MRAM having multilayered interconnect structures
The present invention provides a semiconductor device and a method of forming the same, and the semiconductor device includes a substrate, a first interconnect layer and a second interconnect layer. The first interconnect layer is disposed on the substrate, and the first interconnect layer includes a first dielectric layer around a plurality of first magnetic tunneling junction (MTJ) structures. The second interconnect layer is disposed on the first interconnect layer, and the second interconnect layer includes a second dielectric layer around a plurality of second MTJ structures, wherein, the second MTJ structures and the first MTJ structures are alternately arranged along a direction. The semiconductor device may obtain a reduced size of each bit cell under a permissible process window, so as to improve the integration of components.
1. A semiconductor device, comprising:
a substrate;
a first interconnect layer disposed on the substrate, the first interconnect layer comprising a first dielectric layer around a plurality of first magnetic tunneling junction (MTJ) structures and a plurality of first metal interconnections, wherein each of the first metal interconnections has a width greater than a width of each of the first MTJ structures, and the first metal interconnections and the first MTJ structures are alternately arranged in the first dielectric layer; and
a second interconnect layer disposed on the first interconnect layer, the second interconnect layer comprising a second dielectric layer around a plurality of second MTJ structures, the second MTJ structures and the first MTJ structures being alternately arranged along a direction.
2. The semiconductor device according to claim 1 , wherein the first metal interconnections are disposed directly below the second MTJ structures disposed in the second interconnect layer.
3. The semiconductor device according to claim 1 , wherein the second interconnect layer further comprises a plurality of second metal interconnections, and the second metal interconnections and the second MTJ structures are alternately arranged in the second dielectric layer.
4. The semiconductor device according to claim 3 , wherein the second metal interconnections are disposed directly above the first MTJ structures disposed in the first interconnect layer.
5. The semiconductor device according to claim 1 , further comprising:
a third interconnect layer disposed below the first interconnect layer, between the substrate and the first interconnect layer, the third interconnect layer comprising a third dielectric layer around a plurality of third metal interconnections, wherein a portion of the third metal interconnections is electrically connected to a source region disposed in the substrate.
6. The semiconductor device according to claim 5 , further comprising a fourth interconnect layer, the fourth interconnect layer comprising a fourth dielectric layer around a plurality of fourth metal interconnections.
7. The semiconductor device according to claim 6 , wherein the fourth interconnect layer is disposed below the third interconnect layer, between the substrate and the third interconnect layer, and a pitch of the fourth metal interconnections is greater than a pitch of the third metal interconnections.
8. The semiconductor device according to claim 7 , wherein the third interconnect layer is formed through a self-aligned merging process.
9. The semiconductor device according to claim 6 , wherein the fourth interconnect layer is disposed above the third interconnect layer, between the third interconnect layer and the first interconnect layer, and a pitch of the fourth metal interconnections is greater than a pitch of the third metal interconnections.
10. The semiconductor device according to claim 9 , wherein the fourth interconnect layer is formed through a self-aligned merging process.