IP Library › Granted Patent US 11,624,716
Granted Patent B2
US 11,624,716 · App. 17/025,098 · Granted Apr 11, 2023

Radiation detector and radiographic imaging device

Inventors: Shinichi Ushikura (Kanagawa, JP); Munetaka Kato (Kanagawa, JP); Haruyasu Nakatsugawa (Kanagawa, JP); Keiichi Akamatsu (Kanagawa, JP)
Assignee: FUJIFILM Corporation
G01N23/04G01N23/06G01T1/2018G01N2223/04G01N2223/40G01N2223/505
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Quick Facts
Patent No.
US 11,624,716
App. No.
17/025,098
Granted
Apr 11, 2023
Kind
B2
Abstract

A radiation detector including: a sensor substrate including a flexible base member and a layer provided on a first surface of the base member and formed with plural pixels that accumulates electrical charge generated in response to light converted from radiation; a conversion layer provided on the first surface side of the sensor substrate, the conversion layer converts radiation into the light; and an elastic layer provided on the opposite side of the conversion layer to a side provided with the sensor substrate, the elastic layer having a greater restoring force with respect to bending than the sensor substrate.

Claims (45)

1. A radiation detector comprising:

a sensor substrate including a flexible base member and a layer provided on a first surface of the base member and formed with a plurality of pixels that accumulates electrical charge generated in response to light converted from radiation;

a conversion layer provided on the first surface side of the sensor substrate, the conversion layer converts radiation into the light;

a pad area provided at the first surface side of the sensor substrate in a predetermined range spanning from an outer edge portion toward a center of the sensor substrate, the pad area including pads to which cables are connected; and

an elastic layer provided on the opposite side of the conversion layer to a side provided with the sensor substrate, the elastic layer having a greater restoring force with respect to bending than the sensor substrate,

wherein the base member satisfies at least one selected from the following group of conditions:

having a heat shrinkage ratio in a machine direction at 400° C. and at a thickness of 25 μm of no greater than 0.5%, and

having a modulus of elasticity at 500° C. of no less than 1 GPa,

wherein the elastic layer has a bending elastic modulus of from 150 MPa to 2500 MPa, and

wherein the elastic layer projects parallel to the sensor substrate with the conversion layer sandwiched between, and does not project into a region corresponding to the pad area.

2. The radiation detector of claim 1 , wherein a ratio of a coefficient of thermal expansion of the elastic layer with respect to a coefficient of thermal expansion of the conversion layer is from 0.5 to 4.

3. The radiation detector of claim 1 , wherein the elastic layer has a coefficient of thermal expansion of from 30 ppm/K to 200 ppm/K.

4. The radiation detector of claim 1 , wherein:

the sensor substrate further includes a terminal portion provided at an outer peripheral portion of the first surface of the base member, the terminal portion being connected to a cable for reading electrical charge from the pixels; and

an end portion of the elastic layer is positioned at an inner side of a region provided with the terminal portion.

5. The radiation detector of claim 4 , wherein:

the conversion layer includes a peripheral edge portion having a slope that decreases in thickness on progression toward an outer side, and a central portion surrounded by the peripheral edge portion; and

the elastic layer covers at least the central portion.

6. The radiation detector of claim 4 , wherein:

the conversion layer includes a peripheral edge portion having a slope that decreases in thickness on progression toward an outer side, and a central portion surrounded by the peripheral edge portion; and

the elastic layer covers the central portion and at least part of the peripheral edge portion.

7. The radiation detector of claim 4 , wherein:

the conversion layer includes a peripheral edge portion having a slope that decreases in thickness on progression toward an outer side, and a central portion surrounded by the peripheral edge portion; and

an end portion of the elastic layer is provided to reach at least from a region covering the central portion to a region corresponding to an outer periphery of the peripheral edge portion.

8. The radiation detector of claim 1 , wherein:

the sensor substrate further includes a terminal portion provided at an outer peripheral portion of the first surface of the base member, the terminal portion being connected to a cable for reading electrical charge from the pixels; and

the elastic layer is provided so as to reach a region opposing part or all of a region provided with the terminal portion.

9. The radiation detector of claim 1 , wherein the elastic layer is provided in a wider region than a region of the sensor substrate provided with the conversion layer.

10. The radiation detector of claim 1 , wherein an end portion of the elastic layer projects further toward an outer side than an end portion of the sensor substrate.

11. The radiation detector of claim 1 , wherein the elastic layer is provided so as to reach a region outside the conversion layer, and the elastic layer further includes a support portion that supports between an end portion of the elastic layer and the sensor substrate.

12. The radiation detector of claim 1 , further comprising a filler that fills a space between the sensor substrate and the elastic layer where the conversion layer is not present.

13. The radiation detector of claim 12 , wherein the filler contacts the sensor substrate and the elastic layer.

14. The radiation detector of claim 1 , further comprising a cohesion layer provided between the sensor substrate and the conversion layer.

15. The radiation detector of claim 1 , further comprising an elastic member provided on a second surface side of the base member on the opposite side to the first surface, the elastic member having a greater restoring force with respect to bending than the sensor substrate.

16. The radiation detector of claim 15 , wherein at least part of the elastic layer and at least part of the elastic member oppose each other across the sensor substrate and the conversion layer.

17. The radiation detector of claim 15 , wherein a ratio of a coefficient of thermal expansion of the elastic member with respect to a coefficient of thermal expansion of the conversion layer is from 0.5 to 4.

18. The radiation detector of claim 15 , wherein the elastic member has a coefficient of thermal expansion of from 30 ppm/K to 200 ppm/K.

19. A radiographic imaging device comprising:

the radiation detector of claim 1 ;

a control section that output a control signal in order to read the electrical charges accumulated in the plurality of pixels;

a drive section that output a drive signal in order to read the electrical charges from the plurality of pixels in response to the control signal; and

a signal processing section that generates and output image data in response to an input electrical signal in a case in which input with the electrical signal according to the electrical charges read from the plurality of pixels.

20. The radiographic imaging device of claim 19 , wherein the control section and the radiation detector are provided arranged in a direction intersecting a stacking direction of the base member, the layer formed with the plurality of pixels, and the conversion layer in the radiation detector.

21. The radiographic imaging device of claim 19 , further comprising a case that includes an irradiated face for irradiation with radiation, the case houses the radiation detector in a state in which out of the sensor substrate and the conversion layer of the radiation detector it is the sensor substrate that opposes the irradiated face.

22. The radiation detector of claim 1 , further comprising an elastic member provided on a second surface side of the base member at an opposite side from the first surface, the elastic member being provided from the outer edge portion of the second surface side of the base member to a region at which the pad area is provided and to a part of a region at which the conversion layer is provided.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 18, 2020
From: USHIKURA, SHINICHI; KATO, MUNETAKA; NAKATSUGAWA, HARUYASU; AKAMATSU, KEIICHI
To: FUJIFILM CORPORATION
Reel/Frame 053815/0640 →
Priority Claims (3)
JP JP2018-051690 · Mar 19, 2018 · national
JP JP2018-219696 · Nov 22, 2018 · national
JP JP2019-022148 · Feb 8, 2019 · national
Continuity (2)
Continuation PCTJP2019009425 · Mar 8, 2019
Related Publication 20210003515A1 · Jan 7, 2021
Cited By (5)
US 12,196,895 US 12,216,235 US 12,239,475 US 12,463,149 US 12,546,905