3D semiconductor device and structure with NAND logic
A 3D semiconductor device, the device including: a first level including a single crystal layer and a plurality of first transistors; a first metal layer including interconnects between the plurality of first transistors, where the interconnects between the plurality of first transistors includes forming a plurality of logic gates; a plurality of second transistors atop at least a portion of the first metal layer, where at least six of the plurality of first transistors are connected in series forming at least a portion of a NAND logic structure, where the plurality of second transistors are vertically oriented transistors, and where the plurality of second transistors are at least partially directly atop of the NAND logic structure; and a second metal layer atop at least a portion of the plurality of second transistors, where the second metal layer is aligned to the first metal layer with less than 150 nm misalignment, and where at least one of the second transistors is a junction-less transistor.
1. A 3D semiconductor device, the device comprising:
a first level comprising a single crystal layer and a plurality of first transistors;
a first metal layer comprising interconnects between said plurality of first transistors,
wherein said interconnects between said plurality of first transistors comprises forming a plurality of logic gates;
a plurality of second transistors atop at least a portion of said first metal layer,
wherein at least six of said plurality of first transistors are connected in series forming at least a portion of a NAND logic structure,
wherein said plurality of second transistors are vertically oriented transistors, and
wherein said plurality of second transistors are at least partially directly atop of said NAND logic structure; and
a second metal layer atop at least a portion of said plurality of second transistors,
wherein said second metal layer is aligned to said first metal layer with less than 150 nm misalignment,
wherein at least one of said plurality of second transistors comprises a gate all around structure, and
wherein at least one of said second transistors is a junction-less transistor.
2. The 3D semiconductor device according to claim 1 ,
wherein said plurality of second transistors comprises a 1st second transistor and a 2nd second transistor, and
wherein said 2nd second transistor precisely overlays said 1st second transistor being formed following the same lithographic step.
3. The 3D semiconductor device according to claim 1 , further comprising:
a TSV through said single crystal layer to provide connection to an external device.
4. The 3D semiconductor device according to claim 1 ,
wherein at least one of said first transistors is connected to a source of at least one of said second transistors.
5. The 3D semiconductor device according to claim 1 ,
wherein said vertically oriented transistors is defined by having the majority of on-current through the transistor oriented vertically with respect to the orientation of said first level, and
wherein at least six of said plurality of second transistors are connected in series.
6. The 3D semiconductor device according to claim 1 , further comprising:
at least one transferred transistor,
wherein said at least one transferred transistor was first fabricated and then transferred over to reside within said device.
7. The 3D semiconductor device according to claim 1 , further comprising:
an upper level atop said second metal,
wherein said upper level comprises a mono-crystalline silicon layer.
8. A 3D semiconductor device, the device comprising:
a first level comprising a single crystal layer and a plurality of first transistors;
a first metal layer comprising interconnects between said plurality of first transistors,
wherein said interconnects between said plurality of first transistors comprises forming a plurality of logic gates;
a plurality of second transistors atop at least a portion of said first metal layer,
wherein at least six of said plurality of first transistors are connected in series forming at least a portion of a NAND logic structure,
wherein said plurality of second transistors are vertically oriented transistors, and
wherein said plurality of second transistors are at least partially directly atop said NAND logic structure; and
a second metal layer atop at least a portion of said plurality of second transistors,
wherein said second metal layer is aligned to said first metal layer with less than 150 nm misalignment,
wherein a via connects from at least one of said second transistors to at least one of said NAND logic structure, and
wherein at least one of said second transistors is a junction-less transistor.
9. The 3D semiconductor device according to claim 8 ,
wherein at least six second transistors of said plurality of second transistors are connected in series, and
wherein at least one of said plurality of second transistors comprises polysilicon.
10. The 3D semiconductor device according to claim 8 , further comprising:
a TSV through said single crystal layer, said TSV provides connection to an external device.
11. The 3D semiconductor device according to claim 8 , further comprising:
an upper level atop said second metal,
wherein said upper level comprises a mono-crystalline silicon layer.
12. The 3D semiconductor device according to claim 8 ,
wherein at least one of said plurality of second transistors comprises a source region and a channel region, and
wherein said source region and said channel region comprise a same dopant type.
13. The 3D semiconductor device according to claim 8 ,
wherein at least one of said first transistors is connected to a source of at least one of said second transistors.
14. A 3D semiconductor device, the device comprising:
a first level comprising a single crystal layer and a plurality of first transistors;
a first metal layer comprising interconnects between said plurality of first transistors,
wherein said interconnects between said plurality of first transistors comprises forming a plurality of logic gates;
a plurality of second transistors atop at least a portion of said first metal layer,
wherein at least six of said plurality of first transistors are connected in series forming at least a portion of a NAND logic structure,
wherein said plurality of second transistors are vertically oriented transistors, and
wherein said plurality of second transistors are at least partially directly atop of said NAND logic structure; and
a second metal layer atop at least a portion of said plurality of second transistors,
wherein said second metal layer is aligned to said first metal layer with less than 150 nm misalignment, and
wherein at least one of said second transistors is a junction-less transistor.
15. The 3D semiconductor device according to claim 14 ,
wherein said vertically oriented transistors is defined by having the majority of on-current through the transistor oriented vertically with respect to the orientation of said first level, and
wherein at least six of said plurality of second transistors are connected in series.
16. The 3D semiconductor device according to claim 14 ,
wherein said junction-less transistor comprises a source, a channel and a drain, and
wherein said source, said channel and said drain comprise a same dopant type.
17. The 3D semiconductor device according to claim 14 ,
wherein at least one of said plurality of second transistors has a source supply voltage or current controlled by at least one of said plurality of first transistors.
18. The 3D semiconductor device according to claim 14 , further comprising:
a third metal layer disposed above said first metal layer, and
a fourth metal layer disposed above or below said third metal layer,
wherein said third metal layer comprises a third metal interconnect, said fourth metal layer comprises a fourth metal interconnect, and said first metal layer comprises a first metal interconnect, and
wherein said third metal interconnect is substantially thicker than said first metal interconnect and said fourth metal interconnect.
19. The 3D semiconductor device according to claim 14 , further comprising:
a memory cell,
wherein said memory cell comprises at least one of said plurality of second transistors.
20. The 3D semiconductor device according to claim 14 , further comprising:
an upper level atop said second metal,
wherein said upper level comprises a mono-crystalline silicon layer.