IP Library Granted Patent US 11,938,588
Granted Patent B2
US 11,938,588 · App. 17/192,918 · Granted Mar 26, 2024

Control method of grinding water flow rate during double side grinding process

Inventors: Chien-Ming Chen (Taiwan, CN); Kin Peng Low (Lorong, SG)
Assignee: Zhonghuan Advanced Semiconductor Technology Co., Ltd.
B24B57/02B24B37/005B24B37/08
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Quick Facts
Patent No.
US 11,938,588
App. No.
17/192,918
Granted
Mar 26, 2024
Kind
B2
Abstract

A control method of a grinding water flow rate during a double side grinding process. A double side grinder used includes a grinding wheel, a feed unit and a water supply device, wherein a water inlet is disposed on the feed unit. The control method includes: prepare for grinding and complete the installation of a workpiece according to an operation procedure of the double side grinder; during a process of double side grinding, the flow rate of the water inlet is set to decrease with the shortening of the teeth length of the grinding wheel, with the flow rate of the water inlet being set to have a linear relationship with the teeth length of the grinding wheel.

Claims (36)

1. A control method of a grinding water flow rate during a double side grinding process, wherein a double side grinder used comprises a grinding wheel, a feed unit and a water supply device, a water inlet being provided on the feed unit, the control method comprising:

preparing for grinding and completing an installation of a workpiece according to an operation procedure of the double side grinder;

during a process of double side grinding, setting a flow rate of the water inlet to decrease with a shortening of a teeth length of the grinding wheel, with the flow rate of the water inlet being set to have a linear relationship with the teeth length of the grinding wheel;

wherein a functional relationship between the teeth length of the grinding wheel and the flow rate of the water inlet is:

Q

=

(

K

-

P

)

X

Xm

+

P

,

wherein:

Q is the flow rate of the water inlet at a single side, and a unit is Litres/minute;

K is a minimum set water quantity when the teeth length of the grinding wheel is at a maximum teeth length, and a unit is Litres/minute;

P is a minimum set water quantity when the teeth length of the grinding wheel is at a minimum teeth length, and a unit is Litres/minute;

Xm is the maximum teeth length of the grinding wheel, and a unit is mm; and

X is the teeth length of the grinding wheel, and a unit is mm;

wherein the teeth length X of the grinding wheel is from 0.1 mm to 6 mm;

the water flow rate control method further comprises: monitoring the teeth length of the grinding wheel in real time during a grinding process of the workpiece and transmitting the teeth length X of the grinding wheel to a controller, wherein the teeth length X of the grinding wheel during the grinding process satisfies: X=Xm−(S−M/2),

wherein:

S is a position change of the grinding wheel, and a unit is mm;

M is a grinding thickness of the workpiece, and a unit is mm.

2. The control method of the grinding water flow rate as claimed in claim 1 ,

wherein a value of K is related to D, Xm and C, and a value of P is related to D, Xn and C,

wherein D is a spacing between adjacent grinding wheel teeth, and a unit is mm;

Xn is the minimum teeth length of the grinding wheel, and a unit is mm; and

and C is a constant determined by a material and structure of grinding wheel teeth themselves.

3. The control method of the grinding water flow rate as claimed in claim 2 ,

wherein the value of K is directly proportional to D*Xm*C, and the value of P is directly proportional to D*Xn*C.

4. The control method of the grinding water flow rate as claimed in claim 2 , wherein the grinding wheel teeth are distributed at intervals, and the spacing D between the adjacent grinding wheel teeth is 0.5 mm to 2 mm.

Assignments (4)
CHANGE OF NAME Recorded Feb 6, 2024
From: ZHONGHUAN ADVANCED SEMICONDUCTOR MATERIALS CO., LTD.
To: ZHONGHUAN ADVANCED SEMICONDUCTOR TECHNOLOGY CO., LTD.
Reel/Frame 066495/0526 →
CHANGE OF NAME Recorded Feb 4, 2024
From: ZHONGHUAN ADVANCED SEMICONDUCTOR MATERIALS CO., LTD
To: ZHONGHUAN ADVANCED SEMICONDUCTOR TECHNOLOGY CO., LTD.
Reel/Frame 066489/0307 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 11, 2023
From: ZHONGHUAN ADVANCED (XUZHOU) SEMICONDUCTOR MATERIALS CO., LTD.
To: ZHONGHUAN ADVANCED SEMICONDUCTOR MATERIALS CO., LTD.
Reel/Frame 063916/0190 →
CHANGE OF NAME Recorded Jun 8, 2023
From: XUZHOU XINJING SEMICONDUCTOR TECHNOLOGY CO., LTD.
To: ZHONGHUAN ADVANCED (XUZHOU) SEMICONDUCTOR MATERIALS CO., LTD.
Reel/Frame 063889/0983 →
Priority Claims (1)
CN 202010152622.1 · Mar 6, 2020 · national
Continuity (1)
Related Publication 20210276150A1 · Sep 9, 2021