IP Library Granted Patent US 11,728,424
Granted Patent B2
US 11,728,424 · App. 16/949,321 · Granted Aug 15, 2023

Isolation in a semiconductor device

Inventors: Takashi Noma (Ota, JP); Yusheng Lin (Phoenix, AZ); Kazuo Okada (Ota, JP); Hideaki Yoshimi (Oizumi-machi, JP); Shunsuke Yasuda (Ora-gun, JP)
Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
H01L29/7816H01L29/66295H01L29/7395
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Quick Facts
Patent No.
US 11,728,424
App. No.
16/949,321
Granted
Aug 15, 2023
Kind
B2
Abstract

According to an aspect, a semiconductor device for integrating multiple transistors includes a wafer substrate including a first region and a second region. The first region defines at least a portion of at least one first transistor. The second region defines at least a portion of at least one second transistor. The semiconductor device includes an isolation area located between the first region and the second region, at least one terminal of the at least one first transistor contacting the first region of the wafer substrate, at least one terminal of the at least one second transistor contacting the second region of the wafer substrate, and an encapsulation material, where the encapsulation material includes a portion located within the isolation area.

Claims (38)

1. A semiconductor device for integrating multiple transistors, the semiconductor device comprising:

a wafer substrate including a first region and a second region, the first region defining at least a portion of at least one first transistor, the second region defining at least a portion of at least one second transistor;

an isolation area located between the first region and the second region;

at least one terminal of the at least one first transistor contacting the first region of the wafer substrate;

at least one terminal of the at least one second transistor contacting the second region of the wafer substrate;

an electrode coupled to the at least one terminal of the at least one first transistor; and

an encapsulation material, the encapsulation material including a first portion located within the isolation area and a second portion extending from the first portion to at least a portion of a first edge of the electrode, the encapsulation material including a third portion that extends between a second edge of the electrode and an edge of the semiconductor device.

2. The semiconductor device of claim 1 , wherein the isolation area is a first isolation area, and the wafer substrate includes a third region, the third region defining at least a portion of at least one third transistor, the semiconductor device further comprising:

a second isolation area located between the first region and the third region,

wherein the encapsulation material includes a fourth third portion located within the second isolation area.

3. The semiconductor device of claim 1 , wherein the electrode is a first electrode, the semiconductor device further comprising:

a second electrode coupled to the at least one terminal of the at least one second transistor.

4. The semiconductor device of claim 3 , wherein the second portion includes a portion that extends between the first edge of the first electrode and an edge of the second electrode.

5. The semiconductor device of claim 1 , further comprising:

a backplate including a first region and a second region, the first region of the backplate contacting the first region of the wafer substrate, the second region of the backplate contacting the second region of the wafer substrate.

6. The semiconductor device of claim 1 , wherein the encapsulation material includes a molding material.

7. The semiconductor device of claim 1 , wherein the encapsulation material includes a solder resist material.

8. The semiconductor device of claim 1 , wherein the at least one first transistor is a power field-effect transistor (FET), and the at least one second transistor is a sensor field effect transistor (FET).

9. A semiconductor device for integrating multiple transistors, the semiconductor device comprising:

a wafer substrate including a first region and a second region, the first region defining at least a portion of at least one first transistor, the second region defining at least a portion of at least one second transistor;

a backplate including a first region and a second region, the first region of the backplate contacting the first region of the wafer substrate, the second region of the backplate contacting the second region of the wafer substrate;

an electrode coupled to a terminal of the at least one first transistor, the terminal contacting the first region of the wafer substrate;

an isolation area located between the first region of the wafer substrate and the second region of the wafer substrate; and

an encapsulation material, the encapsulation material including a first portion located within the isolation area and a second portion extending from the first portion to at least a portion of a first-aft edge of the electrode, the encapsulation material including a third portion that extends between a second edge of the electrode and an edge of the semiconductor device.

10. The semiconductor device of claim 9 , wherein the electrode is a first electrode, the semiconductor device further comprising:

a second electrode coupled to a terminal of the at least one second transistor, the terminal contacting the second region of the wafer substrate.

11. The semiconductor device of claim 10 , wherein the second portion includes a portion that extends between the first edge of the first electrode and an edge of the second electrode.

12. The semiconductor device of claim 9 , wherein the at least one first transistor includes two first transistors, and the at least one second transistor includes two second transistors, wherein drains of the two first transistors are connected in series, wherein drains of the two second transistors are connected in series.

13. The semiconductor device of claim 9 , wherein the encapsulation material includes a molding material.

14. The semiconductor device of claim 9 , wherein the encapsulation material includes a solder resist material.

15. The semiconductor device of claim 9 , wherein the at least one first transistor is a power field-effect transistor (FET), and the at least one second transistor is a sensor FET.

16. A semiconductor device for integrating multiple transistors, the semiconductor device comprising:

a wafer substrate including a first region and a second region, the first region defining at least a portion of at least one first transistor, the second region defining at least a portion of at least one second transistor;

an isolation area located between the first region and the second region;

at least one terminal of the at least one first transistor at least partially embedded in the first region of the wafer substrate;

at least one terminal of the at least one second transistor at least partially embedded in the second region of the wafer substrate;

an electrode coupled to the at least one terminal of the at least one first transistor; and

an encapsulation material, the encapsulation material including a first portion located within the isolation area and a second portion extending from the first portion to at least a portion of a first edge of the electrode, the encapsulation material including a third portion that extends between a second edge of the electrode and an edge of the semiconductor device.

Assignments (3)
RELEASE OF SECURITY INTEREST IN PATENTS PREVIOUSLY RECORDED AT REEL 055315, FRAME 0350 Recorded Aug 17, 2023
From: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
Reel/Frame 064618/0881 →
SECURITY INTEREST Recorded Feb 17, 2021
From: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC; FAIRCHILD SEMICONDUCTOR CORPORATION
To: DEUTSCHE BANK AG NEW YORK BRANCH, AS COLLATERAL AGENT
Reel/Frame 055315/0350 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 26, 2020
From: NOMA, TAKASHI; LIN, YUSHENG; OKADA, KAZUO; YOSHIMI, HIDEAKI; YASUDA, SHUNSUKE
To: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Reel/Frame 054164/0700 →