Method for processing a lithium tantalate crystal substrate
A method for processing a lithium tantalate crystal substrate includes providing a lithium tantalate crystal substrate, roughening the lithium tantalate crystal substrate, providing a catalytic agent, bringing the lithium tantalate crystal substrate and the catalytic agent into contact with each other after the lithium tantalate crystal substrate is roughened, and subjecting the lithium tantalate crystal substrate to a reduction treatment. The reduction treatment is conducted at a temperature not higher than a Curie temperature of the lithium tantalate crystal substrate. The catalytic agent is selected from the group consisting of metal powder, metal gas, and metal carbonate powder.
1. A method for processing a lithium tantalate crystal substrate, comprising:
providing a lithium tantalate crystal substrate;
roughening the lithium tantalate crystal substrate via a chemical etching treatment;
providing a catalytic agent;
bringing the lithium tantalate crystal substrate and the catalytic agent into contact with each other after the lithium tantalate crystal substrate is roughened; and
subjecting the lithium tantalate crystal substrate to a reduction treatment,
wherein the reduction treatment is conducted at a temperature not higher than a Curie temperature of the lithium tantalate crystal substrate, and
wherein the catalytic agent is selected from the group consisting of metal powder, metal gas, and metal carbonate powder.
2. The method as claimed in claim 1 , wherein the lithium tantalate crystal substrate is subjected to lapping to have a reduced thickness before the lithium tantalate crystal substrate is roughened.
3. The method as claimed in claim 1 , wherein the lithium tantalate crystal substrate is roughened to have a surface roughness that ranges from 0.1 μm to 10 μm.
4. The method as claimed in claim 3 , wherein the lithium tantalate crystal substrate is roughened to have a surface roughness that ranges from 0.1 μm to 3 μm.
5. The method as claimed in claim 1 , wherein the catalytic agent includes a metal material selected from the group consisting of aluminum, copper, zinc, iron, lithium, and combinations thereof.
6. The method as claimed in claim 1 , wherein the chemical etching treatment is a wet etching treatment.
7. The method as claimed in claim 1 , wherein the reduction treatment is conducted in the presence of a gas selected from the group consisting of a hydrogen gas, a carbon monoxide gas, a nitrogen gas, and combinations thereof.
8. The method as claimed in claim 7 , wherein the gas has a flow rate ranging from 0.3 to 5.0 liters per minute.
9. The method as claimed in claim 1 , wherein the temperature for conducting the reduction treatment ranges from 350° C. to 600° C.
10. The method as claimed in claim 9 , wherein the reduction treatment is conducted for 1 to 10 hours.
11. The method as claimed in claim 1 , wherein the reduction treatment is conducted at a pressure ranging from 0.1 kPa to 20 kPa.
12. A method for processing a lithium tantalate crystal substrate, comprising:
providing a lithium tantalate crystal substrate;
roughening the lithium tantalate crystal substrate;
providing a catalytic agent;
bringing the lithium tantalate crystal substrate and the catalytic agent into contact with each other after the lithium tantalate crystal substrate is roughened; and
subjecting the lithium tantalate crystal substrate to a reduction treatment,
wherein the reduction treatment is conducted at a temperature not higher than a Curie temperature of the lithium tantalate crystal substrate,
wherein the catalytic agent is selected from the group consisting of metal powder, metal gas, and metal carbonate powder, and
wherein the lithium tantalate crystal substrate is roughened to have a surface roughness that ranges from 0.1 μm to 10 μm.
13. The method as claimed in claim 12 , wherein the reduction treatment is conducted at a pressure ranging from 0.1 kPa to 20 kPa.
14. The method as claimed in claim 12 , wherein the catalytic agent includes a metal material selected from the group consisting of aluminum, copper, zinc, iron, lithium, and combinations thereof.
15. The method as claimed in claim 12 , wherein the lithium tantalate crystal substrate is roughened to have a surface roughness that ranges from 0.1 μm to 3 μm.
16. A method for processing a lithium tantalate crystal substrate, comprising:
providing a lithium tantalate crystal substrate;
roughening the lithium tantalate crystal substrate;
providing a catalytic agent;
bringing the lithium tantalate crystal substrate and the catalytic agent into contact with each other after the lithium tantalate crystal substrate is roughened; and
subjecting the lithium tantalate crystal substrate to a reduction treatment,
wherein the reduction treatment is conducted at a temperature not higher than a Curie temperature of the lithium tantalate crystal substrate,
wherein the catalytic agent is selected from the group consisting of metal powder, metal gas, and metal carbonate powder, and
wherein the reduction treatment is conducted at a pressure ranging from 0.1 kPa to 20 kPa.
17. The method as claimed in claim 16 , wherein the catalytic agent includes a metal material selected from the group consisting of aluminum, copper, zinc, iron, lithium, and combinations thereof.