Flow control system, method, and apparatus
A mass flow control apparatus having a monolithic base. The monolithic base has a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region. The first flow component mounting region has a first inlet port and a first outlet port, the first inlet port being fluidly coupled to the gas inlet of the monolithic base. The third flow component mounting region has a first sensing port fluidly coupled to the gas outlet of the monolithic base.
1. A mass flow control apparatus comprising:
a monolithic base, the monolithic base comprising a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region;
wherein the first flow component mounting region comprises a first inlet port and a first outlet port, the first inlet port fluidly coupled to the gas inlet of the monolithic base; and
wherein the third flow component mounting region comprises a first sensing port fluidly coupled to the gas outlet of the monolithic base.
2. The mass flow control apparatus of claim 1 wherein the second flow component mounting region comprises a second inlet port, a second outlet port, and a first auxiliary port, the second outlet port fluidly coupled to the gas outlet of the monolithic base.
3. The mass flow control apparatus of claim 1 wherein the first outlet port is fluidly coupled to the second inlet port.
4. The mass flow control apparatus of claim 1 wherein the third flow component mounting region comprises a third inlet port, a third outlet port, and a second auxiliary port.
5. The mass flow control apparatus of claim 1 further comprising a fourth flow component mounting region.
6. The mass flow control apparatus of claim 5 wherein the fourth flow component mounting region comprises a fourth inlet port and a fourth outlet port, the third outlet port and the fourth outlet port being connected to the gas outlet of the monolithic base.
7. The mass flow control apparatus of claim 1 further comprising a proportional valve coupled to the first flow component mounting region and a cap component coupled to the second flow component mounting region, the cap component having a passage connecting the second inlet port to the second outlet port.
8. The mass flow control apparatus of claim 1 further comprising a cap component coupled to the second flow component mounting region.
9. The mass flow control apparatus of claim 1 further comprising a first valve coupled to the first flow component mounting region and a second valve coupled to the second flow component mounting region, the second valve fluidly coupled to the second inlet port and the second outlet port and blocking the first auxiliary port.
10. The mass flow control apparatus of claim 9 wherein the second valve is fluidly coupled to the first auxiliary port of the second flow component mounting region.
11. A mass flow control apparatus comprising:
a monolithic base, the monolithic base comprising a gas inlet, a gas outlet, a first flow component mounting region, a second flow component mounting region, and a third flow component mounting region;
a first valve coupled to the first flow component mounting region; and
a cap component coupled to the second flow component mounting region; and
a second valve fluidly coupled to the third flow component mounting region;
wherein the first flow component mounting region comprises a first inlet port and a first outlet port, the first inlet port fluidly coupled to the gas inlet of the monolithic base.
12. The mass flow control apparatus of claim 11 wherein the second flow component mounting region comprises a second inlet port, a second outlet port, and a first auxiliary port.
13. The mass flow control apparatus of claim 11 wherein the second valve comprises a laminar flow component.
14. The mass flow control apparatus of claim 11 wherein the cap component has a passage which fluidly couples the second inlet port and the second outlet port.
15. The mass flow control apparatus of claim 11 wherein the cap component has a passage which fluidly couples the second inlet port and the second outlet port.
16. The mass flow control apparatus of claim 11 wherein the cap component blocks flow through the first auxiliary port.
17. The mass flow control apparatus of claim 11 wherein the third flow component mounting region comprises a first sensing port fluidly coupled to the gas outlet of the monolithic base.
18. A gas flow control system for delivering a gas a predetermined flow rate, the gas flow control system comprising:
a gas flow path extending from a gas inlet to a gas outlet;
a proportional valve operably coupled to the gas flow path;
an on/off valve operably coupled to the gas flow path downstream of the proportional valve, a volume of the gas flow path being defined between the proportional valve and the on/off valve;
a flow restrictor having a flow impedance located downstream of the proportional valve;
a bleed valve operably coupled to the volume of the gas flow path; and
a controller configured to: (1) pressurize the volume with the gas to a target pre-flow pressure by opening the proportional valve while the on/off valve is in an off-state, the target pre-flow pressure selected to achieve a predetermined flow rate; (2) open the bleed valve by moving the bleed valve to an on-state and flow the gas at the predetermined flow rate through the bleed valve; and (3) simultaneously open the on/off valve by moving the on/off valve to an on-state and close the bleed valve by moving the bleed valve to an off-state to deliver the gas to the gas outlet at the predetermined flow rate.