Patent Application
Utility
App. No. 17/211,634
· Confirmation No. 5906
SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS
Applicant:
SHOWA DENKO K.K.
Abandoned -- After Examiner's Answer or Board of Appeals Decision
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2026-01-05 | ABN |
Abandonment | 2 | View | |
| 2025-11-24 | M327 |
Miscellaneous Communication to Applicant - No Action Count | 2 | View | |
| 2025-11-24 | APND |
Notice - Defective Notice of Appeal | 1 | View | |
| 2025-08-05 | APEA |
Examiner's Answer to Appeal Brief | 13 | View | |
| 2025-07-11 | AP.B |
Appeal Brief Filed | 17 | View | |
| 2025-07-11 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-05-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-05-13 | N/AP |
Notice of Appeal Filed | 1 | View | |
| 2025-05-13 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2025-02-13 | CTFR |
Final Rejection | 16 | View | |
| 2025-02-13 | 892 |
List of references cited by examiner | 1 | View | |
| 2025-02-13 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2025-02-13 | SRNT |
Examiner's search strategy and results | 51 | View | |
| 2025-01-31 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | — | View | |
| 2025-01-31 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2025-01-31 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2025-01-31 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2025-01-31 | CLM |
Claims | 4 | View | |
| 2025-01-31 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2025-01-31 | XT/ |
Extension of Time | 1 | View | |
| 2025-01-31 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2024-08-01 | CTNF |
Non-Final Rejection | 17 | View | |
| 2024-08-01 | 892 |
List of references cited by examiner | 1 | View | |
| 2024-08-01 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2024-08-01 | SRNT |
Examiner's search strategy and results | 50 | View | |
| 2024-05-28 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | — | View | |
| 2024-05-28 | N417.PYMT |
Electronic Fee Payment | 2 | View | |
| 2024-05-28 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2024-05-28 | CLM |
Claims | 3 | View | |
| 2024-05-28 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2024-05-28 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2024-05-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2024-05-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2024-02-29 | CTFR |
Final Rejection | 17 | View | |
| 2024-02-29 | SRFW |
Search information including classification, databases and other search related notes | 2 | View | |
| 2024-02-29 | SRNT |
Examiner's search strategy and results | 50 | View | |
| 2024-02-08 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | — | View | |
| 2024-02-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2024-02-08 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2024-02-08 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2024-02-08 | CLM |
Claims | 3 | View | |
| 2024-02-08 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2023-11-09 | CTNF |
Non-Final Rejection | 16 | View | |
| 2023-11-09 | 892 |
List of references cited by examiner | 1 | View | |
| 2023-11-09 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2023-11-09 | SRNT |
Examiner's search strategy and results | 49 | View | |
| 2023-09-27 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2023-09-27 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2023-09-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2023-09-27 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2023-09-27 | CLM |
Claims | 3 | View | |
| 2023-09-27 | REM |
Applicant Arguments/Remarks Made in an Amendment | 7 | View | |
| 2023-09-27 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2023-07-05 | CTFR |
Final Rejection | 28 | View | |
| 2023-07-05 | 892 |
List of references cited by examiner | 1 | View | |
| 2023-07-05 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2023-07-05 | SRNT |
Examiner's search strategy and results | 48 | View | |
| 2023-06-13 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2023-06-13 | CLM |
Claims | 3 | View | |
| 2023-06-13 | REM |
Applicant Arguments/Remarks Made in an Amendment | 9 | View | |
| 2023-06-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2023-06-13 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2023-03-16 | CTNF |
Non-Final Rejection | 27 | View | |
| 2023-03-16 | 892 |
List of references cited by examiner | 1 | View | |
| 2023-03-16 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2023-03-16 | SRNT |
Examiner's search strategy and results | 47 | View | |
| 2023-01-12 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2023-01-12 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2023-01-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2023-01-12 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2023-01-12 | CLM |
Claims | 3 | View | |
| 2023-01-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 8 | View | |
| 2023-01-12 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2022-10-14 | CTFR |
Final Rejection | 23 | View | |
| 2022-10-14 | 892 |
List of references cited by examiner | 1 | View | |
| 2022-10-14 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2022-10-14 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2022-10-14 | SRNT |
Examiner's search strategy and results | 35 | View | |
| 2022-09-26 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2022-09-26 | CLM |
Claims | 2 | View | |
| 2022-09-26 | REM |
Applicant Arguments/Remarks Made in an Amendment | 6 | View | |
| 2022-09-26 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2022-09-26 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2022-09-12 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2022-09-12 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2022-09-12 | FOR |
Foreign Reference | 17 | View | |
| 2022-09-12 | FOR |
Foreign Reference | 39 | View | |
| 2022-09-12 | FOR |
Foreign Reference | 13 | View | |
| 2022-09-12 | FOR |
Foreign Reference | 19 | View | |
| 2022-09-12 | FOR |
Foreign Reference | 19 | View | |
| 2022-09-12 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2022-06-27 | CTNF |
Non-Final Rejection | 15 | View | |
| 2022-06-27 | 892 |
List of references cited by examiner | 1 | View | |
| 2022-06-27 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2022-06-27 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2022-06-27 | 1449 |
List of References cited by applicant and considered by examiner | 3 | View | |
| 2022-06-27 | SRNT |
Examiner's search strategy and results | 34 | View | |
| 2022-06-27 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2022-06-27 | BIB |
Bibliographic Data Sheet | 1 | View | |
| 2022-06-27 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2022-06-03 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2022-06-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2022-04-04 | CTRS |
Requirement for Restriction/Election | 7 | View | |
| 2022-02-10 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2022-02-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2022-02-10 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2022-01-26 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2022-01-26 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2022-01-26 | FOR |
Foreign Reference | 15 | View | |
| 2022-01-26 | FOR |
Foreign Reference | 34 | View | |
| 2022-01-26 | FOR |
Foreign Reference | 9 | View | |
| 2022-01-26 | FOR |
Foreign Reference | 15 | View | |
| 2022-01-26 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2021-07-15 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2021-04-13 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2021-04-13 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2021-04-13 | FOR |
Foreign Reference | 48 | View | |
| 2021-04-13 | FOR |
Foreign Reference | 20 | View | |
| 2021-04-13 | FOR |
Foreign Reference | 19 | View | |
| 2021-04-13 | FOR |
Foreign Reference | 12 | View | |
| 2021-04-13 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2021-04-09 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2021-04-07 | CFILE |
Request for Corrected Filing Receipt | 5 | View | |
| 2021-04-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2021-04-07 | ADS |
Application Data Sheet | 1 | View | |
| 2021-04-02 | APP.FILE.REC |
Filing Receipt | 4 | View | |
| 2021-04-02 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2021-03-24 | PA.. |
Power of Attorney | 2 | View | |
| 2021-03-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2021-03-24 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2021-03-24 | A.PE |
Preliminary Amendment | 1 | View | |
| 2021-03-24 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2021-03-24 | SPEC |
Specification | 20 | View | |
| 2021-03-24 | CLM |
Claims | 2 | View | |
| 2021-03-24 | ABST |
Abstract | 1 | View | |
| 2021-03-24 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2021-03-24 | N417 |
Electronic Filing System Acknowledgment Receipt | 4 | View | |
| 2021-03-24 | TRNA |
Transmittal of New Application | 2 | View | |
| 2021-03-24 | ADS |
Application Data Sheet | 7 | View | |
| 2021-03-24 | OATH |
Oath or Declaration filed | 3 | View | |
| 2021-03-24 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2021-03-24 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Jia Yu
Yokohama-shi, JAPAN
Naoto Ishibashi
Chichibu-shi, JAPAN
Keisuke Fukada
Chichibu-shi, JAPAN
Yoshikazu Umeta
Chichibu-shi, JAPAN
Hironori Atsumi
Chichibu-shi, JAPAN
Attorneys & Agents of Record
Classification
USPC
118/730
H10P72/7614
H10P72/7611
C30B29/36
H10P14/6349
C23C16/4581
C23C16/4584
C23C16/4588
C30B25/12
H01L21/2053
Prosecution
- Examiner
- CHEN, KEATH T
- Art Unit
- 1716
- Customer No.
- 23373
- Docket No.
- Q262409
- Confirmation No.
- 5906
Foreign Priority
2018-167035
·
2018-09-06
·
JAPAN
Publication
- Pub. No.
- US20210217648A1
- Pub. Date
- 2021-07-15
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Quick Facts
- App. No.
- 17/211,634
- Filed
- 2021-03-24
- Pub. No.
- US20210217648A1
- Examiner
- CHEN, KEATH T
- Art Unit
- 1716
External Links