CHARGE BALANCED RECTIFIER WITH SHIELDING

1 . A Schottky rectifier device, comprising:

a Silicon Carbide (SiC) layer;

a metal contact;

an n-type channel region disposed between the SiC layer and the metal contact;

a p-pillar adjacent to the metal contact and extending in a direction of the SiC layer;

a p-type shielding body adjacent to the metal contact and extending from the metal contact in a direction of the SiC layer;

a first channel region of the n-type channel region having a first n-type doping concentration, and disposed between the p-pillar and the p-type shielding body, the first channel region being adjacent to the metal contact; and

an n-pillar providing a second channel region of the n-type channel region and having a second n-type doping concentration that is lower than the first n-type doping concentration in the first channel region, the n-pillar being disposed adjacent to the first channel region, and to the p-pillar.

2 . The Schottky rectifier device of claim 1 , wherein the p-pillar extends at least half of a distance of the n-type channel region.

3 . The Schottky rectifier device of claim 1 , wherein the p-type shielding body extends no more than one-third of a distance of the p-pillar.

4 . The Schottky rectifier device of claim 1 , wherein the p-pillar includes a first region adjacent to the metal contact and having a first p-type doping concentration, and a second region adjacent to the first region and having a second p-type doping concentration lower than the first p-type doping concentration.

5 . The Schottky rectifier device of claim 4 , wherein the p-type shielding body and the first region of the p-pillar are degenerately doped and provide tunnel contacts to the metal contact.

6 . The Schottky rectifier device of claim 1 , wherein the p-pillar and the n-pillar are charge balanced, and have average doses of non-compensated acceptors and donors, respectively, that differ by no more than 1×10 13 cm −2 .

7 . The Schottky rectifier device of claim 6 , further comprising:

a charge unbalanced n-type region forming a third channel region of the n-type channel region, and disposed between the p-pillar, the n-pillar, and the SiC layer.

8 . The Schottky rectifier device of claim 1 , wherein the first n-type doping concentration of the first channel region is higher than the second n-type doping concentration of the n-pillar by a factor of 1.5 to 5.

9 . The Schottky rectifier device of claim 1 , wherein the first channel region extends to an approximate distance of the p-type shielding body.

10 . The Schottky rectifier device of claim 1 , wherein the p-pillar extends an entire distance from the metal contact to the SiC layer.

11 . The Schottky rectifier device of claim 1 , wherein the n-pillar is disposed at least partially adjacent to the p-type shielding body.

12 . A Schottky rectifier device, comprising:

a metal contact;

an n-type SiC substrate;

an epitaxial layer disposed on the n-type SiC substrate;

an array of n-pillars disposed within the epitaxial layer;

n array of p-pillars disposed within the epitaxial layer, each p-pillar of the array of p-pillars being adjacent to an n-pillar of the array of n-pillars;

an array of p-type shielding bodies formed adjacent to the metal contact and having a lateral spacing from the p-pillars; and

n-type channel regions formed within the epitaxial layer and within the lateral spacing, the n-type channel regions having a first n-type doping concentration higher than a second n-type doping concentration of the array of n-pillars.

13 . The Schottky rectifier device of claim 12 , wherein each p-pillar of the array of p-pillars extends at least half of a distance of the n-type channel region, and each p-type shielding body of the array of p-type shielding bodies extends no more than one-third of a distance of each p-pillar of the array of p-pillars.

14 . The Schottky rectifier device of claim 12 , wherein the array of p-pillars and the array of n-pillars are charge balanced, and have average doses of non-compensated acceptors and donors, respectively, that differ by no more than 1×10 13 cm −2 .

15 . A method of making a Schottky rectifier device, the method comprising:

forming a Silicon Carbide (SiC) substrate layer;

forming an n-type epitaxial region on the SiC substrate;

performing p-type ion implantation to form a p-pillar;

forming an implanted n-type region across a surface of the n-type epitaxial region;

forming a p-type shielding body in the implanted n-type region; and

forming a metal contact on the p-pillar, the n-type region, and the p-type shielding body.

16 . The method of claim 15 , comprising:

repeating the forming of the epitaxial layer and the masked ion implantation until the p-pillar reaches a specified thickness.

17 . The method of claim 15 , comprising:

forming the p-pillar to extend at least half of a distance of the n-type epitaxial region.

18 . The method of claim 15 , comprising:

forming the p-type shielding body to extend no more than one-third of a distance of the p-pillar.

19 . The method of claim 15 , comprising:

forming a mask layer on the n-type epitaxial region;

performing the p-type ion implantation through the mask layer to form the p-pillar; and

removing the mask layer.

20 . The method of claim 15 , comprising:

forming the implanted n-type region with an n-type doping concentration that is higher than the n-type epitaxial region by a factor of 1.5 to 5.