Package structure and manufacturing method thereof
A package structure includes a carrier substrate, a die, and a first redistribution structure. The carrier substrate has a first surface and a second surface opposite to the first surface. The carrier substrate includes an insulating body and through carrier vias (TCV) embedded in the insulating body. The die is disposed over the firs surface of the carrier substrate. The die is electrically connected to the TCVs. The first redistribution structure is disposed on the second surface of the carrier substrate.
1. A package structure, comprising:
a carrier substrate having a first surface and a second surface opposite to the first surface, wherein the carrier substrate comprises an insulating body and through carrier vias (TCV) embedded in the insulating body;
a die disposed over the first surface of the carrier substrate, wherein the die has an active surface and a rear surface opposite to the active surface, the die has conductive posts formed on the active surface, the active surface faces away from the insulating body, and the die is electrically connected to the TCVs; and
a first redistribution structure disposed on the second surface of the carrier substrate.
2. The package structure of claim 1 , further comprising:
an encapsulant laterally encapsulating the die; and
a second redistribution structure over the encapsulant and the die.
3. The package structure of claim 2 , wherein the insulating body has a cavity, the die and the encapsulant are located within the cavity, and the die is electrically connected to the TCVs through the second redistribution structure.
4. The package structure of claim 2 , further comprising through insulating vias (TIV) penetrating through the encapsulant, wherein the die is electrically connected to the TCVs through the second redistribution structure and the TIVs.
5. The package structure of claim 1 , wherein each TCV comprises a seed layer and a conductive layer disposed on the seed layer, and the seed layer is in physical contact with the insulating body.
6. The package structure of claim 1 , wherein each TCV has a slanted sidewall.
7. The package structure of claim 1 , wherein each TCV has a substantially straight sidewall.
8. The package structure of claim 7 , wherein the carrier substrate further comprises filling patterns sandwiched between each TCV and the insulating body.
9. The package structure of claim 8 , wherein each filling pattern has an inner sidewall contacting the corresponding TCV and an outer sidewall contacting the insulating body, the inner sidewall of each filling pattern is substantially straight, and the outer sidewall of each filling pattern is slanted.
10. The package structure of claim 8 , wherein a Young's modulus of the filling pattern ranges from about 3 GPa to about 30 GPa.
11. A package structure, comprising:
a carrier substrate, wherein the carrier substrate comprises an insulating body and through carrier vias (TCV) partially located in the insulating body, wherein a height of each TCV is larger than a thickness of the insulating body;
a die disposed over the carrier substrate, wherein the die has an active surface and a rear surface opposite to the active surface, the die has conductive posts formed on the active surface, and the active surface faces away from the insulating body; and
a redistribution structure disposed on at least one side of the carrier substrate.
12. The package structure of claim 11 , wherein the carrier substrate further comprises filling patterns sandwiched between each TCV and the insulating body.
13. The package structure of claim 11 , wherein each TCV has a substantially straight sidewall.
14. The package structure of claim 11 , further comprising an encapsulant laterally encapsulating the die.
15. The package structure of claim 14 , wherein the encapsulant further encapsulates at least a portion of each TCV.
16. A manufacturing method of a package structure, comprising:
providing a carrier substrate having a first surface and a second surface opposite to the first surface, comprising:
providing an insulating body having openings therein; and
forming through carrier vias (TCV) in the openings;
placing a die over the first surface of the carrier substrate, wherein the die has an active surface and a rear surface opposite to the active surface, the die has conductive posts formed on the active surface, and the active surface faces away from the insulating body;
laterally encapsulating the die by an encapsulant; and
forming a redistribution structure on the second surface of the carrier substrate.
17. The method of claim 16 , wherein forming the TCVs in the openings comprises:
forming a seed material layer over the insulating body and within the openings, wherein the seed material layer is in physical contact with the insulating body;
forming a conductive material layer over the seed material layer; and
removing a portion of the conductive material layer and a portion of the seed material layer until the insulating body is exposed to form a seed layer and a conductive layer within the openings.
18. The method of claim 16 , wherein forming the TCVs in the openings comprises:
placing pre-fabricated TCVs into the openings of the insulating body.
19. The method of claim 18 , wherein providing the carrier substrate further comprises forming filling patterns in the openings of the insulating body, wherein the filling patterns are sandwiched between each TCV and the insulating body.
20. The method of claim 16 , further comprising:
forming a cavity in the insulating body, wherein a depth of the cavity is smaller than a depth of each opening, and the die and the encapsulant are formed within the cavity.