Structure and method for FinFET device with asymmetric contact
The present disclosure provides one embodiment of a method of forming an integrated circuit structure. The method includes forming a shallow trench isolation (STI) structure in a semiconductor substrate of a first semiconductor material, thereby defining a plurality of fin-type active regions separated from each other by the STI structure; forming gate stacks on the fin-type active regions; forming an inter-layer dielectric (ILD) layer filling in gaps between the gate stacks; patterning the ILD layer to form a trench between adjacent two of the gate stacks; depositing a first dielectric material layer that is conformal in the trench; filling the trench with a second dielectric material layer; patterning the second dielectric material layer to form a contact opening; and filling a conductive material in the contact opening to form a contact feature.
1. A semiconductor structure, comprising:
an active region on a semiconductor substrate;
a gate stack disposed on the active region;
a gate spacer of a first dielectric material disposed on a sidewall of the gate stack;
a contact feature landing on the active region, wherein the contact feature includes a first sidewall extending in parallel with the gate spacer and a second sidewall extending away from the gate spacer; and
a dielectric layer of a second material disposed on the first sidewall of the contact feature and free from the second sidewall of the contact feature, wherein the second dielectric material is different from the first dielectric material.
2. The semiconductor structure of claim 1 , wherein the dielectric material layer is recessed from the contact feature such that a top surface of the dielectric material layer is below a top surface of the contact feature.
3. The semiconductor structure of claim 1 , wherein
the gate stack includes a gate dielectric feature, a gate electrode on the gate dielectric feature, and a spacer on sidewalls of the gate electrode; and
the dielectric material layer is interposed between the gate spacer and the contact feature, and directly contacts the gate spacer and the contact feature.
4. The semiconductor structure of claim 3 , wherein the gate dielectric feature includes a first high k dielectric material and the first dielectric material layer includes a second high-k dielectric material different from the first high k dielectric material in composition.
5. The semiconductor structure of claim 1 , further comprising a third dielectric material that is disposed on the second sidewall of the contact feature and is free from the first sidewall of the contact feature, wherein the third dielectric material is different from the second dielectric material layer.
6. The semiconductor structure of claim 5 , further comprising
a second gate stack disposed partially on a first end of the active region and partially on a STI feature; and
a third gate stack disposed partially on a second end of the active region and partially on the STI feature.
7. The semiconductor structure of claim 1 , wherein the contact feature has an elongated shape with an L/W ratio defined as its length over its width, and wherein the L/W ratio is greater than 2.
8. A semiconductor structure, comprising:
a first and second active regions on a semiconductor substrate;
a first gate stack disposed on the first and second active regions;
a gate spacer of a first dielectric material disposed on sidewalls of the first gate stack;
a first and second contact features landing on the first and second active regions, respectively, wherein
the first and second contact features are distanced away with opposing sidewalls and are aligned with parallel sidewalls,
the first and second contact features are encompassed by a dielectric layer of a second dielectric material in a top view,
the dielectric layer contacts the parallel sidewalls and are free from the opposing sidewalls, and
the second dielectric material is different from the first dielectric material.
9. The semiconductor structure of claim 8 , wherein the dielectric layer is separated from the gate stack by the gate spacer.
10. The semiconductor structure of claim 8 , wherein
the first dielectric material includes a semiconductor-containing dielectric material; and
the second dielectric material includes a metal-containing dielectric material.
11. The semiconductor structure of claim 8 , wherein the dielectric layer directly contacts the gate spacer.
12. The semiconductor structure of claim 8 , wherein
the semiconductor structure further includes a third dielectric material having a dielectric constant lower than a dielectric constant of the second dielectric material; and
the opposing sidewalls of the first and second contact features directly contact the third dielectric material.
13. The semiconductor structure of claim 8 , wherein
the gate stack includes a gate dielectric feature having a first high k dielectric material, and
the second dielectric material includes a second high-k dielectric material different from the first high k dielectric material in composition.
14. The semiconductor structure of claim 13 , wherein
the first high k dielectric material includes a metal oxide; and
the second high-k dielectric material includes silicon nitride.
15. The semiconductor structure of claim 8 , wherein the dielectric layer is recessed from the contact feature such that a top surface of the dielectric layer is below a top surface of the contact feature.
16. The semiconductor structure of claim 8 , further comprising
a shallow trench isolation (STI) feature formed on the semiconductor substrate and surrounding the first active region;
a second gate stack disposed partially on the first end of the first active region and partially on the STI feature; and
a third gate stack disposed partially on the second end of the first active region and partially on the STI feature.
17. The semiconductor structure of claim 8 , wherein the contact feature has an L/W ratio defined as its length over its width, wherein the L/W ratio is greater than 2.
18. A semiconductor structure, comprising:
an active region on a semiconductor substrate;
a gate stack disposed on the active region;
a gate spacer of a first dielectric material disposed on sidewalls of the gate stack and enclosing the gate stack in a top view;
a contact feature landing on the active region and having long edges oriented along the gate stack and short edges oriented along the active region; and
a dielectric layer of a second dielectric material disposed on sidewalls of the long edges of the contact feature and free from sidewalls of the short edges of the contact feature, wherein the dielectric layer is enclosing the contact feature in a top view.
19. The semiconductor structure of claim 18 , wherein
the dielectric layer is a first dielectric layer;
the semiconductor structure further includes a second dielectric layer having a dielectric constant lower than a dielectric constant of the first dielectric layer; and
the short edges of the contact feature directly contact the second dielectric material layer.
20. The semiconductor structure of claim 18 , wherein
the dielectric layer is recessed from the contact feature such that a top surface of the dielectric material layer is below a top surface of the contact feature; and
the contact feature has an L/W ratio defined as its length over its width, the L/W ratio being greater than 2.