.
US 11,480,468
App. No.
16/948,285
Granted
Oct 25, 2022
Kind
B2
Abstract

A terahertz detector circuit can include a high electron mobility transistor (HEMT) having multiple gates that can be controlled by gate signals to generate a gate-induced modulation pattern in a two-dimensional electron gas (2DEG) of the HEMT. When the gate induced modulation pattern substantially matches a signal induced modulation pattern generated by an incident terahertz signal then a detection efficiency of the incident terahertz signal is improved. Accordingly, an electronically tunable THz detector with high efficiency can be realized. When these THz detectors are arranged in an array and electrically coupled, THz images and/or multi-spectral THz images may be generated.

Claims (36)

1. A terahertz detector circuit, comprising:

a high electron mobility transistor (HEMT) including:

a two-dimensional electron gas (2DEG) at a heterojunction between a first heterojunction layer and a second heterojunction layer; and

a plurality of gate terminals disposed on a trace layer, the first heterojunction layer between the trace layer and the 2DEG; and

a gate driver configured to apply signals to the plurality of gate terminals according to a tuning configuration in order to generate a gate-induced modulation pattern in the 2DEG, the gate-induced modulation pattern increasing a detection sensitivity for a particular terahertz signal.

2. The terahertz detector circuit according to claim 1 , wherein the plurality of gate terminals are spaced apart and span at least a portion of the 2DEG.

3. The terahertz detector circuit according to claim 1 , wherein the particular terahertz signal generates a signal-induced modulation pattern in the 2DEG that is correlated to the gate-induced modulation pattern.

4. The terahertz detector circuit according to claim 3 , wherein a spatial frequency of the signal-induced modulation pattern is substantially equal to a spatial frequency of the gate-induced modulation pattern.

5. The terahertz detector circuit according to claim 4 , wherein a spatial phase of the signal-induced modulation pattern is substantially equal to a spatial phase of the gate-induced modulation pattern.

6. The terahertz detector circuit according to claim 1 , wherein the first heterojunction layer and the second heterojunction layer are materials having different bandgaps, the materials based on Gallium Nitride (GaN).

7. The terahertz detector circuit according to claim 1 , wherein the first heterojunction layer and the second heterojunction layer are materials having different bandgaps, the materials based on Gallium Arsenide (GaAs).

8. The terahertz detector circuit according to claim 1 , wherein the first heterojunction layer and the second heterojunction layer are materials having different bandgaps, the materials based on Indium Phosphide (InP).

9. The terahertz detector circuit according to claim 1 , wherein the particular terahertz signal passes through the trace layer before reaching the heterojunction according to a front-side illumination configuration.

10. The terahertz detector circuit according to claim 1 , wherein the particular terahertz signal passes through a substrate layer before reaching the heterojunction according to a back-side illumination configuration.

11. The terahertz detector circuit according to claim 10 , wherein the substrate layer of the HEMT is silicon carbide (SiC).

12. The terahertz detector circuit according to claim 1 , wherein the HEMT is coupled to an antenna tuned to receive the particular terahertz signal.

13. The terahertz detector circuit according to claim 1 , wherein the tuning configuration approximates a sinusoid.

14. The terahertz detector circuit according to claim 13 , wherein the signals applied to the plurality of gate terminals are each at one of a plurality of levels.

15. The terahertz detector circuit according to claim 14 , wherein the plurality of levels are an ON level that when applied to a gate increases a local electron density under the gate and an OFF level that when applied to the gate decrease the local electron density under the gate.

16. A terahertz detector array, comprising:

a plurality of high electron mobility transistors (HEMTs), each HEMT including:

a two-dimensional electron gas (2DEG) at a heterojunction between a first heterojunction layer and a second heterojunction layer; and

a plurality of gate terminals disposed on a trace layer, the first heterojunction layer between the trace layer and the 2DEG;

a gate driver circuit configured to apply signals to the plurality of gate terminals of each HEMT according to a tuning configuration in order to generate a gate-induced modulation pattern in the 2DEG, the gate-induced modulation pattern increasing a detection sensitivity for a particular terahertz signal; and

a sensing and readout circuit configured to receive detection signals from each HEMT in response to the particular terahertz signal and to generate an output based on the detection signals.

17. The terahertz detector array according to claim 16 , wherein the output is a terahertz image.

18. The terahertz detector array according to claim 16 , wherein the output is a multi-spectral terahertz image.

19. A method for detecting terahertz (THz) radiation, the method comprising:

applying a first set of gate signals to a plurality of gate terminals that are spatially coupled to a two-dimensional electron gas (2DEG);

generating a first gate-induced modulation pattern in the 2DEG based on the first set of gate signals;

receiving THz radiation at the 2DEG, the THz radiation including frequency components that generate signal-induced modulation patterns in the 2DEG; and

detecting a first frequency component of the THz radiation that generates a first signal-induced modulation pattern that substantially matches the first gate-induced modulation pattern.

20. The method for detecting terahertz (THz) radiation according to claim 19 , further including:

applying a second set of gate signals to the plurality of gate terminals;

generating a second gate-induced modulation pattern in the 2DEG based on the second set of gate signals; and

detecting a second frequency component of the THz radiation that generates a second signal-induced modulation pattern that substantially matches the second gate-induced modulation pattern.

Assignments (4)
RELEASE OF SECURITY INTEREST IN PATENTS PREVIOUSLY RECORDED AT REEL 054523, FRAME 0378 Recorded Aug 16, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 064615/0602 →
SECURITY INTEREST Recorded Jul 13, 2023
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; GTAT CORPORATION
To: JPMORGAN CHASE BANK, N.A.
Reel/Frame 064271/0971 →
SECURITY INTEREST Recorded Nov 25, 2020
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 054523/0378 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 11, 2020
From: WEALE, GARETH PRYCE; CHOCHOL, JAN
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 053743/0834 →
Continuity (1)
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