Fan-out semiconductor packages
View Patent ↗A fan-out semiconductor package includes a frame substrate having a through hole therein, a semiconductor chip in the through hole, wherein the semiconductor chip includes a chip body, a chip pad on a surface of the chip body and a passivation layer on the chip body and on the chip pad, an encapsulation layer on side surfaces of the semiconductor chip within the through hole, and a guard ring on the passivation layer and on an edge portion of the chip body.
1. A fan-out semiconductor package comprising:
a frame substrate comprising a through hole therein;
a semiconductor chip in the through hole, wherein the semiconductor chip comprises a chip body, a chip pad on a surface of the chip body, and a passivation layer on the chip body and on the chip pad;
an encapsulation layer on side surfaces of the semiconductor chip within the through hole; and
a guard ring on the passivation layer, on an edge portion of the chip body, and in direct contact with the encapsulation layer.
2. The fan-out semiconductor package of claim 1 , wherein the guard ring comprises a continuous layer extending along a perimeter of the chip body in a plan view.
3. The fan-out semiconductor package of claim 1 , wherein the guard ring is in contact with the passivation layer.
4. The fan-out semiconductor package of claim 1 , wherein the guard ring is in contact with a side surface of the encapsulation layer.
5. The fan-out semiconductor package of claim 1 , wherein a re-wiring structure that is electrically connected to the chip pad is on the frame substrate and on a surface of the semiconductor chip.
6. The fan-out semiconductor package of claim 1 , wherein a multi-layer wiring structure is within the frame substrate, and
wherein a re-wiring structure that is electrically connected to the chip pad and the multi-layer wiring structure is on the frame substrate and on a top surface of the semiconductor chip.
7. The fan-out semiconductor package of claim 1 , wherein the encapsulation layer is on a bottom surface of the chip body.
8. The fan-out semiconductor package of claim 1 , wherein the encapsulation layer is on the edge portion of the chip body and an edge portion of the passivation layer.
9. The fan-out semiconductor package of claim 1 , wherein a bottom surface of the chip body is at a lower level than a bottom surface of the frame substrate.
10. A fan-out semiconductor package comprising:
a frame substrate comprising a through hole therein;
a semiconductor chip in the through hole, wherein the semiconductor chip comprises a chip body, at least one chip pad on a surface of the chip body, a capping layer on the at least one chip pad, and a passivation layer on the chip body, on sides of the at least one chip pad, and on part of the capping layer;
an encapsulation layer on side surfaces of the semiconductor chip within the through hole; and
a guard ring on the passivation layer and on an edge portion of the chip body, the guard ring having a top surface at a level that is equal to or higher than a top surface of the encapsulation layer, and wherein the top surface of the guard ring is coplanar with a top surface of the capping layer.
11. The fan-out semiconductor package of claim 10 , wherein the guard ring comprises a continuous layer extending along a perimeter of the chip body in a plan view.
12. The fan-out semiconductor package of claim 10 , wherein a top surface of the passivation layer is at a lower level than the top surface of the encapsulation layer, and the guard ring is in contact with a side surface of the encapsulation layer.
13. The fan-out semiconductor package of claim 10 , wherein the capping layer comprises a recess portion that is recessed from the top surface of the capping layer.
14. The fan-out semiconductor package of claim 10 , wherein a re-wiring structure and a re-wiring pad electrically connected to the chip pad are on the frame substrate and on a surface of the semiconductor chip, and
wherein a package that is electrically connected to the re-wiring pad is on the re-wiring structure.
15. The fan-out semiconductor package of claim 10 , further comprising a crack-reducing ring on an edge portion of a top surface of the chip body,
wherein the crack-reducing ring is within the passivation layer.
16. A fan-out semiconductor package comprising:
a frame substrate comprising a through hole therein;
a semiconductor chip in the through hole, wherein the semiconductor chip comprises a chip body, at least one chip pad on a surface of the chip body, and a passivation layer on the chip body and on side surfaces of the at least one chip pad, wherein a bottom surface of the chip body is at a same level as a bottom surface of the frame substrate;
an encapsulation layer on side surfaces of the semiconductor chip within the through hole; and
a guard ring on the passivation layer and on an edge portion of the chip body, the guard ring having a top surface at a level that is equal to or higher than a top surface of the encapsulation layer.
17. The fan-out semiconductor package of claim 16 , further comprising a capping layer on the at least one chip pad,
wherein a top surface of the capping layer and the top surface of the guard ring are at a same level.
18. The fan-out semiconductor package of claim 16 , wherein the top surface of the encapsulation layer is at a same level as a top surface of the passivation layer.
19. The fan-out semiconductor package of claim 16 , wherein the guard ring is in contact with the passivation layer.
20. The fan-out semiconductor package of claim 16 , wherein the guard ring continuously extends along a perimeter of the chip body in a plan view.