Semiconductor memory device
A semiconductor memory device includes a first wiring, a first memory transistor connected to the first wiring, a first transistor connected between the first wiring and the first memory transistor, a second transistor connected between the first wiring and the first transistor, and second to fourth wirings respectively connected to gate electrodes of the first memory transistor, the first transistor, and the second transistor. From a first timing to a second timing, a voltage difference between the first wiring and the third wiring is maintained at a predetermined value, a voltage difference between the third wiring and the fourth wiring is maintained at a predetermined value, a voltage of the first wiring becomes larger than a voltage of the third wiring, and the voltage of the third wiring becomes larger than a voltage of the fourth wiring.
1. A method of an erase operation of a semiconductor memory device, wherein
the semiconductor memory device comprises:
a first wiring;
a first memory transistor connected to the first wiring;
a first transistor connected between the first wiring and the first memory transistor;
a second transistor connected between the first transistor and the first memory transistor;
a second wiring connected to a gate electrode of the first memory transistor;
a third wiring connected to a gate electrode of the first transistor;
a fourth wiring connected to a gate electrode of the second transistor; and
a control circuit configured to execute an erase operation that erases data of the first memory transistor, and
in the erase operation, the control circuit:
increases a voltage of the fourth wiring at a first timing;
increases a voltage of the third wiring at a second timing after the first timing; and
controls the voltage of the fourth wiring to become larger than the voltage of the third wiring.
2. The method of an erase operation according to claim 1 , wherein
from a third timing after the second timing to a fourth timing after the third timing,
the control circuit maintains a difference between the voltage of the third wiring and the voltage of the fourth wiring to a constant value.
3. The method of an erase operation according to claim 1 , wherein
at a fifth timing before the first timing,
the control circuit controls a voltage of the first wiring to be supplied.
4. The method of an erase operation according to claim 1 , wherein
the semiconductor memory device further comprises:
a second memory transistor connected to the first wiring;
a third transistor connected between the first wiring and the second memory transistor;
a fourth transistor connected between the third transistor and the second memory transistor;
a fifth wiring connected to a gate electrode of the third transistor; and
a sixth wiring connected to a gate electrode of the fourth transistor, and
the second wiring is connected to a gate electrode of the second memory transistor.
5. The method of an erase operation according to claim 4 , wherein
the third wiring is electrically connected to the fifth wiring, and
the fourth wiring is electrically insulated from the sixth wiring.
6. The method of an erase operation according to claim 4 , wherein
in the erase operation, the control circuit:
increases a voltage of the sixth wiring at the first timing;
increases a voltage of the fifth wiring at the second timing; and
controls the voltage of the sixth wiring to become larger than the voltage of the fifth wiring.