Reticle pod with window
A door of a reticle pod includes a window having a lens, sidewall, and a ledge. The window may be positioned or affixed internally in a door between the housing and a cover. A compressive seal may be used in conjunction with the window. The sidewalls, the ledge and the compressive seal work together to enable a compression fit in the door while maintained the desired level of protection from external contaminants.
1. A reticle pod door comprising:
a door housing;
a door cover secured to the door housing;
an aperture defined in the door housing;
a window including a lens, a sidewall and a ledge, wherein the window is contained within the reticle pod door between the door housing and the door cover such that the lens is viewable through the aperture defined in the door housing and the lens extends for a length of the aperture and a width of the aperture; and
a compressive seal contacting the ledge of the window.
2. The reticle pod door of claim 1 , wherein the door cover includes an additional aperture such that the lens is viewable from a bottom of the reticle pod door.
3. The reticle pod door of claim 1 , wherein the sidewall extends downward and away from the lens and circumscribes the lens defining an outer perimeter of the window.
4. The reticle pod door of claim 3 , wherein the sidewall extends downward and away from the lens such that a lower edge of the sidewall contacts an upper surface of the door cover.
5. The reticle pod door of claim 3 , wherein the sidewall extends downward and away from the lens such that a lower edge of the sidewall is between a lower surface of the door housing an upper surface of the door cover.
6. The reticle pod door of claim 1 , wherein the ledge ends outward and away from the sidewall around an outer perimeter of the window.
7. The reticle pod door of claim 1 , wherein the ledge is defined by a recess formed in the sidewall.
8. The reticle pod door of claim 1 , wherein the ledge extends outward and away from the sidewall around an outer perimeter of the window and has a first outer perimeter greater than a second outer perimeter.
9. The reticle pod door of claim 8 , wherein a recess is defined between a lower surface of the lens and an upper surface of the ledge.
10. The reticle pod door of claim 1 , wherein the window, lens, and ledge are integrally formed in the door cover such that when the door cover is secured to the door housing the lens is received within the aperture of the door housing.
11. The reticle pod door of claim 1 , wherein the lens, sidewall, and ledge are provided as a single integral piece.
12. A reticle container comprising:
a pod cover;
a pod door, wherein the pod door includes a door housing, a door cover secured to the door housing, an aperture defined in the door housing, and a window including a lens, a sidewall and a ledge, wherein the window is retained in the pod door such that the lens is viewable through the aperture defined in the door housing and the lens fills the aperture; and
a compressive seal contacting the ledge of the window.
13. The reticle container of claim 12 , an outer pod cover and outer pod door defining an outer pod and wherein the reticle pod container further comprises an inner pod contained within the outer pod, the inner pod including the pod housing and the pod door including the window, wherein when the inner pod is contained within the outer pod, the window on the pod door of the inner pod is aligned with the window in the pod door of the outer pod.
14. The reticle container of claim 12 , wherein the sidewall of the window extends downward and away from the lens such that a lower edge of the sidewall contacts an upper surface of the door cover of the pod door.
15. The reticle container of claim 12 , wherein the sidewall of the window extends downward and away from the lens such that a lower edge of the sidewall is between a lower surface of the door housing an upper surface of the door cover.