IP Library Granted Patent US 11,291,139
Granted Patent B2
US 11,291,139 · App. 17/010,440 · Granted Mar 29, 2022

Carbon nanotube-based thermal interface materials and methods of making and using thereof

Inventors: Baratunde Cola (Atlanta, GA); Leonardo Prinzi (Atlanta, GA); Craig Green (Atlanta, GA)
Assignee: CARBICE CORPORATION
H05K7/20481C01B32/16C23C14/06H01L23/373H01L23/3735H01L23/42C01B2202/24
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Quick Facts
Patent No.
US 11,291,139
App. No.
17/010,440
Granted
Mar 29, 2022
Kind
B2
Abstract

Multilayered or multitiered structures formed by stacking of vertically aligned carbon nanotube (CNT) arrays and methods of making and using thereof are described herein. Such multilayered or multitiered structures can be used as thermal interface materials (TIMs).

Claims (20)

1. A method of forming a multilayered or multitiered structure comprising the steps of:

providing at least two planar substrates, each independently comprising vertically aligned carbon nanotubes grown from opposing surfaces of the planar substrate; and

stacking the at least two planar substrates;

wherein the stacking results in at least partial interdigitation between the vertically aligned carbon nanotubes of each of the at least two planar substrates; and

wherein the multilayered or multitiered structure, when contacted with one or more surfaces of a material, conforms to asperities present on the one or more surfaces of the material.

2. The method of claim 1 , further comprising a step of applying a coating material or infiltrating a coating material onto the vertically aligned carbon nanotubes of the at least two planar substrates prior to, during, or after the stacking step.

3. The method of claim 1 , further comprising applying pressure in the range of between about 1 and 15 psi during the stacking step.

4. The method of claim 1 , wherein the at least two planar substrates are formed of metal.

5. The method of claim 2 , wherein at least some of the interstitial space between the vertically aligned carbon nanotubes, surfaces of the vertically aligned carbon nanotubes, or both, of each of the at least two planar substrates is infiltrated with the coating material, which is solidified within the vertically aligned carbon nanotubes of the arrays.

6. The method of claim 2 , wherein the coating material reduces the resistance to energy transport between the at least partially interdigitated vertically aligned carbon nanotubes interfacing between the stacked at least two planar substrates.

7. The method of claim 2 , wherein the vertically aligned carbon nanotubes interfacing between the stacked at least two planar substrates are chemically bonded by the coating material which is an adhesive, a phase change material, or a combination thereof.

8. The method of claim 7 , wherein the adhesive comprises a combination of a pressure sensitive adhesive and a thermally activatable adhesive.

9. The method of claim 7 , wherein the stacked at least two planar substrates are bonded by reflowing the coating material by applying heat or a solvent, followed by a step of drying.

10. The method of claim 1 , wherein the multilayered or multitiered structure comprises three, four, or five layers of the planar substrates.

11. The method of claim 1 , wherein the multilayered or multitiered structure is a thermal interface material.

12. The method of claim 1 , wherein the thermal interface material has an adhesion strength of up to about 1,000 psi.

13. The method of claim 11 , wherein the thermal interface material further comprises including a layer or tier formed of a material selected from the group consisting of a heat spreader, a compliant pad, and a gel present within the multilayered or multitiered structure.

14. The method of claim 11 , wherein the thermal interface material further comprises including a dielectric layer present within the multilayered or multitiered structure.

15. The method of claim 1 , further comprising including a layer or tier formed of a material selected from the group consisting of a heat spreader, a compliant pad, and a gel which is present within the multilayered or multitiered structure.

16. A multilayered or multitiered structure formed by the method of claim 1 .

Assignments (4)
SECURITY INTEREST Recorded Jun 20, 2025
From: CARBICE CORPORATION
To: GWN HOLDING, LLC
Reel/Frame 071470/0842 →
SECURITY INTEREST Recorded Jun 10, 2025
From: CARBICE CORPORATION
To: WESTERN ALLIANCE BANK
Reel/Frame 071374/0769 →
SECURITY AGREEMENT Recorded Oct 18, 2022
From: CARBICE CORPORATION
To: WESTERN ALLIANCE BANK
Reel/Frame 061701/0638 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2020
From: COLA, BARATUNDE; PRINZI, LEONARDO; GREEN, CRAIG
To: CARBICE CORPORATION
Reel/Frame 053681/0932 →
Continuity (3)
Division 15603080 · May 23, 2017
Provisional Application 62343458 · May 31, 2016
Related Publication 20200404809A1 · Dec 24, 2020