Thermal imaging sensor for integration into track system
Various embodiments of systems and methods for monitoring thermal characteristics of substrates, substrate processes and/or substrate processing module components are disclosed herein. More specifically, the present disclosure provides various embodiments of a thermal imaging sensor within various substrate processing modules (e.g., a liquid dispense module, a baking module or combined bake module, an interface block, a wafer inspection system (WIS) module, a plating dispense module or another processing module) of a substrate processing system. By positioning the thermal imaging sensor at various locations within the substrate processing system, the present disclosure enables thermal data to be remotely collected from the substrate surface, a liquid dispensed onto the substrate surface, a processing space surrounding the substrate, or a component included within a substrate processing module (e.g., a liquid dispense nozzle, a spin chuck, a spin coat cup, a cooling arm, a WIS component, a heating component, etc.).
1. A system, comprising:
at least one processing module for processing a substrate;
a thermal imaging sensor positioned within the at least one processing module to obtain thermal data from the substrate, a liquid dispensed onto the substrate, or a component included within the at least one processing module, wherein the at least one processing module is a liquid dispense module, and wherein the thermal imaging sensor is mounted onto a nozzle scan arm included within the liquid dispense module, wherein the thermal imaging sensor is positioned to have a field of view that includes the substrate or spin chuck; and
a controller coupled to receive the thermal data from the thermal imaging sensor and configured to process the thermal data for fault detection monitoring, process control, substrate evaluation, equipment evaluation, process evaluation, or end-of-life prediction.
2. The system of claim 1 , wherein the thermal imaging sensor obtains the thermal data from a surface of the substrate, and wherein the controller is programmed to process the thermal data to monitor an evaporative cooling effect of solvent evaporation from the surface of the substrate.
3. The system of claim 1 , further comprising a non-transitory memory storing programming instructions and coupled to the controller, the programming instructions when executed by the controller cause the controller to process the thermal data to:
determine an average temperature of the liquid and/or an average temperature change induced on the substrate by the liquid.
4. The system of claim 1 , further comprising a non-transitory memory storing a program to be executed by the controller, the program comprising programming instructions to
determine, based on the thermal data, an across wafer temperature difference of the liquid and/or an across wafer temperature difference induced on the substrate by the liquid.
5. A system comprising:
at least one processing module for processing a substrate;
a thermal imaging sensor positioned within the at least one processing module to obtain thermal data from the substrate, a liquid dispensed onto the substrate, or a component included within the at least one processing module, wherein the at least one processing module comprises a liquid dispense module, and wherein the thermal imaging sensor is mounted onto a nozzle scan arm included within the liquid dispense module;
a controller coupled to receive the thermal data from the thermal imaging sensor and configured to process the thermal data for fault detection monitoring, process control, substrate evaluation, equipment evaluation, process evaluation, or end-of-life prediction; and
a non-transitory memory storing a program to be executed by the controller, the program comprising programming instructions to process thermal data captured at the thermal imaging sensor to monitor a temperature of a spin chuck within the liquid dispense module.
6. The system of claim 5 , wherein the programming instructions further comprise instructions for the controller to generate a feedback or feedforward process control signal based on the temperature of the spin chuck.
7. The system of claim 5 , wherein the programming instructions further comprise instructions for the controller to generate a signal indicative of an impending spin motor failure, a liquid on the spin chuck, or a worn or damaged spin chuck based on the temperature of the spin chuck.
8. A system comprising:
at least one processing module for processing a substrate;
a thermal imaging sensor positioned within the at least one processing module to obtain thermal data from the substrate, a liquid dispensed onto the substrate, or a component included within the at least one processing module, wherein the at least one processing module comprises a liquid dispense module, and wherein the thermal imaging sensor is mounted onto a nozzle scan arm included within the liquid dispense module;
a controller coupled to receive the thermal data from the thermal imaging sensor and configured to process the thermal data for fault detection monitoring, process control, substrate evaluation, equipment evaluation, process evaluation, or end-of-life prediction; and
a non-transitory memory storing a program to be executed by the controller, the program comprising programming instructions to process thermal data captured at the thermal imaging sensor from a cup included within the liquid dispense module to monitor a temperature of the cup.
9. The system of claim 8 , wherein the programming instructions further comprise instructions for the controller to generate a feedback or feedforward process control signal.
10. The system of claim 8 , wherein the programming instructions further comprise instructions for the controller to generate a signal indicative of chemical drop issues, cup type differences, or chemical residue buildup in the cup.
11. The system of claim 1 , further comprising a non-transitory memory storing a program to be executed by the controller, the program comprising programming instructions to, based on processing thermal data captured at the thermal imaging sensor, determine a temperature of a develop puddle dispensed onto a surface of the substrate.
12. The system of claim 1 , further comprising a non-transitory memory storing a program to be executed by the controller, the program comprising programming instructions to, based on processing thermal data captured at the thermal imaging sensor, determine a temperature of a chemical reaction occurring on the substrate.
13. The system of claim 1 , further comprising a non-transitory memory storing a program to be executed by the controller, the program comprising programming instructions to process thermal data captured at the thermal imaging sensor to monitor a temperature of the liquid at the nozzle and/or a position of the liquid in the nozzle.