Selective high-k formation in gate-last process
A method includes removing a dummy gate stack to form an opening between gate spacers, selectively forming an inhibitor film on sidewalls of the gate spacers, with the sidewalls of the gate spacers facing the opening, and selectively forming a dielectric layer over a surface of a semiconductor region. The inhibitor film inhibits growth of the dielectric layer on the inhibitor film. The method further includes removing the inhibitor film, and forming a replacement gate electrode in a remaining portion of the opening.
1. A device comprising:
a semiconductor region;
a gate spacer over the semiconductor region; and
a gate stack over the semiconductor region, wherein the gate stack comprises:
a gate dielectric over the semiconductor region, wherein at least a part of the gate dielectric is separate from the gate spacer by an air gap; and
a conductive gate electrode over the gate dielectric.
2. The device of claim 1 further comprising:
a semiconductor substrate; and
a shallow trench isolation (STI) region extending into the semiconductor substrate, wherein the semiconductor region protrudes higher than the STI region, and wherein the air gap comprises a portion directly over the STI region, and the gate dielectric comprises a portion directly over the portion of the air gap.
3. The device of claim 2 , wherein the conductive gate electrode extends on, and is in physical contact with, the STI region.
4. The device of claim 1 , wherein the gate dielectric comprises:
an interfacial layer contacting the semiconductor region; and
a high-k gate dielectric comprising a horizontal portion overlapping the interfacial layer, wherein the conductive gate electrode is in physical contact with the high-k gate dielectric.
5. The device of claim 4 , wherein the high-k gate dielectric is free from vertical portions on sidewalls of the gate spacer, and the horizontal portion of the high-k gate dielectric is spaced apart from the gate spacer.
6. The device of claim 1 further comprising an inhibitor film between the gate dielectric and the gate spacer, wherein the inhibitor film is exposed to the air gap.
7. The device of claim 6 , wherein the inhibitor film comprises silicon and a functional group selected from the group consisting of CH 3 , CH 2 , and CF 2 .
8. The device of claim 7 , wherein the inhibitor film further comprises chlorine.
9. The device of claim 1 , wherein the gate spacer is exposed to the air gap.
10. A device comprising:
a semiconductor fin;
a first gate spacer and a second gate spacer on the semiconductor fin;
a void over the semiconductor fin, wherein a first sidewall of the first gate spacer is exposed to the void;
a gate dielectric between the first gate spacer and the second gate spacer, wherein in a cross-sectional view of the device, the gate dielectric comprises a planar portion, and the planar portion comprises a second sidewall exposed to the void; and
a gate electrode overlying the gate dielectric, wherein in the cross-sectional view, the gate electrode comprises a work-function layer having a U-shape.
11. The device of claim 10 , wherein the gate electrode is in contact with both of the first gate spacer and the second gate spacer.
12. The device of claim 10 , wherein the gate dielectric is physically spaced apart from both of the first gate spacer and the second gate spacer.
13. The device of claim 10 further comprising an inhibitor film, wherein the inhibitor film contacts the first gate spacer, and is exposed to the void.
14. The device of claim 13 , wherein the inhibitor film is formed of a material different from materials of the first gate spacer and materials of the gate dielectric.
15. The device of claim 13 , wherein the gate dielectric comprises an interfacial layer contacting the semiconductor fin, and a high-k gate dielectric spaced apart from the semiconductor fin by the interfacial layer, and wherein the interfacial layer contacts the inhibitor film.
16. The device of claim 13 , wherein the inhibitor film comprises silicon and a functional group selected from the group consisting of CH 3 , CH 2 , and CF 2 .
17. The device of claim 16 , wherein the inhibitor film further comprises chlorine.
18. A device comprising:
a semiconductor substrate;
isolation regions extending into the semiconductor substrate;
a semiconductor fin between opposing portions of the isolation regions, wherein the semiconductor fin protrudes higher than the isolation regions;
a gate spacer on the semiconductor fin;
a silicon oxide layer extending on a top surface and sidewalls of the semiconductor fin, wherein the silicon oxide layer is spaced apart from the gate spacer by an air gap;
a high-k gate dielectric contacting the silicon oxide layer; and
a conductive layer over the high-k gate dielectric.
19. The device of claim 18 , wherein the conductive layer contacts the gate spacer.
20. The device of claim 18 , wherein the air gap is sealed in a region defined by the semiconductor fin, the gate spacer, the high-k gate dielectric, and the conductive layer.