Method for manufacturing a semiconductor device having a dummy section
There is provided a semiconductor device comprising a semiconductor substrate having an active area in which a plurality of active elements are formed, and a non-active area excepting the active area; at least one electrode pad electrically connected to any of the active elements. At least one Through Silicon VIA electrode is formed, being electrically connected to the electrode pad by way of the non-active area. The non-active area has an insulating region obtained by forming an insulating film on the semiconductor substrate, and a dummy section obtained by leaving a base material of the semiconductor substrate in the insulating region. The dummy section is provided in a position where an outer edge of the Through Silicon VIA electrode does not intersect with the boundary between the insulating region and the dummy section.
1. A method for manufacturing a semiconductor device, comprising:
providing a semiconductor substrate having an obverse surface and a reverse surface opposite to the obverse surface;
forming a shallow-trench-isolation region of an insulating film on the obverse surface;
forming, in the shallow-trench-isolation region, a plurality of island-shaped dummy portions and a ring-shaped dummy portion which is surrounded with the island-shaped dummy portions and has a distance across being larger than that of each of the island-shaped dummy portions, wherein each of the island-shaped dummy portions and the ring-shaped dummy portion has a top face coplanar with a top face of the shallow-trench-isolation region and consists of the same material as the semiconductor substrate;
forming a plurality of active elements on the obverse surface to define an element-absence area provided adjacent to the active elements on the obverse surface, the element-absence area being free of any of the active elements;
forming an interlayer insulating film on and over the active elements and the element-absence area;
forming an electrode pad so as to be buried inside the interlayer insulating film and electrically connected to one or more of the active elements; and
forming a Through Silicon VIA hole penetrating between an inner edge and an outer edge of the ring-shaped dummy portion from the reverse surface of the semiconductor substrate to the obverse surface to form a Through Silicon VIA electrode to be electrically connected to the electrode pad,
wherein some island-shaped dummy portions are formed inside of the inner edge of the ring-shaped dummy portion.
2. The method for manufacturing the semiconductor device of claim 1 , wherein the Through Silicon VIA hole has a first aperture part on the electrode pad and a second aperture part on the reverse surface of the semiconductor substrate, the second aperture part being larger than the first aperture part.
3. The method for manufacturing the semiconductor device of claim 2 , wherein the first aperture part is circular.
4. The method for manufacturing the semiconductor device of claim 1 , wherein the island-shaped dummy portions formed inside of the inner edge of the ring-shaped dummy portion are arranged in an array.
5. The method of manufacturing the semiconductor device of claim 1 , wherein the shallow-trench-isolation region is discontinuous and is disrupted by the ring-shaped dummy portion from a plan view.
6. The method of manufacturing the semiconductor device of claim 1 , wherein the ring-shaped dummy portion is a rectangular ring-shaped dummy portion.
7. A method for manufacturing a semiconductor device, comprising:
providing a semiconductor substrate having an obverse surface and a reverse surface opposite to the obverse surface;
forming a plurality of active elements on the obverse surface to define an element-absence area provided adjacent to the active elements on the obverse surface, the element-absence area being free of any of the active elements;
forming a plurality of island-shaped dummy portions and a ring-shaped dummy portion on the obverse surface and in the element-absence area, wherein the ring-shaped dummy portion has a distance across being larger than that of each of the island-shaped dummy portions, and the island-shaped dummy portions and the ring-shaped dummy portion consist of the same material as the semiconductor substrate;
forming an interlayer insulating film on and over the active elements and the element-absence area;
forming an electrode pad so as to be buried inside the interlayer insulating film and electrically connected to one or more of the active elements; and
forming a Through Silicon VIA hole penetrating between an inner edge and an outer edge of the ring-shaped dummy portion from the reverse surface of the semiconductor substrate to the obverse surface to form a Through Silicon VIA electrode to be electrically connected to the electrode pad, wherein a first set of the island-shaped dummy portions is formed inside of the inner edge of the ring-shaped dummy portion.
8. The method for manufacturing the semiconductor device of claim 7 , wherein the Through Silicon VIA hole has a first aperture part on the electrode pad and a second aperture part on the reverse surface of the semiconductor substrate, the second aperture part being larger than the first aperture part.
9. The method for manufacturing the semiconductor device of claim 8 , wherein the first aperture part is circular.
10. The method for manufacturing the semiconductor device of claim 7 , wherein the first set of the island-shaped dummy portions formed inside of the inner edge of the ring-shaped dummy portion is arranged in an array.
11. The method for manufacturing the semiconductor device of claim 7 , wherein a second set of the island-shaped dummy portion is formed outside of the outer edge of the ring-shaped dummy portion.
12. The method for manufacturing the semiconductor device of claim 7 , wherein the ring-shaped dummy portion is a rectangular ring-shaped dummy portion.
13. The method for manufacturing the semiconductor device of claim 7 , wherein each of the island-shaped dummy portions is rectangular from a plan view.
14. A method for manufacturing a semiconductor device having an active region and a non-active region adjacent to the active region, comprising:
providing a semiconductor substrate having an obverse surface and a reverse surface opposite to the obverse surface;
forming a shallow-trench-isolation region of an insulating film on the obverse surface, wherein the shallow-trench-isolation region is located within the non-active region;
forming, in the shallow-trench-isolation region, a plurality of island-shaped dummy portions and a ring-shaped dummy portion, wherein each of the island-shaped dummy portions and the ring-shaped dummy portion has a top face coplanar with a top face of the shallow-trench-isolation region and consists of the same material as the semiconductor substrate;
forming a plurality of active elements on the obverse surface and in the active region;
forming an interlayer insulating film on the obverse surface;
forming an electrode pad so as to be buried inside the interlayer insulating film and electrically connected to one or more of the active elements; and
forming a Through Silicon VIA hole penetrating between an inner edge and an outer edge of the ring-shaped dummy portion from the reverse surface of the semiconductor substrate to the obverse surface to form a Through Silicon VIA electrode to be electrically connected to the electrode pad, wherein some island-shaped dummy portions are formed inside of the inner edge of the ring-shaped dummy portion and some island-shaped dummy portions are formed outside of the outer edge of the ring-shaped dummy portion.
15. The method for manufacturing the semiconductor device of claim 14 , wherein the Through Silicon VIA hole has a first aperture part on the electrode pad and a second aperture part on the reverse surface of the semiconductor substrate, the second aperture part being larger than the first aperture part.
16. The method for manufacturing the semiconductor device of claim 15 , wherein the first aperture part is circular.
17. The method for manufacturing the semiconductor device of claim 14 , wherein the island-shaped dummy portions formed inside of the inner edge of the ring-shaped dummy portion are arranged in an array.
18. The method for manufacturing the semiconductor device of claim 14 , wherein the shallow-trench-isolation region is discontinuous and is disrupted by the ring-shaped dummy portion from a plan view.
19. The method for manufacturing the semiconductor device of claim 14 , wherein the ring-shaped dummy portion is a rectangular ring-shaped dummy portion.
20. The method for manufacturing the semiconductor device of claim 14 , wherein each of the island-shaped dummy portions is rectangular from a plan view.