CMP polishing pad with window having transparency at low wavelengths and material useful in such window
View Patent ↗The polishing pad is useful in chemical mechanical polishing. The polishing pad includes a polishing portion having a top polishing surface and a polishing material. There is an opening through the polishing pad and a transparent window within the opening. The transparent window is secured to the polishing pad. The window includes a polyurethane composition formed by reacting, in the presence of a hard segment inhibitor for reducing size of hard segment domains, a polymeric polyol, a polyisocyanate and a curing agent. The curing agent includes three or more hydroxyl groups forming hard segments and the polyurethane composition is an amorphous mixture of hard segments in a soft segments matrix and is free of carbon-carbon double bonds.
1. A polishing pad useful in chemical mechanical polishing comprising
a polishing portion having a top polishing surface and a polishing material,
an opening through the polishing pad, and
a transparent window within the opening in the polishing pad, the transparent window being secured to the polishing pad wherein the window comprises a polyurethane composition formed by reacting a polymeric polyol, a polyisocyanate, and a curing agent comprising three or more hydroxyl groups forming hard segments, the reacting being in the presence of a hard segment inhibitor for reducing size of hard segment domains wherein the hard segment inhibitor is a sulfate, sulfonate or phosphate ester of a polyalkylene oxide and wherein the polyurethane composition is an amorphous mixture of hard segments in a soft segments matrix and the polyurethane composition is free of carbon-carbon double bonds and wherein the transparent window has a Shore D Hardness no greater than 75.
2. The polishing pad of claim 1 where in the polymeric polyol is a polymeric diol that is free of carbon-carbon double bonds and has a number average molecular weight in the range of 300 to 4000.
3. The polishing pad of claim 1 wherein the hard segment inhibitor is an anionic or non-ionic additive that is soluble in liquid polyurethane that is free of carbon-carbon double bonds.
4. The polishing pad of claim 1 wherein the hard segment inhibitor is a phosphate ester of a polyalkylene oxide.
5. The polishing pad of claim 1 wherein the curing agent comprises 3 or 4 hydroxyl groups, has a molecular weight in the range of 100 to 4000 and is free of carbon-carbon double bonds.
6. The polishing pad of claim 1 wherein the polyisocyanate is a diisocyanate free of carbon-carbon double bonds.
7. The polishing pad of claim 1 wherein the window has a double pass transmittance at 250 nm of at least 1%.
8. The polishing pad of claim 1 wherein the window has a double pass transmittance at 280 nm of at least 1% and at least one of (i) a tensile modulus in the range of 3000 to 60,000 psi (20.7 to 414 MPa) and (ii) a Shore D Hardness less than 60.
9. The polishing pad of claim 1 wherein either the polymeric diol is first reacted with the polyisocyanate to form a prepolymer and then the prepolymer is reacted with the curing agent, or the polymeric diol, the polyisocyanate and the curing agent are all combined and then reacted.
10. The polishing pad of claim 1 wherein the window is characterized by a double pass transmittance at 250 nm of at least 1%, a Shore D Hardness of no greater than 60 and a tensile modulus of 3,000 psi (20.7 MPa) to 70,000 psi (483 MPa).