Method for processing a 3D integrated circuit and structure
A method for processing a 3D integrated circuit, the method including: providing a first level including a first wafer, the first wafer including a first crystalline substrate, a plurality of first transistors, and first copper interconnecting layers, where the first copper interconnecting layers at least interconnect the plurality of first transistors; processing a second level including a second wafer, the second wafer including a second crystalline substrate, a plurality of second transistors, and second copper interconnecting layers, where the second copper interconnecting layers at least interconnect the plurality of second transistors; then forming a bonded structure by bonding the second level to the first level, where the bonding includes metal to metal bonding, where the bonding includes oxide to oxide bonding; and then performing a lithography process to define dice lines for the bonded structure; and etching the dice lines.
1. A method for processing a 3D integrated circuit, the method comprising:
providing a first level comprising a first wafer, said first wafer comprising a first crystalline substrate, a plurality of first transistors, and first copper interconnecting layers,
wherein said first copper interconnecting layers at least interconnect said plurality of first transistors;
processing a second level comprising a second wafer, said second wafer comprising a second crystalline substrate, a plurality of second transistors, and second copper interconnecting layers,
wherein said second copper interconnecting layers at least interconnect said plurality of second transistors,
wherein said first copper interconnecting layers and said second copper interconnecting layers comprise barrier metals and oxide; then
forming a bonded structure by bonding said second level to said first level,
wherein said bonding comprises metal to metal bonding,
wherein said bonding comprises oxide to oxide bonding; and then
performing a lithography process to define dice lines for said bonded structure; and
etching said dice lines.
2. The method of claim 1 , further comprising:
forming a via through said second crystalline substrate,
wherein said via has a radius of less than 1 micro-meter.
3. The method of claim 1 , further comprising:
providing a process step of gate replacement for at least one of said plurality of second transistors,
wherein said processing a second level comprises said providing a process step of gate replacement.
4. The method of claim 1 ,
wherein said second level comprises DRAM memory.
5. The method of claim 1 ,
wherein said first level comprises memory control circuits, and
wherein said second level comprises a plurality of memory cells.
6. The method of claim 1 , further comprising:
processing vias through said second crystalline substrate,
wherein a connection from said 3D integrated circuit to an external device comprises at least one of said vias.
7. The method of claim 1 ,
wherein said second crystalline substrate is thinned by a grinding and/or an etch process.
8. A method for processing a 3D integrated circuit, the method comprising:
providing a first level comprising a first wafer, said first wafer comprising a first crystalline substrate, a plurality of first transistors, and first copper interconnecting layers,
wherein said first copper interconnecting layers at least interconnect said plurality of first transistors;
processing a second level comprising a second wafer, said second wafer comprising a second crystalline substrate, a plurality of second transistors, and second copper interconnecting layers,
wherein said second copper interconnecting layers at least interconnect said plurality of second transistors,
wherein said first copper interconnecting layers and said second copper interconnecting layers comprise barrier metals and oxide; then
forming a bonded structure by bonding said second level to said first level,
wherein said bonding comprises metal to metal bonding,
wherein said bonding comprises oxide to oxide bonding; and then
thinning said second crystalline substrate by a grinding and/or an etch process.
9. The method of claim 8 , further comprising:
forming a via through said second crystalline substrate,
wherein said via has a radius of less than 1 micro-meter.
10. The method of claim 8 , further comprising:
providing a process step of gate replacement for at least one of said plurality of second transistors,
wherein said processing a second level comprises said providing a process step of gate replacement.
11. The method of claim 8 ,
wherein said second level comprises DRAM memory.
12. The method of claim 8 ,
wherein said first level comprises memory control circuits, and
wherein said second level comprises a plurality of memory cells.
13. The method of claim 8 , further comprising:
processing vias through said second crystalline substrate,
wherein a connection from said 3D integrated circuit to an external device comprises at least one of said vias.
14. The method of claim 8 , further comprising:
providing a process step of gate replacement for at least one of said first transistors.
15. A method for processing a 3D integrated circuit, the method comprising:
providing a first level comprising a first wafer, said first wafer comprising a first crystalline substrate, a plurality of first transistors, and first copper interconnecting layers,
wherein said first copper interconnecting layers at least interconnect said plurality of first transistors;
processing a second level comprising a second wafer, said second wafer comprising a second crystalline substrate, a plurality of second transistors, and second copper interconnecting layers,
wherein said second copper interconnecting layers at least interconnect said plurality of second transistors,
wherein said first copper interconnecting layers and said second copper interconnecting layers comprise barrier metals and oxide; then
forming a bonded structure by bonding said second level to said first level,
wherein said bonding comprises metal to metal bonding,
wherein said bonding comprises oxide to oxide bonding; and
processing vias through said first crystalline substrate,
wherein connections to external devices comprise said vias.
16. The method of claim 15 , further comprising:
thinning said second crystalline substrate by a grinding and/or an etch process.
17. The method of claim 15 , further comprising:
providing a process step of gate replacement for at least one of said plurality of second transistors,
wherein said processing a second level comprises said providing a process step of gate replacement.
18. The method of claim 15 ,
wherein said first level comprises memory control circuits, and
wherein said second level comprises a plurality of memory cells.
19. The method of claim 15 , further comprising:
processing second vias through said second crystalline substrate,
wherein a connection from said 3D integrated circuit to an external device comprises at least one of said second vias.
20. The method of claim 15 , further comprising:
performing a lithography process to define dice lines for said bonded structure; and
etching said dice lines.