Display device and method of manufacturing display device
A display device includes a substrate, a first active layer on the substrate, a first insulation layer on the first active layer, a first gate electrode on the first insulation layer, the first gate electrode overlapping the first active layer, a second insulation layer on the first gate electrode, a second active layer on the second insulation layer, a first capacitor electrode on the second insulation layer, the first capacitor electrode overlapping the first gate electrode, a third insulation layer on the second active layer and the first capacitor electrode, a second gate electrode on the third insulation layer, the second gate electrode overlapping the second active layer, and a second capacitor electrode on the third insulation layer, the second capacitor electrode overlapping the first gate electrode and electrically connected to the first capacitor electrode.
1. A display device, comprising:
a substrate;
a first active layer disposed on the substrate;
a first insulation layer disposed on the first active layer;
a first gate electrode disposed on the first insulation layer, the first gate electrode overlapping the first active layer;
a second insulation layer disposed on the first gate electrode;
a second active layer disposed on the second insulation layer;
a first capacitor electrode disposed on the second insulation layer, the first capacitor electrode overlapping the first gate electrode;
a third insulation layer disposed on the second active layer and the first capacitor electrode;
a second gate electrode disposed on the third insulation layer, the second gate electrode overlapping the second active layer; and
a second capacitor electrode disposed on the third insulation layer, the second capacitor electrode overlapping the first gate electrode and electrically connected to the first capacitor electrode.
2. The display device of claim 1 , wherein the first capacitor electrode and the second active layer include a same material.
3. The display device of claim 1 , wherein the first active layer includes polycrystalline silicon.
4. The display device of claim 1 , wherein the second insulation layer includes silicon nitride.
5. The display device of claim 1 , wherein a permittivity of the second insulation layer is greater than a permittivity of the third insulation layer.
6. The display device of claim 1 , wherein the second active layer and the first capacitor electrode each include an oxide semiconductor.
7. The display device of claim 1 , wherein the third insulation layer includes silicon oxide.
8. The display device of claim 1 , wherein a hydrogen content of the third insulation layer is less than a hydrogen content of the second insulation layer.
9. The display device of claim 1 , wherein the second capacitor electrode does not overlap the first capacitor electrode.
10. The display device of claim 1 , wherein the second capacitor electrode overlaps the first capacitor electrode.
11. The display device of claim 1 , further comprising:
a fourth insulation layer disposed on the second gate electrode and the second capacitor electrode; and
a connection electrode disposed on the fourth insulation layer, the connection electrode electrically connecting the second capacitor electrode and the first capacitor electrode.
12. The display device of claim 11 , wherein a constant voltage is applied to the connection electrode.
13. The display device of claim 11 , further comprising:
a first source electrode and a first drain electrode disposed on the fourth insulation layer and electrically connected to the first active layer; and
a second source electrode and a second drain electrode disposed on the fourth insulation layer and electrically connected to the second active layer,
wherein the connection electrode, the first source electrode, the first drain electrode, the second source electrode, and the second drain electrode are disposed on a same layer.
14. The display device of claim 13 , further comprising:
a pixel electrode electrically connected to the first source electrode or the first drain electrode;
an emission layer disposed on the pixel electrode; and
an opposite electrode disposed on the emission layer.
15. The display device of claim 1 , further comprising:
a lower electrode disposed between the first insulation layer and the second insulation layer, the lower electrode overlapping the second active layer.
16. The display device of claim 15 , wherein the lower electrode is electrically connected to the second gate electrode.
17. A method of manufacturing a display device, the method comprising:
forming a first active layer on a substrate;
forming a first insulation layer on the first active layer;
forming a first gate electrode on the first insulation layer, the first gate electrode overlapping the first active layer;
forming a second insulation layer on the first gate electrode;
forming a second active layer on the second insulation layer;
forming a first capacitor electrode on the second insulation layer, the first capacitor electrode overlapping the first gate electrode;
forming a third insulation layer on the second active layer and the first capacitor electrode;
forming a second gate electrode on the third insulation layer, the second gate electrode overlapping the second active layer; and
forming a second capacitor electrode on the third insulation layer, the second capacitor electrode overlapping the first gate electrode and electrically connected to the first capacitor electrode.
18. The method of claim 17 , wherein
the forming of the second active layer and the forming of the first capacitor electrode are simultaneously performed, and
the forming of the second gate electrode and the forming of the second capacitor electrode are simultaneously performed.
19. The method of claim 18 , wherein the forming of the second active layer and the first capacitor electrode comprises:
forming an oxide semiconductor layer on the second insulation layer;
etching the oxide semiconductor layer to form the second active layer and the first capacitor electrode; and
injecting impurities into the second active layer and the first capacitor electrode using the second gate electrode and the second capacitor electrode as masks.
20. The method of claim 18 , wherein the forming of the second gate electrode and the second capacitor electrode comprises:
forming a conductive layer on the third insulation layer; and
etching the conductive layer to form the second gate electrode and the second capacitor electrode.
21. The method of claim 18 , further comprising:
forming a fourth insulation layer on the second gate electrode and the second capacitor electrode;
forming a first contact hole in the third insulation layer and the fourth insulation layer, the first contact hole exposing the first capacitor electrode;
forming a second contact hole in the fourth insulation layer, the second contact hole exposing the second capacitor electrode; and
forming a connection electrode on the fourth insulation layer, the connection electrode filling the first contact hole and the second contact hole.
22. The method of claim 21 , wherein the forming of the first contact hole and the forming of the second contact hole are simultaneously performed.
23. The method of claim 18 , further comprising:
forming a lower electrode between the first insulation layer and the second insulation layer, the lower electrode overlapping the second active layer.
24. The method of claim 23 , wherein the forming of the first gate electrode and the forming of the lower electrode are simultaneously performed.
25. A display device, comprising:
a substrate;
a first transistor including:
a first active layer disposed on the substrate;
a first insulation layer disposed on the first active layer; and
a first gate electrode disposed on the first insulation layer, the first gate electrode overlapping the first active layer;
a capacitor including:
the first gate electrode;
a second insulation layer disposed on the first gate electrode;
a first capacitor electrode disposed on the second insulation layer;
the first capacitor electrode overlapping the first gate electrode;
a third insulation layer disposed on the first capacitor electrode; and
a second capacitor electrode disposed on the third insulation layer, the second capacitor electrode overlapping the first gate electrode and electrically connected to the first capacitor electrode; and
a second transistor including:
a second active layer disposed between the second insulation layer and the third insulation layer, the second active layer and the first capacitor electrode including a same material;
the third insulation layer; and
a second gate electrode disposed on the third insulation layer, the second gate electrode overlapping the second active layer.
26. The display device of claim 25 , wherein the first active layer includes polycrystalline silicon.
27. The display device of claim 25 , wherein the second active layer and the first capacitor electrode each include an oxide semiconductor.
28. The display device of claim 25 , wherein the second transistor further includes a lower electrode disposed between the first insulation layer and the second insulation layer, the lower electrode overlapping the second active layer.
29. The display device of claim 28 , wherein the lower electrode is electrically connected to the second gate electrode.
30. A display device, comprising:
a first active layer on a substrate;
a first gate electrode overlapping the first active layer, the first gate electrode being insulated from the first active layer;
a first capacitor electrode overlapping a first portion of the first gate electrode, the first capacitor electrode being insulated from the first gate electrode;
a second active layer not overlapping the first gate electrode, the second active layer and the first capacitor electrode including a same material;
a second gate electrode overlapping the second active layer, the second gate electrode being insulated from the second active layer; and
a second capacitor electrode overlapping a second portion of the first gate electrode, the second capacitor electrode being insulated from the first gate electrode and electrically connected to the first capacitor electrode.
31. The display device of claim 30 , wherein the second capacitor electrode does not overlap the first capacitor electrode.
32. The display device of claim 30 , wherein the second capacitor electrode overlaps the first capacitor electrode.
33. The display device of claim 30 , further comprising:
a connection electrode overlapping the first capacitor electrode and the second capacitor electrode, the connection electrode electrically connecting the second capacitor electrode and the first capacitor electrode.
34. The display device of claim 30 , wherein the second active layer and the first capacitor electrode are disposed in a same layer.