Polymers useful as surface leveling agents
Disclosed herein is a copolymer comprising first polymerized units of the formula (1); wherein: R 1 is H or a substituted or unsubstituted C 1 -C 6 alkyl group; and R 2 is a substituted or unsubstituted C 3 -C 20 alkyl group that optionally includes one or more of —O—, —S—, —N—, —C(O)—, or —C(O)O—, —N—C(O)—, —C(O)—NR—; wherein R is H or a substituted or unsubstituted C 1 -C 6 alkyl group; and second polymerized units of the formula (2): wherein: R 3 is a substituted or unsubstituted C 1 -C 6 alkyl group that optionally includes one or more of —O—, —N—, —S—, —C(O)—, or —C(O)O—; wherein the first polymerized units and the second polymerized units are chemically different, and the copolymer is free of fluorine.
1. A copolymer comprising:
first polymerized units of the formula (1):
wherein: R 1 is H or a substituted or unsubstituted C 1 -C 6 alkyl group; and R 2 is a substituted or unsubstituted C 3 -C 20 alkyl group that optionally includes one or more of —O—, —S—, —N—, —C(O)—, or —C(O)O—, —N—C(O)—, —C(O)—NR—; where R is H or a substituted or unsubstituted C 1 -C 6 alkyl group; wherein R 2 has a branched structure; and
second polymerized units of the formula (2):
wherein: R 3 is a substituted or unsubstituted C 1 -C 6 alkylene group that optionally includes one or more of —O—, —N—, —S—, —C(O)—, or —C(O)O—;
wherein the first polymerized units and the second polymerized units are chemically different, and the copolymer is free of fluorine; and wherein the first polymerized units of the formula (1) are present in the copolymer in an amount of greater than 60 mol %, based on the total number of moles in the copolymer.
2. The copolymer of claim 1 , where the copolymer further comprises a third polymerized unit of formula (3);
wherein R 4 is a C2 to C6 alkylene that may optionally be substituted with one or more of —O—, —S—, —N—, —C(O)—, or —C(O)O—, —N—C(O)—, or —C(O)—NR—; where R is H or a substituted or unsubstituted C 1 -C 6 alkyl group.
3. The copolymer of claim 2 , wherein the first polymerized units are of the formula (1-1), the second polymerized units are of the formula (2-1), and further comprising third polymerized units of the formula (4):
wherein: R 4 is a substituted or unsubstituted C 3 -C 20 alkyl group that optionally includes one or more of —O—, —S—, —N—, —C(O)—, or —C(O)O—, wherein R 4 has a branched structure;
4. A composition comprising the copolymer of claim 1 , and a solvent.
5. A coating method, comprising:
applying a layer of a composition of claim 4 on a substrate.
6. A pattern formation method, comprising:
applying a layer of a composition of claim 4 on a substrate;
exposing the composition layer to activating radiation; and
developing the composition layer to provide a resist relief image.
7. A composition comprising: a copolymer comprising:
first polymerized units of the formula (1):
wherein: R 1 is H or a substituted or unsubstituted C 1 -C 6 alkyl group; and R 2 is a substituted or unsubstituted C 3 -C 20 alkyl group that optionally includes one or more of —O—, —S—, —N—, —C(O)—, or —C(O)O—, —N—C(O)—, —C(O)—NR—; where R is H or a substituted or unsubstituted C 1 -C 6 alkyl group; and
second polymerized units of the formula (2):
wherein: R 3 is a substituted or unsubstituted C 1 -C 6 alkylene group that optionally includes one or more of —O—, —N—, —S—, —C(O)—, or —C(O)O—; wherein the first polymerized units and the second polymerized units are chemically different, and the copolymer is free of fluorine; and
wherein the first polymerized units of the formula (1) are present in the copolymer in an amount of greater than 60 mol %, based on the total number of moles in the copolymer;
a matrix polymer that comprises an acid-decomposable group; and
a photoacid generator.
8. A composition comprising: a copolymer comprising:
first polymerized units of the formula (1):
wherein: R 1 is H or a substituted or unsubstituted C 1 -C 6 alkyl group; and R 2 is a substituted or unsubstituted C 3 -C 20 alkyl group that optionally includes one or more of —O—, —S—, —N—, —C(O)—, or —C(O)O—, —N—C(O)—, —C(O)—NR—; where R is H or a substituted or unsubstituted C 1 -C 6 alkyl group; and
second polymerized units of the formula (2):
wherein: R 3 is a substituted or unsubstituted C 1 -C 6 alkylene group that optionally includes one or more of —O—, —N—, —S—, —C(O)—, or —C(O)O—; wherein the first polymerized units and the second polymerized units are chemically different, and the copolymer is free of fluorine; and
wherein the first polymerized units of the formula (1) are present in the copolymer in an amount of greater than 60 mol %, based on the total number of moles in the copolymer;
a matrix polymer; and
a thermal acid generator.
9. A composition comprising: a copolymer comprising:
first polymerized units of the formula (1):
wherein: R 1 is H or a substituted or unsubstituted C 1 -C 6 alkyl group; and R 2 is a substituted or unsubstituted C 3 -C 20 alkyl group that optionally includes one or more of —O—, —S—, —N—, —C(O)—, or —C(O)O—, —N—C(O)—, —C(O)—NR—; where R is H or a substituted or unsubstituted C 1 -C 6 alkyl group; and
second polymerized units of the formula (2):
wherein: R 3 is a substituted or unsubstituted C 1 -C 6 alkylene group that optionally includes one or more of —O—, —N—, —S—, —C(O)—, or —C(O)O—; wherein the first polymerized units and the second polymerized units are chemically different, and the copolymer is free of fluorine; and
wherein the first polymerized units of the formula (1) are present in the copolymer in an amount of greater than 60 mol %, based on the total number of moles in the copolymer;
a matrix polymer; and
a crosslinking agent.