Semiconductor device manufacturing method
A semiconductor device includes a substrate, an active layer, a source electrode, a drain electrode, a p-type doped layer, a gate electrode, a passivation layer, and a field plate. The active layer is disposed on the substrate. The source electrode, the drain electrode and the p-type doped layer are disposed on the active layer. The p-type doped layer is disposed between the source electrode and the drain electrode, and has a first thickness. The gate electrode is disposed on the p-type doped layer. The passivation layer covers the gate electrode and the active layer. The field plate is disposed on the passivation layer and is electrically connected to the source electrode. The field plate includes a field dispersion portion disposed between the gate electrode and the drain electrode. The passivation layer between the field dispersion portion and the active layer has a second thickness smaller than the first thickness.
1. A method for manufacturing a semiconductor device, comprising:
providing a substrate;
forming an active layer on the substrate;
forming a p-type doped layer on the active layer, wherein the p-type doped layer has a first thickness;
forming a gate electrode on the p-type doped layer;
forming a first passivation layer to cover the gate electrode and the active layer;
forming a lower portion of a conductive plate on the first passivation layer, wherein a portion of the first passivation layer between the lower portion and the active layer has a second thickness smaller than the first thickness;
forming a second passivation layer to cover the lower portion and the first passivation layer;
forming a source via hole and a drain via hole in the second passivation layer and forming a source via hole and a drain via hole in the first passivation layer, the source via hole of the first passivation layer and the source via hole of the second passivation layer together exposing a portion of the active layer, and the drain via hole of the first passivation layer and the drain via hole of the second passivation layer together exposing another portion of the active layer, wherein the p-type doped layer is disposed between the source via holes and the lower portion, the lower portion is disposed between the p-type doped layer and the drain via holes;
forming a source electrode in the source via holes;
forming a drain electrode in the drain via holes;
forming an extending portion of the conductive plate on the second passivation layer to be electrically connected to the source electrode; and
forming a conductive element of the conductive plate to electrically connect the lower portion to the extending portion.
2. The manufacturing method of claim 1 , wherein the p-type doped layer is made of GaN or AlGaN doped with p-type dopants.
3. The manufacturing method of claim 1 , further comprising:
forming a through hole in the second passivation layer to expose the lower portion, wherein the conductive element is formed in the through hole.
4. The manufacturing method of claim 1 , further comprising:
forming an insulating layer to cover the lower portion and the first passivation layer;
forming an interlayer portion of the conductive plate on the insulating layer and above the lower portion, wherein the second passivation layer further covers the insulating layer and the interlayer portion; and
forming a source via hole and a drain via hole in the insulating layer, wherein the source electrode is formed in the source via holes, and the drain electrode is formed in the drain via holes.