SRAM structure with asymmetric interconnection
View Patent ↗A semiconductor structure includes a substrate having a frontside and a backside; a static random-access memory (SRAM) circuit having SRAM bit cells formed on the frontside of the substrate, wherein each of the SRAM bit cells including two inverters cross-coupled together, and a first and second pass gates coupled to the two inverters; a first bit-line disposed on the frontside of the substrate and connected to the first pass gate; and a second bit-line disposed on the backside of the substrate and connected to the second pass gate.
1. A semiconductor structure, comprising:
a substrate having a frontside and a backside;
a static random-access memory (SRAM) circuit having SRAM bit cells formed on the frontside of the substrate, wherein a first one of the SRAM bit cells including two inverters cross-coupled together, and a first and second pass-gates coupled to the two inverters;
a first bit-line disposed on the frontside of the substrate and connected to the first pass-gate; and
a second bit-line disposed on the backside of the substrate and connected to the second pass-gate.
2. The semiconductor structure of claim 1 , further comprising:
a first power line disposed on the frontside of the substrate and connected to a first type field-effect transistor (FET) of the two inverters; and
a second power line disposed on the backside of the substrate and connected to a second type FET of the two inverters.
3. The semiconductor structure of claim 2 , wherein
the first power line is a higher power line Vdd and the first type FET is a p-type FET (pFET); and
the second power line is a lower power line Vss and the second type FET is a n-type FET (nFET).
4. The semiconductor structure of claim 3 , further comprising a third power line disposed on the frontside of the substrate and connected to another nFET of the two inverters, wherein the third power line is a lower power line Vss.
5. The semiconductor structure of claim 3 , wherein
a second one of the SRAM bit cells is adjacent the first one of the SRAM bit cells;
a first bit-line of the second one of the SRAM bit cells is disposed on the backside of the substrate and connected to a second pass-gate of the second one of the SRAM bit cells; and
a second bit-line of the second one of the SRAM bit cells is disposed on the frontside of the substrate and connected to a first pass-gate of the second one of the SRAM bit cells.
6. The semiconductor structure of claim 2 , further comprising:
a frontside contact feature landing on a top surface of a source/drain feature of the first pass-gate; and
a backside contact feature landing on a bottom surface of a source/drain feature of the second pass-gate, wherein
the first power line is connected to the first pass-gate through the frontside contact feature, and
the second power line is connected to the second pass-gate through the backside contact feature.
7. The semiconductor structure of claim 1 , further comprising
a frontside contact feature landing on a top surface of a source/drain feature of the first pass-gate; and
a backside contact feature landing on a bottom surface of a source/drain feature of the second pass-gate.
8. The semiconductor structure of claim 7 , wherein
the frontside contact feature further includes a first silicide feature disposed on the top surface of the source/drain feature of the first pass-gate; and
the backside contact feature further includes a second silicide feature disposed on the bottom surface of the source/drain feature of the second pass-gate.
9. A semiconductor structure, comprising:
a substrate having a frontside and a backside;
a static random-access memory (SRAM) circuit having SRAM bit cells formed on the frontside of the substrate, wherein each of the SRAM bit cells including two inverters cross-coupled together, and a first and second pass-gates coupled to the two inverters;
a first cell of the SRAM bit cells that includes a bit-line disposed on the frontside of the substrate and connected to the first pass-gate, and a complementary bit-line disposed on the backside of the substrate and connected to the second pass-gate; and
a second cell of the SRAM bit cells that includes a bit-line disposed on the backside of the substrate and connected to the first pass-gate of the second cell, and a complementary bit-line disposed on the frontside of the substrate and connected to the second pass-gate of the second cell.
10. The semiconductor structure of claim 9 , wherein the second cell is adjacent the first cell from one side.
11. The semiconductor structure of claim 10 , wherein
a third cell of the SRAM bit cells is adjacent the second cell from an opposite side; and
the third cell of the SRAM bit cells includes a bit-line disposed on the frontside of the substrate and connected to the first pass-gate of the third cell, and a complementary bit-line disposed on the backside of the substrate and connected to the second pass-gate of the third cell.
12. The semiconductor structure of claim 9 , wherein the first cell of the SRAM bit cell further includes:
a first power line disposed on the frontside of the substrate and connected to a first type field-effect transistor (FET) of the two inverters; and
a second power line disposed on the backside of the substrate and connected to a second type FET of the two inverters.
13. The semiconductor structure of claim 12 , wherein
the first power line is a higher power line Vdd and the first type FET is a p-type FET (pFET); and
the second power line is a lower power line Vss and the second type FET is a n-type FET (nFET).
14. The semiconductor structure of claim 13 , wherein the first cell of the SRAM bit cell further includes a third power line disposed on the frontside of the substrate and connected to another nFET of the two inverters; and the third power line is a lower power line Vss.
15. The semiconductor structure of claim 14 , further comprising a third power line disposed on the frontside of the substrate and connected to another nFET of the two inverters, wherein the third power line is a lower power line Vss.
16. The semiconductor structure of claim 13 , wherein the first cell further includes:
a frontside contact feature landing on a top surface of a source/drain feature of the first pass-gate; and
a backside contact feature landing on a bottom surface of a source/drain feature of the second pass-gate, wherein
the first power line is connected to the first pass-gate through the frontside contact feature, and
the first power line is connected to the first pass-gate through the frontside contact feature.
17. The semiconductor structure of claim 16 , wherein
the frontside contact feature further includes a first silicide feature disposed on the top surface of the source/drain feature of the first pass-gate; and
the backside contact feature further includes a second silicide feature disposed on the bottom surface of the source/drain feature of the second pass-gate.
18. A method, comprising:
receiving an integrated circuit (IC) layout having a plurality of static-random-access memory (SRAM) cells;
identifying contact features of power lines and signal lines in the SRAM cells;
classifying the contact features into a first group and a second group; and
modifying the IC layout such that the first group of the contact features are configured on a frontside of a substrate and the second group of the contact features are configured on a backside of the substrate with an asymmetric structure.
19. The method of claim 18 , further comprising fabricating an IC structure according to the modified IC layout.
20. The method of claim 18 , wherein classifying the contact features into a first group and a second group further includes classifying the contact features into a first group and a second group according to contact spacing, shielding effect, RC constant, and voltage level.