Selective deposition of SiOC thin films
Methods for selectively depositing silicon oxycarbide (SiOC) thin films on a dielectric surface of a substrate relative to a metal surface without generating significant overhangs of SiOC on the metal surface are provided. The methods can include at least one plasma enhanced atomic layer deposition (PEALD) cycle including alternately and sequentially contacting the substrate with a silicon precursor, a first Ar and H 2 plasma, a second Ar plasma and an etchant.
1. A method of selectively forming a silicon oxycarbide (SiOC) thin film on a dielectric surface of a substrate relative to a second surface of the substrate by a plasma enhanced atomic layer deposition (PEALD) process, wherein the PEALD process comprises at least one deposition cycle comprising:
contacting the substrate with a vapor phase silicon precursor;
contacting the substrate with a second reactant comprising reactive hydrogen species;
contacting the substrate with plasma generated in a noble gas; and
contacting the substrate with an etchant; and
repeating the contacting steps until a silicon oxycarbide film of a desired thickness has been formed on the dielectric surface.
2. The method of claim 1 , wherein the second surface is a metal surface.
3. The method of claim 1 , wherein when the substrate is contacted with a plasma generated in a noble gas, the plasma is generated in Ar gas.
4. The method of claim 1 , wherein the reactive hydrogen species are from a hydrogen plasma.
5. The method of claim 1 , wherein the etchant comprises dilute HF.
6. The method of claim 1 , wherein the etchant comprises a plasma generated in a halide gas.
7. The method of claim 1 , wherein the etchant comprises a vapor phase halogen.
8. The method of claim 1 , wherein the second reactant comprises hydrogen and argon plasma.
9. The method of claim 8 , wherein the plasma is generated in a gas comprising H 2 and Ar.
10. The method of claim 9 , wherein the gas flows continuously throughout the deposition cycle.
11. The method of claim 1 , wherein the vapor phase silicon precursor comprises 3-methoxypropyltrimethoxysilane (MPTMS).
12. A method of selectively forming a silicon oxycarbide thin film on a dielectric surface of a substrate in a reaction space relative to a metal surface of the substrate comprising a plurality of deposition cycles, wherein at least one deposition cycle comprises:
contacting the metal and dielectric surfaces of the substrate with a silicon precursor comprising 3-methoxypropyltrimethoxysilane (MPTMS);
contacting the metal and dielectric surfaces of the substrate with a first plasma generated in a gas comprising H 2 and Ar;
contacting the metal and dielectric surfaces of the substrate with a second plasma generated in argon gas; and
contacting the metal and dielectric surfaces of the substrate with an etchant.
wherein the deposition cycle is repeated two or more times to form the SiOC thin film.
13. The method of claim 12 , wherein the gas comprising H 2 and Ar does not comprise oxygen.
14. The method of claim 12 , wherein the gas comprising H 2 and Ar does not comprise nitrogen.
15. The method of claim 12 , wherein the first plasma is generated by applying RF power of 5 Watts (W) to about 5000 W to the second reactant.
16. The method of claim 12 , wherein the deposition cycle is carried out at a process temperature of about 100° C. to about 300° C.
17. The method of claim 12 , wherein the etchant comprises dilute HF.
18. The method of claim 12 , wherein the etchant comprises a plasma.
19. The method of claim 18 , wherein the etchant comprises a plasma generated in a halide gas.
20. The method of claim 12 , wherein the steps of contacting the metal and dielectric surfaces of the substrate with the silicon precursor and contacting the metal and dielectric surfaces of the substrate with the first plasma are repeated two or more times in sequence prior to contacting the metal and dielectric surfaces of the substrate with the second plasma and the etchant.